Abstract

A broadband [SiC/W/Ir]2 multilayer coating was deposited onto a diffraction grating to enhance the grating efficiency in the 50100nm wavelength range in a Seya–Namioka mount. The holographic ion-beam etched grating had a laminar profile with 1200 lines/mm. The coating was designed by using the subquarterwave multilayer theory. The measurement results show that the efficiency in the 1st diffraction order is greater than 9.3% throughout the wavelength range of 50100nm, which is obviously higher than that of single-layer gratings with SiC, Ir, or Au coatings.

© 2011 Optical Society of America

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