Abstract

A method of optimizing a computer-generated hologram based on parallel second harmonic generation is proposed for holographic femtosecond laser processing. The method, which we call second harmonic optimization, incorporates the width and spatial profile of the pulse into the hologram design. With this method, we demonstrated parallel laser processing with high quality. Because of the enhanced processing accuracy, smaller structures were processed with a smaller energy than in our previous work. In parallel laser processing with 18 beams on a glass surface, the minimum average diameter of the processed structures was 271nm when the mean fluence of the beams was 0.88J/cm2.

© 2011 Optical Society of America

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[CrossRef]

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[CrossRef]

Edwardson, S.

Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, E. Fearon, G. Dearden, and K. Watkins, Appl. Surf. Sci. 255, 6582 (2009).
[CrossRef]

Edwardson, S. P.

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, Appl. Surf. Sci. 255, 2284 (2008).
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Fearon, E.

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Fuchs, U.

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[CrossRef]

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[CrossRef]

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[CrossRef]

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Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, E. Fearon, G. Dearden, and K. Watkins, Appl. Surf. Sci. 255, 6582 (2009).
[CrossRef]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, Appl. Surf. Sci. 255, 2284 (2008).
[CrossRef]

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[CrossRef]

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[CrossRef]

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[CrossRef] [PubMed]

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

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[CrossRef]

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Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, E. Fearon, G. Dearden, and K. Watkins, Appl. Surf. Sci. 255, 6582 (2009).
[CrossRef]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, Appl. Surf. Sci. 255, 2284 (2008).
[CrossRef]

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[CrossRef]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, Appl. Surf. Sci. 255, 2284 (2008).
[CrossRef]

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[CrossRef]

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Takeshima, N.

Takita, A.

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

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M. Yamaji, H. Kawashima, J. Suzuki, and S. Tanaka, Appl. Phys. Lett. 93, 041116 (2008).
[CrossRef]

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[CrossRef] [PubMed]

Torres-Company, V.

Tunnermann, A.

Watkins, K.

Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, E. Fearon, G. Dearden, and K. Watkins, Appl. Surf. Sci. 255, 6582 (2009).
[CrossRef]

Watkins, K. G.

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, Appl. Surf. Sci. 255, 2284 (2008).
[CrossRef]

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Zeitner, U. D.

Zhou, C.

Appl. Opt. (2)

Appl. Phys. Lett. (2)

M. Yamaji, H. Kawashima, J. Suzuki, and S. Tanaka, Appl. Phys. Lett. 93, 041116 (2008).
[CrossRef]

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

Appl. Surf. Sci. (2)

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, Appl. Surf. Sci. 255, 2284 (2008).
[CrossRef]

Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, E. Fearon, G. Dearden, and K. Watkins, Appl. Surf. Sci. 255, 6582 (2009).
[CrossRef]

J. Opt. Soc. Am. A (1)

Jpn. J. Appl. Phys. (1)

S. Hasegawa and Y. Hayasaki, Jpn. J. Appl. Phys. 48, 09LE03 (2009).
[CrossRef]

Opt. Express (4)

Opt. Lett. (6)

Opt. Rev. (1)

S. Hasegawa and Y. Hayasaki, Opt. Rev. 14, 208 (2007).
[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

Holographic femtosecond laser processing system.

Fig. 2
Fig. 2

Changes of the uniformity U I (filled circles) and the total SH intensity (open circles). The insets show the SH profile from the CGH at iteration i.

Fig. 3
Fig. 3

SEM images of the structures processed by using the CGH with SH optimization at varying irradiation fluence F.

Fig. 4
Fig. 4

(a) Pit diameters D 1 in the diffraction direction and (b) pit diameters D 2 in the nondiffraction direction versus irradiation fluence F. The dark gray area and light gray area indicate the distribution ranges between the maximum and minimum values of D using SH optimization and optical intensity optimization, respectively.

Equations (1)

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D ( r ) = ω ( r ) { 2 ln [ F / F th ( r ) ] } 1 / 2 ,

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