Abstract

A scanning spatial low-coherence interferometer (S-LCI), using an off-axis converging single wavelength laser beam as the probe, resembles a conventional or temporal low-coherence interferometer (T-LCI) in signal formation and data processing. However, the S-LCI is advantageous over a T-LCI with the combination of angle resolving and depth discrimination capabilities. The S-LCI is demonstrated by measuring the angle dependent phase shifts among the multiple reflections of a glass plate, with incident angles accurately scaled in the Fourier domain. The refractive index and geometric thickness of the glass plate are simultaneously produced in this one-step measurement.

© 2011 Optical Society of America

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