Abstract

A broadband [SiC/W/Ir]2 multilayer coating was deposited onto a diffraction grating to enhance the grating efficiency in the 50100nm wavelength range in a Seya–Namioka mount. The holographic ion-beam etched grating had a laminar profile with 1200 lines/mm. The coating was designed by using the subquarterwave multilayer theory. The measurement results show that the efficiency in the 1st diffraction order is greater than 9.3% throughout the wavelength range of 50100nm, which is obviously higher than that of single-layer gratings with SiC, Ir, or Au coatings.

© 2011 Optical Society of America

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References

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2010 (1)

S. N. He, Y. Liu, K. Q. Qiu, H. J. Zhou, T. L. Huo, and S. J. Fu, Chinese Opt. Lett. 8, 1131 (2010).
[CrossRef]

2009 (1)

2002 (3)

2001 (3)

1997 (1)

1993 (1)

1989 (1)

M. Kühne and P. Müller, Rev. Sci. Instrum. 60, 2101 (1989).
[CrossRef]

1988 (1)

Bajt, S.

Brown, C. M.

Cruddace, R. G.

Fu, S. J.

S. N. He, Y. Liu, K. Q. Qiu, H. J. Zhou, T. L. Huo, and S. J. Fu, Chinese Opt. Lett. 8, 1131 (2010).
[CrossRef]

Goray, L.

He, S. N.

S. N. He, Y. Liu, K. Q. Qiu, H. J. Zhou, T. L. Huo, and S. J. Fu, Chinese Opt. Lett. 8, 1131 (2010).
[CrossRef]

Heidemann, K. F.

Heinzmann, U.

Hunter, W. R.

Huo, T. L.

S. N. He, Y. Liu, K. Q. Qiu, H. J. Zhou, T. L. Huo, and S. J. Fu, Chinese Opt. Lett. 8, 1131 (2010).
[CrossRef]

L. C. Zhang, H. Lin, C. S. Jin, H. J. Zhou, and T. L. Huo, Opt. Lett. 34, 818 (2009).
[CrossRef] [PubMed]

Jin, C. S.

Keski-Kuha, Ritva A. M.

Kleineberg, U.

Kondratenko, V. V.

Kortright, J. B.

Kowalski, M. P.

Kühne, M.

M. Kühne and P. Müller, Rev. Sci. Instrum. 60, 2101 (1989).
[CrossRef]

Larruquert, J. I.

Lin, H.

Liu, Y.

S. N. He, Y. Liu, K. Q. Qiu, H. J. Zhou, T. L. Huo, and S. J. Fu, Chinese Opt. Lett. 8, 1131 (2010).
[CrossRef]

Menke, D.

Montcalm, C.

Müller, P.

M. Kühne and P. Müller, Rev. Sci. Instrum. 60, 2101 (1989).
[CrossRef]

Osterried, K.

Palik, E. D.

E. D. Palik, Handbook of Optical Constants of Solids(Academic, 1985).

Pershin, Y. P.

Qiu, K. Q.

S. N. He, Y. Liu, K. Q. Qiu, H. J. Zhou, T. L. Huo, and S. J. Fu, Chinese Opt. Lett. 8, 1131 (2010).
[CrossRef]

Rife, J. C.

Seely, J.

Seely, J. F.

Uspenskii, Y. A.

Vinogradov, A. V.

Windt, D. L.

Zhang, L. C.

Zhou, H. J.

S. N. He, Y. Liu, K. Q. Qiu, H. J. Zhou, T. L. Huo, and S. J. Fu, Chinese Opt. Lett. 8, 1131 (2010).
[CrossRef]

L. C. Zhang, H. Lin, C. S. Jin, H. J. Zhou, and T. L. Huo, Opt. Lett. 34, 818 (2009).
[CrossRef] [PubMed]

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Figures (5)

Fig. 1
Fig. 1

Calculated efficiencies in the 1 st order of gratings with different coatings ( [ SiC / W / Ir ] 2 , squares; SiC, circles; Ir, triangles; Au, rhombuses) with the optimized parameters in Table 1.

Fig. 2
Fig. 2

Measured groove profile of the multilayer grating coated with [ SiC / W / Ir ] 2 .

Fig. 3
Fig. 3

Angular spectrum of diffraction efficiency of the [ SiC / W / Ir ] 2 multilayer-coated grating at 70 nm .

Fig. 4
Fig. 4

Measured and calculated 1 st order efficiencies of the [ SiC / W / Ir ] 2 coated grating versus wavelength: squares, measured efficiency; dashed curve, calculated efficiency; solid curve, fitted values of the measured efficiencies.

Fig. 5
Fig. 5

Measured 1 st order efficiencies of gratings with different coatings ( [ SiC / W / Ir ] 2 , squares; SiC, circles; Ir, triangles; Au, rhombuses) in 45 100 nm wavelengths. The solid curves are the fitted curves by the nonlinear least-square method.

Tables (1)

Tables Icon

Table 1 Designed and Measured Parameters of the Grating Samples

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