Abstract

We have fabricated complex helical microchannel arrays with uniform diameter in silica glass using femto second laser-induced breakdown in distilled water. The generated high-speed jet and shockwave cause cavitation damage in silica glass. Distilled water injected into microchannels through a rubber hose is used for effectively ejecting the debris. The low concentration of debris in the ablated area ensure continuously femtosecond laser- induced breakdown. The distribution, coil number, coil diameter and pitch of the helical microchannel arrays can be controlled.

© 2011 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. C. M. Waits, B. Morgan, M. Kastantin, and R. Ghodssi, Sens. Actuators A 119, 245 (2005).
    [CrossRef]
  2. G. M. Whitesides, Nature 442, 368 (2006).
    [CrossRef] [PubMed]
  3. K. Jamshidi-Ghaleh, D. Abdolahpour, and N. Mansour, Laser Phys. Lett. 3, 573 (2006).
    [CrossRef]
  4. J. Atencia, S. Barnes, J. Douglas, M. Meacham, and L. Locascio, Lab Chip 7, 1567 (2007).
    [CrossRef] [PubMed]
  5. G. Kumi, C. Yanez, K. Belfield, and J. Fourkas, Lab Chip 10, 1057 (2010).
    [CrossRef] [PubMed]
  6. J. C. Love, D. B. Wolfe, H. O. Jacobs, and G. M. Whitesides, Langmuir 17, 6005 (2001).
    [CrossRef]
  7. C. Li, T. Chen, J. Si, F. Chen, X. Shi, and X. Hou, J. Micromech. Microeng. 19, 125007 (2009).
    [CrossRef]
  8. A. Tavangar, B. Tan, and K. Venkatakrishnan, J. Micromech. Microeng. 20, 085016 (2010).
    [CrossRef]
  9. F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, Opt. Lett. 35, 282 (2010).
    [CrossRef] [PubMed]
  10. Y. Li and S. Qu, Mater. Lett. 64, 1427 (2010).
    [CrossRef]
  11. Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, Opt. Lett. 26, 1912 (2001).
    [CrossRef]
  12. I. Akhatov, O. Lindau, A. Topolnikov, R. Mettin, N. Vakhitova, and W. Lauterborn, Phys. Fluids 13, 2805(2001).
    [CrossRef]
  13. C. D. Ohl, O. Lindau, and W. Lanuterborn, Phys. Rev. Lett. 80, 393 (1998).
    [CrossRef]
  14. O. Baghdassarian, H. Chu, B. Tabbert, and G. A. Williams, Phys. Rev. Lett. 86, 4934 (2001).
    [CrossRef] [PubMed]
  15. R. Fabbro, J. Fournier, P. Ballard, D. Devaux, and J. Virmont, J. Appl. Phys. 68, 775 (1990).
    [CrossRef]

2010

A. Tavangar, B. Tan, and K. Venkatakrishnan, J. Micromech. Microeng. 20, 085016 (2010).
[CrossRef]

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, Opt. Lett. 35, 282 (2010).
[CrossRef] [PubMed]

Y. Li and S. Qu, Mater. Lett. 64, 1427 (2010).
[CrossRef]

G. Kumi, C. Yanez, K. Belfield, and J. Fourkas, Lab Chip 10, 1057 (2010).
[CrossRef] [PubMed]

2009

C. Li, T. Chen, J. Si, F. Chen, X. Shi, and X. Hou, J. Micromech. Microeng. 19, 125007 (2009).
[CrossRef]

2007

J. Atencia, S. Barnes, J. Douglas, M. Meacham, and L. Locascio, Lab Chip 7, 1567 (2007).
[CrossRef] [PubMed]

2006

G. M. Whitesides, Nature 442, 368 (2006).
[CrossRef] [PubMed]

K. Jamshidi-Ghaleh, D. Abdolahpour, and N. Mansour, Laser Phys. Lett. 3, 573 (2006).
[CrossRef]

2005

C. M. Waits, B. Morgan, M. Kastantin, and R. Ghodssi, Sens. Actuators A 119, 245 (2005).
[CrossRef]

2001

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, Opt. Lett. 26, 1912 (2001).
[CrossRef]

I. Akhatov, O. Lindau, A. Topolnikov, R. Mettin, N. Vakhitova, and W. Lauterborn, Phys. Fluids 13, 2805(2001).
[CrossRef]

