Abstract

A novel design of quasi-sinusoidal single-order diffraction transmission grating (QSTG) is proposed, which can achieve a line density up to thousands line/millimeter as that of traditional transmission gratings with the current level of nanofabrication technique. We fabricate a 1000  line/mm QSTG using the new design approach, and display the calibration results of such QSTG on the soft x-ray beam of synchrotron radiation.

© 2011 Optical Society of America

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