Abstract

Nanoscale disorder results in severe spectral misalignment of silicon microring resonators and Mach–Zehnder interferometers. We correct for such effects using electric-field-induced waveguide nano-oxidation, demonstrating a tuning wavelength range of several nanometers and 0.002nm resolution without line shape degradation. Field- induced nano-oxidation is a permanent and precise technique and requires no new materials or high-temperature processing.

© 2011 Optical Society of America

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