J. C. Love, D. B. Wolfe, H. O. Jacobs, and G. M. Whitesides, Langmuir 17, 6005 (2001).
[CrossRef]

O. Baghdassarian, H. Chu, B. Tabbert, and G. A. Williams, Phys. Rev. Lett. 86, 4934 (2001).
[CrossRef] [PubMed]

1998

C. D. Ohl, O. Lindau, and W. Lanuterborn, Phys. Rev. Lett. 80, 393 (1998).
[CrossRef]

1990

R. Fabbro, J. Fournier, P. Ballard, D. Devaux, and J. Virmont, J. Appl. Phys. 68, 775 (1990).
[CrossRef]

Abdolahpour, D.

K. Jamshidi-Ghaleh, D. Abdolahpour, and N. Mansour, Laser Phys. Lett. 3, 573 (2006).
[CrossRef]

Akhatov, I.

I. Akhatov, O. Lindau, A. Topolnikov, R. Mettin, N. Vakhitova, and W. Lauterborn, Phys. Fluids 13, 2805(2001).
[CrossRef]

Atencia, J.

J. Atencia, S. Barnes, J. Douglas, M. Meacham, and L. Locascio, Lab Chip 7, 1567 (2007).
[CrossRef] [PubMed]

Baghdassarian, O.

O. Baghdassarian, H. Chu, B. Tabbert, and G. A. Williams, Phys. Rev. Lett. 86, 4934 (2001).
[CrossRef] [PubMed]

Ballard, P.

R. Fabbro, J. Fournier, P. Ballard, D. Devaux, and J. Virmont, J. Appl. Phys. 68, 775 (1990).
[CrossRef]

Barnes, S.

J. Atencia, S. Barnes, J. Douglas, M. Meacham, and L. Locascio, Lab Chip 7, 1567 (2007).
[CrossRef] [PubMed]

Belfield, K.

G. Kumi, C. Yanez, K. Belfield, and J. Fourkas, Lab Chip 10, 1057 (2010).
[CrossRef] [PubMed]

Chen, F.

C. Li, T. Chen, J. Si, F. Chen, X. Shi, and X. Hou, J. Micromech. Microeng. 19, 125007 (2009).
[CrossRef]

Chen, T.

C. Li, T. Chen, J. Si, F. Chen, X. Shi, and X. Hou, J. Micromech. Microeng. 19, 125007 (2009).
[CrossRef]

Chen, X.

Cheng, Y.

Chu, H.

O. Baghdassarian, H. Chu, B. Tabbert, and G. A. Williams, Phys. Rev. Lett. 86, 4934 (2001).
[CrossRef] [PubMed]

Devaux, D.

R. Fabbro, J. Fournier, P. Ballard, D. Devaux, and J. Virmont, J. Appl. Phys. 68, 775 (1990).
[CrossRef]

Douglas, J.

J. Atencia, S. Barnes, J. Douglas, M. Meacham, and L. Locascio, Lab Chip 7, 1567 (2007).
[CrossRef] [PubMed]

Fabbro, R.

R. Fabbro, J. Fournier, P. Ballard, D. Devaux, and J. Virmont, J. Appl. Phys. 68, 775 (1990).
[CrossRef]

Fourkas, J.

G. Kumi, C. Yanez, K. Belfield, and J. Fourkas, Lab Chip 10, 1057 (2010).
[CrossRef] [PubMed]

Fournier, J.

R. Fabbro, J. Fournier, P. Ballard, D. Devaux, and J. Virmont, J. Appl. Phys. 68, 775 (1990).
[CrossRef]

Ghodssi, R.

C. M. Waits, B. Morgan, M. Kastantin, and R. Ghodssi, Sens. Actuators A 119, 245 (2005).
[CrossRef]

He, F.

Hou, X.

C. Li, T. Chen, J. Si, F. Chen, X. Shi, and X. Hou, J. Micromech. Microeng. 19, 125007 (2009).
[CrossRef]

Itoh, K.

Jacobs, H. O.

J. C. Love, D. B. Wolfe, H. O. Jacobs, and G. M. Whitesides, Langmuir 17, 6005 (2001).
[CrossRef]

Jamshidi-Ghaleh, K.

K. Jamshidi-Ghaleh, D. Abdolahpour, and N. Mansour, Laser Phys. Lett. 3, 573 (2006).
[CrossRef]

Jiang, Y.

Kastantin, M.

