Abstract

Design and fabrication of a 2×2 two-mode interference (TMI) coupler based on-chip polarization splitter is presented. By changing the angle between the access waveguides, one can tune the effective TMI length for the mode with less optical confinement (transverse magnetic, TM) to coincide with the target TMI length for a desired transmission of the mode with higher optical confinement (transverse electric, TE). The fabricated 0.94μm long 2×2 TMI splits the input power into TM (bar) and TE (cross) outputs with splitting ratio over 15dB over 50nm bandwidth. Fabrication tolerance analysis shows that the device is tolerant to fabrication errors as large as 60nm.

© 2011 Optical Society of America

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2011 (1)

S. Lin, J. Hu, and K. Crozier, Appl. Phys. Lett. 98, 151101(2011).
[CrossRef]

2010 (1)

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

2009 (1)

B.-K. Yang, S.-Y. Shin, and D. Zhang, IEEE Photon. Technol. Lett. 21 (7), 432 (2009).
[CrossRef]

2007 (1)

2006 (1)

2005 (1)

I. Kiyat, A. Aydinli, and N. Dagli, IEEE Photon. Technol. Lett. 17, 100 (2005).
[CrossRef]

2003 (1)

J. M. Hong, H. H. Ryu, S. R. Park, J. W. Jeong, S. G. Lee, E.-H. Lee, S.-G. Park, D. W. Woo, S. Kim, and B.-H. O, IEEE Photon. Technol. Lett. 15, 72 (2003).
[CrossRef]

2001 (1)

D. M. Mackie, T. J. Tayag, and T. E. Batchman, Opt. Eng. 40, 2265 (2001).
[CrossRef]

1994 (1)

P. A. Besse, M. Bachmann, H. Melchior, L. B. Soldano, and M. K. Smit, J. Lightwave Technol. 12, 1004 (1994).
[CrossRef]

1988 (1)

F. Rottmann, A. Neyer, W. Mevenkamp, and E. Voges, J. Lightwave Technol. 6, 946 (1988).
[CrossRef]

Augustin, L. M.

Aydinli, A.

I. Kiyat, A. Aydinli, and N. Dagli, IEEE Photon. Technol. Lett. 17, 100 (2005).
[CrossRef]

Bachmann, M.

P. A. Besse, M. Bachmann, H. Melchior, L. B. Soldano, and M. K. Smit, J. Lightwave Technol. 12, 1004 (1994).
[CrossRef]

Batchman, T. E.

D. M. Mackie, T. J. Tayag, and T. E. Batchman, Opt. Eng. 40, 2265 (2001).
[CrossRef]

Besse, P. A.

P. A. Besse, M. Bachmann, H. Melchior, L. B. Soldano, and M. K. Smit, J. Lightwave Technol. 12, 1004 (1994).
[CrossRef]

Chen, A.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Corzine, S.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Crozier, K.

S. Lin, J. Hu, and K. Crozier, Appl. Phys. Lett. 98, 151101(2011).
[CrossRef]

Dagli, N.

I. Kiyat, A. Aydinli, and N. Dagli, IEEE Photon. Technol. Lett. 17, 100 (2005).
[CrossRef]

de Laat, W. J. M.

Dentai, A.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Dominic, V.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Evans, P.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Fisher, M.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Fukuda, H.

Gheorma, J.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Hanfoug, R.

Hong, J. M.

J. M. Hong, H. H. Ryu, S. R. Park, J. W. Jeong, S. G. Lee, E.-H. Lee, S.-G. Park, D. W. Woo, S. Kim, and B.-H. O, IEEE Photon. Technol. Lett. 15, 72 (2003).
[CrossRef]

Hu, J.

S. Lin, J. Hu, and K. Crozier, Appl. Phys. Lett. 98, 151101(2011).
[CrossRef]

Itabashi, S.

Jeong, J. W.

J. M. Hong, H. H. Ryu, S. R. Park, J. W. Jeong, S. G. Lee, E.-H. Lee, S.-G. Park, D. W. Woo, S. Kim, and B.-H. O, IEEE Photon. Technol. Lett. 15, 72 (2003).
[CrossRef]

Joyner, C.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Kato, M.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Kim, S.

J. M. Hong, H. H. Ryu, S. R. Park, J. W. Jeong, S. G. Lee, E.-H. Lee, S.-G. Park, D. W. Woo, S. Kim, and B.-H. O, IEEE Photon. Technol. Lett. 15, 72 (2003).
[CrossRef]

Kish, F.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Kiyat, I.

I. Kiyat, A. Aydinli, and N. Dagli, IEEE Photon. Technol. Lett. 17, 100 (2005).
[CrossRef]

Lambert, D.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Lee, E.-H.

J. M. Hong, H. H. Ryu, S. R. Park, J. W. Jeong, S. G. Lee, E.-H. Lee, S.-G. Park, D. W. Woo, S. Kim, and B.-H. O, IEEE Photon. Technol. Lett. 15, 72 (2003).
[CrossRef]

Lee, S. G.

J. M. Hong, H. H. Ryu, S. R. Park, J. W. Jeong, S. G. Lee, E.-H. Lee, S.-G. Park, D. W. Woo, S. Kim, and B.-H. O, IEEE Photon. Technol. Lett. 15, 72 (2003).
[CrossRef]

Lin, S.

S. Lin, J. Hu, and K. Crozier, Appl. Phys. Lett. 98, 151101(2011).
[CrossRef]

Lyubomirsky, I.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Mackie, D. M.

D. M. Mackie, T. J. Tayag, and T. E. Batchman, Opt. Eng. 40, 2265 (2001).
[CrossRef]

Melchior, H.

