Abstract

A vibration-insensitive interferometer is described to measure the thickness, refraction index and surface profile of thin-film stack at normal incidence. By satisfying the continuous boundary conditions of electric and magnetic fields at interfaces in a multilayer film stack, the reflection coefficient phase of the thin-film stack can be distinguished from the phase of spatial path difference, thus thickness and refraction index can be extracted. The experiment results showed that the measurement precision is significantly increased after the phase analysis was added into the reflectance analysis.

© 2011 Optical Society of America

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References

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2009

2007

Y. S. Ghim and S. W. Kim, Appl. Phys. Lett. 91, 091903 (2007).
[CrossRef]

2006

2005

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5875, 58750F (2005).
[CrossRef]

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, Proc. SPIE 5856, 14 (2005).
[CrossRef]

2002

2001

H. A. Macleod, Thin Film Optical Filters, 3rd ed. (Institute of Physics Publishing, 2001).
[CrossRef]

C. C. Lee, C. L. Tien, W. S. Sheu, and C. C. Jaing, Rev. Sci. Instrum. 72, 2128 (2001).
[CrossRef]

1999

Brock, N.

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5875, 58750F (2005).
[CrossRef]

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, Proc. SPIE 5856, 14 (2005).
[CrossRef]

Ghim, Y. S.

Y. S. Ghim and S. W. Kim, Appl. Opt. 48, 799 (2009).
[CrossRef] [PubMed]

Y. S. Ghim and S. W. Kim, Appl. Phys. Lett. 91, 091903 (2007).
[CrossRef]

Hayes, J.

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, Proc. SPIE 5856, 14 (2005).
[CrossRef]

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5875, 58750F (2005).
[CrossRef]

Jaing, C. C.

C. C. Lee, C. L. Tien, W. S. Sheu, and C. C. Jaing, Rev. Sci. Instrum. 72, 2128 (2001).
[CrossRef]

Kim, D. S.

Kim, G. H.

Kim, S. H.

Kim, S. W.

Kimbrough, B.

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5875, 58750F (2005).
[CrossRef]

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, Proc. SPIE 5856, 14 (2005).
[CrossRef]

Kong, H. J.

Lee, C. C.

C. C. Lee, C. L. Tien, W. S. Sheu, and C. C. Jaing, Rev. Sci. Instrum. 72, 2128 (2001).
[CrossRef]

Lee, Y. W.

Macleod, H. A.

H. A. Macleod, Thin Film Optical Filters, 3rd ed. (Institute of Physics Publishing, 2001).
[CrossRef]

Millerd, J.

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, Proc. SPIE 5856, 14 (2005).
[CrossRef]

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5875, 58750F (2005).
[CrossRef]

North-Morris, M.

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5875, 58750F (2005).
[CrossRef]

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, Proc. SPIE 5856, 14 (2005).
[CrossRef]

Novak, M.

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5875, 58750F (2005).
[CrossRef]

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, Proc. SPIE 5856, 14 (2005).
[CrossRef]

Sheu, W. S.

C. C. Lee, C. L. Tien, W. S. Sheu, and C. C. Jaing, Rev. Sci. Instrum. 72, 2128 (2001).
[CrossRef]

Tien, C. L.

C. C. Lee, C. L. Tien, W. S. Sheu, and C. C. Jaing, Rev. Sci. Instrum. 72, 2128 (2001).
[CrossRef]

Valery, F. V.

Vitali, H.

Vitaly, K. P.

Wyant, J. C.

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, Proc. SPIE 5856, 14 (2005).
[CrossRef]

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5875, 58750F (2005).
[CrossRef]

Appl. Opt.

Appl. Phys. Lett.

Y. S. Ghim and S. W. Kim, Appl. Phys. Lett. 91, 091903 (2007).
[CrossRef]

Opt. Lett.

Proc. SPIE

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5875, 58750F (2005).
[CrossRef]

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, Proc. SPIE 5856, 14 (2005).
[CrossRef]

Rev. Sci. Instrum.

C. C. Lee, C. L. Tien, W. S. Sheu, and C. C. Jaing, Rev. Sci. Instrum. 72, 2128 (2001).
[CrossRef]

Other

H. A. Macleod, Thin Film Optical Filters, 3rd ed. (Institute of Physics Publishing, 2001).
[CrossRef]

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Figures (3)

Fig. 1
Fig. 1

Measuring system layout. QWP, quarter-wave plate; PBS, polarization beam splitter.

Fig. 2
Fig. 2

(a) Single layer thin film. (b) Multilayer thin films.

Fig. 3
Fig. 3

Result of volumetric profile of thin-film stack measurement.

Tables (1)

Tables Icon

Table 1 Experimental Results Comparisons

Equations (7)

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I = I T + I R 2 I T I R cos ( 2 α + δ m ) ,
E a = E b cos δ + H b i y sin δ H a = E b i y sin δ + H b cos δ or [ E a H a ] = [ cos δ i y sin δ i y sin δ cos δ ] [ E b H b ] ,
H a = H 0 a + + H 0 a = y 0 E 0 a + y 0 E 0 a E a = E 0 a + + E 0 a or E 0 a + = y 0 E a + H a 2 y 0 E 0 a = y 0 E a H a 2 y 0 ,
[ E a H a ] = M 1 M 2 M m [ E k H k ] = Π j = 1 m [ cos δ j i y j sin δ j i y j sin δ j cos δ j ] [ E k H k ] .
[ B C ] = [ E a E k H a E k ] = Π j = 1 m [ cos δ j i y j sin δ j i y j sin δ j cos δ j ] [ 1 H k E k ] = Π j = 1 m [ cos δ j i y j sin δ j i y j sin δ j cos δ j ] [ 1 y s ] = Π j = 1 m [ cos δ j i n j y v sin δ j i n j y v sin δ j cos δ j ] [ 1 n s y v ] ,
re i δ T = E 0 a E 0 a + = y 0 E a H a y 0 E a + H a = n 0 y v B C n 0 y v B + C ,
E ( δ T , δ S , r ) = i = 1 w { | δ m ( λ i ) [ δ T ( n 1 ( λ i ) n m ( λ i ) , d 1 d m , λ i ) δ R ( λ i ) + δ S ( h , λ i ) ] | 2 + | η [ r m ( λ i ) r ( n 1 ( λ i ) n m ( λ i ) , d 1 d m , λ i ) ] | 2 } ,

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