C. M. Waits, B. Morgan, M. Kastantin, and R. Ghodssi, Sens. Actuators A 119, 245 (2005).
[CrossRef]

Kumi, G.

G. Kumi, C. Yanez, K. Belfield, and J. Fourkas, Lab Chip 10, 1057 (2010).
[CrossRef] [PubMed]

Kuroda, D.

Lanuterborn, W.

C. D. Ohl, O. Lindau, and W. Lanuterborn, Phys. Rev. Lett. 80, 393 (1998).
[CrossRef]

Lauterborn, W.

I. Akhatov, O. Lindau, A. Topolnikov, R. Mettin, N. Vakhitova, and W. Lauterborn, Phys. Fluids 13, 2805(2001).
[CrossRef]

Li, C.

C. Li, T. Chen, J. Si, F. Chen, X. Shi, and X. Hou, J. Micromech. Microeng. 19, 125007 (2009).
[CrossRef]

Li, Y.

Liao, Y.

Lindau, O.

I. Akhatov, O. Lindau, A. Topolnikov, R. Mettin, N. Vakhitova, and W. Lauterborn, Phys. Fluids 13, 2805(2001).
[CrossRef]

C. D. Ohl, O. Lindau, and W. Lanuterborn, Phys. Rev. Lett. 80, 393 (1998).
[CrossRef]

Locascio, L.

J. Atencia, S. Barnes, J. Douglas, M. Meacham, and L. Locascio, Lab Chip 7, 1567 (2007).
[CrossRef] [PubMed]

Love, J. C.

J. C. Love, D. B. Wolfe, H. O. Jacobs, and G. M. Whitesides, Langmuir 17, 6005 (2001).
[CrossRef]

Mansour, N.

K. Jamshidi-Ghaleh, D. Abdolahpour, and N. Mansour, Laser Phys. Lett. 3, 573 (2006).
[CrossRef]

Meacham, M.

J. Atencia, S. Barnes, J. Douglas, M. Meacham, and L. Locascio, Lab Chip 7, 1567 (2007).
[CrossRef] [PubMed]

Mettin, R.

I. Akhatov, O. Lindau, A. Topolnikov, R. Mettin, N. Vakhitova, and W. Lauterborn, Phys. Fluids 13, 2805(2001).
[CrossRef]

Midorikawa, K.

Morgan, B.

C. M. Waits, B. Morgan, M. Kastantin, and R. Ghodssi, Sens. Actuators A 119, 245 (2005).
[CrossRef]

Nishii, J.

Ohl, C. D.

C. D. Ohl, O. Lindau, and W. Lanuterborn, Phys. Rev. Lett. 80, 393 (1998).
[CrossRef]

Qu, S.

Y. Li and S. Qu, Mater. Lett. 64, 1427 (2010).
[CrossRef]

Shi, X.

C. Li, T. Chen, J. Si, F. Chen, X. Shi, and X. Hou, J. Micromech. Microeng. 19, 125007 (2009).
[CrossRef]

Si, J.

C. Li, T. Chen, J. Si, F. Chen, X. Shi, and X. Hou, J. Micromech. Microeng. 19, 125007 (2009).
[CrossRef]

Sugioka, K.

Sun, H.

Tabbert, B.

O. Baghdassarian, H. Chu, B. Tabbert, and G. A. Williams, Phys. Rev. Lett. 86, 4934 (2001).
[CrossRef] [PubMed]

Tan, B.

A. Tavangar, B. Tan, and K. Venkatakrishnan, J. Micromech. Microeng. 20, 085016 (2010).
[CrossRef]

Tavangar, A.

A. Tavangar, B. Tan, and K. Venkatakrishnan, J. Micromech. Microeng. 20, 085016 (2010).
[CrossRef]

Topolnikov, A.

I. Akhatov, O. Lindau, A. Topolnikov, R. Mettin, N. Vakhitova, and W. Lauterborn, Phys. Fluids 13, 2805(2001).
[CrossRef]

Vakhitova, N.

I. Akhatov, O. Lindau, A. Topolnikov, R. Mettin, N. Vakhitova, and W. Lauterborn, Phys. Fluids 13, 2805(2001).
[CrossRef]

Venkatakrishnan, K.

A. Tavangar, B. Tan, and K. Venkatakrishnan, J. Micromech. Microeng. 20, 085016 (2010).
[CrossRef]

Virmont, J.

