Abstract

Using a near-field scanning microscope (NT-MDT) with a 100nm aperture cantilever held 1μm apart from a microaxicon of diameter 14μm and period 800nm, we measure a focal spot resulting from the illumination by a linearly polarized laser light of wavelength λ=532nm, with its FWHM being equal to 0.58λ, and the depth of focus being 5.6λ. The rms deviation of the focal spot intensity from the calculated value is 6%. The focus intensity is five times larger than the maximal illumination beam intensity.

© 2011 Optical Society of America

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