P. A. Besse, M. Bachmann, H. Melchior, L. B. Soldano, and M. K. Smit, J. Lightwave Technol. 12, 1004 (1994).
[CrossRef]

Mevenkamp, W.

F. Rottmann, A. Neyer, W. Mevenkamp, and E. Voges, J. Lightwave Technol. 6, 946 (1988).
[CrossRef]

Missey, M.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Murthy, S.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Nagarajan, R.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Neyer, A.

F. Rottmann, A. Neyer, W. Mevenkamp, and E. Voges, J. Lightwave Technol. 6, 946 (1988).
[CrossRef]

Nilsson, A.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

O, B.-H.

J. M. Hong, H. H. Ryu, S. R. Park, J. W. Jeong, S. G. Lee, E.-H. Lee, S.-G. Park, D. W. Woo, S. Kim, and B.-H. O, IEEE Photon. Technol. Lett. 15, 72 (2003).
[CrossRef]

Oei, Y.-S.

Park, S. R.

J. M. Hong, H. H. Ryu, S. R. Park, J. W. Jeong, S. G. Lee, E.-H. Lee, S.-G. Park, D. W. Woo, S. Kim, and B.-H. O, IEEE Photon. Technol. Lett. 15, 72 (2003).
[CrossRef]

Park, S.-G.

J. M. Hong, H. H. Ryu, S. R. Park, J. W. Jeong, S. G. Lee, E.-H. Lee, S.-G. Park, D. W. Woo, S. Kim, and B.-H. O, IEEE Photon. Technol. Lett. 15, 72 (2003).
[CrossRef]

Pleumeekers, J.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Rahn, J.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Rottmann, F.

F. Rottmann, A. Neyer, W. Mevenkamp, and E. Voges, J. Lightwave Technol. 6, 946 (1988).
[CrossRef]

Ryu, H. H.

J. M. Hong, H. H. Ryu, S. R. Park, J. W. Jeong, S. G. Lee, E.-H. Lee, S.-G. Park, D. W. Woo, S. Kim, and B.-H. O, IEEE Photon. Technol. Lett. 15, 72 (2003).
[CrossRef]

Samra, P.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Schneider, R.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Shin, S.-Y.

B.-K. Yang, S.-Y. Shin, and D. Zhang, IEEE Photon. Technol. Lett. 21 (7), 432 (2009).
[CrossRef]

Shinojima, H.

Smit, M. K.

Soldano, L. B.

P. A. Besse, M. Bachmann, H. Melchior, L. B. Soldano, and M. K. Smit, J. Lightwave Technol. 12, 1004 (1994).
[CrossRef]

Spannagel, A.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Stewart, J.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Strzelecka, E.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Studenkov, P.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Tayag, T. J.

D. M. Mackie, T. J. Tayag, and T. E. Batchman, Opt. Eng. 40, 2265 (2001).
[CrossRef]

Tsuchizawa, T.

van de Moosdijk, M. J. E.

van der Tol, J. J. G. M.

van Dijk, P. W. L.

Voges, E.

F. Rottmann, A. Neyer, W. Mevenkamp, and E. Voges, J. Lightwave Technol. 6, 946 (1988).
[CrossRef]

Watanabe, T.

Welch, D.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Woo, D. W.

J. M. Hong, H. H. Ryu, S. R. Park, J. W. Jeong, S. G. Lee, E.-H. Lee, S.-G. Park, D. W. Woo, S. Kim, and B.-H. O, IEEE Photon. Technol. Lett. 15, 72 (2003).
[CrossRef]

Yamada, K.

Yang, B.-K.

B.-K. Yang, S.-Y. Shin, and D. Zhang, IEEE Photon. Technol. Lett. 21 (7), 432 (2009).
[CrossRef]

Zhang, D.

B.-K. Yang, S.-Y. Shin, and D. Zhang, IEEE Photon. Technol. Lett. 21 (7), 432 (2009).
[CrossRef]

Ziari, M.

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, IEEE Photon. Technol. Lett. 22, 1015(2010).
[CrossRef]

Appl. Phys. Lett. (1)

S. Lin, J. Hu, and K. Crozier, Appl. Phys. Lett. 98, 151101(2011).
[CrossRef]

IEEE Photon. Technol. Lett. (4)

I. Kiyat, A. Aydinli, and N. Dagli, IEEE Photon. Technol. Lett. 17, 100 (2005).
[CrossRef]

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Figures (5)

Fig. 1
Fig. 1

(a) Schematic of the polarization splitter device. (b) Variations of P4/P3 and P3/P4 for input TE (solid red line) and TM (dashed blue line) polarized light, respectively, at different θ values, for W TMI = 900 nm and h = 230 nm at λ = 1550 nm .

Fig. 2
Fig. 2

FDTD Propagation field profiles for TE (Ex) and TM (Hx) input polarizations for θ = 7.4 ° , L TMI = 940 nm , W TMI = 900 nm , and h = 230 nm at λ = 1550 nm .

Fig. 3
Fig. 3

Variations of (a) insertion loss and (b) polarization splitting ratio as functions of deviation in the waveguide width for input TE and TM polarizations. The inset of (a) shows a PS layout affected by Δ W < 0 (dashed red) and Δ W > 0 (dotted black).

Fig. 4
Fig. 4

(a) Microscope and (b) SEM images of the fabricated PS device. Top-down IR pictures of the PS outputs for (c) TE and (d) TM polarized inputs.

Fig. 5
Fig. 5

Normalized output transmission spectra at P3 (dashed blue) and P4 (solid green) for TE and TM input excitations at P1. Data is normalized to the measured ASE output spectrum.

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