R. Fabbro, J. Fournier, P. Ballard, D. Devaux, and J. Virmont, J. Appl. Phys. 68, 775 (1990).
[CrossRef]

Waits, C. M.

C. M. Waits, B. Morgan, M. Kastantin, and R. Ghodssi, Sens. Actuators A 119, 245 (2005).
[CrossRef]

Wang, C.

Watanabe, W.

Whitesides, G. M.

G. M. Whitesides, Nature 442, 368 (2006).
[CrossRef] [PubMed]

J. C. Love, D. B. Wolfe, H. O. Jacobs, and G. M. Whitesides, Langmuir 17, 6005 (2001).
[CrossRef]

Williams, G. A.

O. Baghdassarian, H. Chu, B. Tabbert, and G. A. Williams, Phys. Rev. Lett. 86, 4934 (2001).
[CrossRef] [PubMed]

Wolfe, D. B.

J. C. Love, D. B. Wolfe, H. O. Jacobs, and G. M. Whitesides, Langmuir 17, 6005 (2001).
[CrossRef]

Xu, J.

Xu, Y.

Xu, Z.

Yamada, K.

Yanez, C.

G. Kumi, C. Yanez, K. Belfield, and J. Fourkas, Lab Chip 10, 1057 (2010).
[CrossRef] [PubMed]

Zhou, Z.

J. Appl. Phys.

R. Fabbro, J. Fournier, P. Ballard, D. Devaux, and J. Virmont, J. Appl. Phys. 68, 775 (1990).
[CrossRef]

J. Micromech. Microeng.

C. Li, T. Chen, J. Si, F. Chen, X. Shi, and X. Hou, J. Micromech. Microeng. 19, 125007 (2009).
[CrossRef]

A. Tavangar, B. Tan, and K. Venkatakrishnan, J. Micromech. Microeng. 20, 085016 (2010).
[CrossRef]

Lab Chip

J. Atencia, S. Barnes, J. Douglas, M. Meacham, and L. Locascio, Lab Chip 7, 1567 (2007).
[CrossRef] [PubMed]

G. Kumi, C. Yanez, K. Belfield, and J. Fourkas, Lab Chip 10, 1057 (2010).
[CrossRef] [PubMed]

Langmuir

J. C. Love, D. B. Wolfe, H. O. Jacobs, and G. M. Whitesides, Langmuir 17, 6005 (2001).
[CrossRef]

Laser Phys. Lett.

K. Jamshidi-Ghaleh, D. Abdolahpour, and N. Mansour, Laser Phys. Lett. 3, 573 (2006).
[CrossRef]

Mater. Lett.

Y. Li and S. Qu, Mater. Lett. 64, 1427 (2010).
[CrossRef]

Nature

G. M. Whitesides, Nature 442, 368 (2006).
[CrossRef] [PubMed]

Opt. Lett.

Phys. Fluids

I. Akhatov, O. Lindau, A. Topolnikov, R. Mettin, N. Vakhitova, and W. Lauterborn, Phys. Fluids 13, 2805(2001).
[CrossRef]

Phys. Rev. Lett.

C. D. Ohl, O. Lindau, and W. Lanuterborn, Phys. Rev. Lett. 80, 393 (1998).
[CrossRef]

O. Baghdassarian, H. Chu, B. Tabbert, and G. A. Williams, Phys. Rev. Lett. 86, 4934 (2001).
[CrossRef] [PubMed]

Sens. Actuators A

C. M. Waits, B. Morgan, M. Kastantin, and R. Ghodssi, Sens. Actuators A 119, 245 (2005).
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (5)

Fig. 1
Fig. 1

Experimental setup for fabricating helical microchannels.

Fig. 2
Fig. 2

(a) Schematic diagram of the helical microchannel. (b) Scanning path of the square.

Fig. 3
Fig. 3

(a)–(d) Fabricated helical microchannels using the pulses energies 5, 6, 7, and 8 μJ , respectively. (e) Dependence of the channel diameters on the femtosecond laser pulse energies.

Fig. 4
Fig. 4

(a) Fabricated helical microchannel with a block at the end of the channel. (b), (c) Fabricated helical microchannels with lengths of 1 mm .

Fig. 5
Fig. 5

(a) Top view, (b) side view, and (c) full view of the array with four helical microchannels. (d) Top view, (e) side view, and (f) full view of the array with five helical microchannels.

Metrics