Abstract

We introduce a Fourier analysis of the waveform of periodic light-irradiance variation to capture Fourier coefficients for multichannel rotating-element ellipsometers. In this analysis, the Fourier coefficients for a sample are obtained using a discrete Fourier transform on the exposures. The analysis gives a generic function that encompasses the discrete Fourier transform or the Hadamard transform, depending on the specific conditions. Unlike the Hadamard transform, a well-known data acquisition method that is used only for conventional multichannel rotating-element ellipsometers with line arrays with specific readout-mode timing, this Fourier analysis is applicable to various line arrays with either nonoverlap or overlap readout-mode timing. To assess the effects of the novel Fourier analysis, the Fourier coefficients for a sample were measured with a custom-built rotating-polarizer ellipsometer, using this Fourier analysis with various numbers of scans, integration times, and rotational speeds of the polarizer.

© 2011 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (7)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription