Abstract

Grating couplers are widely used as an efficient and versatile fiber–chip coupling structure in nanometric silicon wire waveguides. The implementation of efficient grating couplers in micrometric silicon-on-insulator (SOI) rib waveguides is, however, challenging, since the coupler waveguide region is multimode. Here we experimentally demonstrate grating couplers in 1.5 μm-thick SOI rib waveguides with a coupling efficiency of −2.2 dB and a 3 dB bandwidth of 40 nm. An inverse taper is used to adiabatically transform the interconnection waveguide mode to the optimum grating coupler excitation field with negligible higher order Bloch mode excitation. Couplers are fabricated in the same etch step as the waveguides using i-line stepper lithography. The benefits of wafer-scale testing and device characterization without facet preparation are thus attained at no additional cost.

© 2011 Optical Society of America

PDF Article

References

  • View by:
  • |
  • |
  • |

  1. A. Delâge, S. Janz, B. Lamontagne, A. Bogdanov, D. Dalacu, D. Xu, and K. Yap, Opt. Express 14, 148 (2006).
    [CrossRef]
  2. J. Schmid, P. Cheben, P. Bock, J. Lapointe, S. Janz, D. Xu, A. Densmore, A. Delâge, and T. Hall, Opt. Photon. News 21, 24 (2010).
    [CrossRef]
  3. A. Sure, T. Dillon, J. Murakowski, C. Lin, D. Pustai, and D. Prather, Opt. Express 11, 3555 (2003).
    [CrossRef]
  4. B. Bakir, A. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J. Fedeli, IEEE Photon. Technol. Lett. 22, 739 (2010).
    [CrossRef]
  5. T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
    [CrossRef]
  6. J. Čtyroký, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petráček, P. Lalanne, J.-P. Hugonin, and R. de la Rue, Opt. Quantum Electron. 34, 455 (2002).
  7. Y. Tang, Z. Wang, L. Wosinski, U. Westergren, and S. He, Opt. Lett. 35, 1290 (2010).
    [CrossRef]
  8. R. Halir, P. Cheben, S. Janz, D. Xu, Í. Molina-Fernández, and J. Wangüemert-Pérez, Opt. Lett. 34, 1408 (2009).
    [CrossRef]
  9. G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
    [CrossRef]
  10. C. Alonso-Ramos, A. Ortega-Moñux, I. Molina-Fernández, P. Cheben, L. Zavargo-Peche, and R. Halir, Opt. Express 18, 15189 (2010).
    [CrossRef]
  11. T. Tamir and S. T. Peng, Appl. Phys. 14, 235 (1977).
    [CrossRef]
  12. L. Zavargo-Peche, C. A. Alonso-Ramos, A. Ortega-Moñux, R. Halir, J. Wangüemert-Pérez, and I. Molina-Fernández, in XVIII Workshop Optical Waveguide Theory and Numerical Modeling (2009), p. 45.
  13. P. Lalanne and E. Silberstein, Opt. Lett. 25, 1092 (2000).
    [CrossRef]
  14. R. Soref, J. Schmidtchen, and K. Petermann, IEEE J. Quantum Electron. 27, 1971 (1991).
    [CrossRef]
  15. R. Halir, I. Molina-Fernández, J. Wangüemert-Pérez, A. Ortega-Moñux, J. de Oliva-Rubio, and P. Cheben, Opt. Express 17, 8349 (2009).
    [CrossRef]

2010 (4)

B. Bakir, A. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J. Fedeli, IEEE Photon. Technol. Lett. 22, 739 (2010).
[CrossRef]

J. Schmid, P. Cheben, P. Bock, J. Lapointe, S. Janz, D. Xu, A. Densmore, A. Delâge, and T. Hall, Opt. Photon. News 21, 24 (2010).
[CrossRef]

Y. Tang, Z. Wang, L. Wosinski, U. Westergren, and S. He, Opt. Lett. 35, 1290 (2010).
[CrossRef]

C. Alonso-Ramos, A. Ortega-Moñux, I. Molina-Fernández, P. Cheben, L. Zavargo-Peche, and R. Halir, Opt. Express 18, 15189 (2010).
[CrossRef]

2009 (3)

R. Halir, P. Cheben, S. Janz, D. Xu, Í. Molina-Fernández, and J. Wangüemert-Pérez, Opt. Lett. 34, 1408 (2009).
[CrossRef]

R. Halir, I. Molina-Fernández, J. Wangüemert-Pérez, A. Ortega-Moñux, J. de Oliva-Rubio, and P. Cheben, Opt. Express 17, 8349 (2009).
[CrossRef]

L. Zavargo-Peche, C. A. Alonso-Ramos, A. Ortega-Moñux, R. Halir, J. Wangüemert-Pérez, and I. Molina-Fernández, in XVIII Workshop Optical Waveguide Theory and Numerical Modeling (2009), p. 45.

2008 (1)

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

2006 (1)

2003 (1)

2002 (2)

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

J. Čtyroký, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petráček, P. Lalanne, J.-P. Hugonin, and R. de la Rue, Opt. Quantum Electron. 34, 455 (2002).

2000 (1)

1991 (1)

R. Soref, J. Schmidtchen, and K. Petermann, IEEE J. Quantum Electron. 27, 1971 (1991).
[CrossRef]

1977 (1)

T. Tamir and S. T. Peng, Appl. Phys. 14, 235 (1977).
[CrossRef]

Alonso-Ramos, C.

Alonso-Ramos, C. A.

L. Zavargo-Peche, C. A. Alonso-Ramos, A. Ortega-Moñux, R. Halir, J. Wangüemert-Pérez, and I. Molina-Fernández, in XVIII Workshop Optical Waveguide Theory and Numerical Modeling (2009), p. 45.

Baets, R.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

J. Čtyroký, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petráček, P. Lalanne, J.-P. Hugonin, and R. de la Rue, Opt. Quantum Electron. 34, 455 (2002).

Bakir, B.

B. Bakir, A. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J. Fedeli, IEEE Photon. Technol. Lett. 22, 739 (2010).
[CrossRef]

Bienstman, P.

J. Čtyroký, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petráček, P. Lalanne, J.-P. Hugonin, and R. de la Rue, Opt. Quantum Electron. 34, 455 (2002).

Bock, P.

J. Schmid, P. Cheben, P. Bock, J. Lapointe, S. Janz, D. Xu, A. Densmore, A. Delâge, and T. Hall, Opt. Photon. News 21, 24 (2010).
[CrossRef]

Bogdanov, A.

Brision, S.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

Cheben, P.

Ctyroký, J.

J. Čtyroký, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petráček, P. Lalanne, J.-P. Hugonin, and R. de la Rue, Opt. Quantum Electron. 34, 455 (2002).

Dalacu, D.

de Gyves, A.

B. Bakir, A. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J. Fedeli, IEEE Photon. Technol. Lett. 22, 739 (2010).
[CrossRef]

de la Rue, R.

J. Čtyroký, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petráček, P. Lalanne, J.-P. Hugonin, and R. de la Rue, Opt. Quantum Electron. 34, 455 (2002).

de Oliva-Rubio, J.

De Ridder, R.

J. Čtyroký, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petráček, P. Lalanne, J.-P. Hugonin, and R. de la Rue, Opt. Quantum Electron. 34, 455 (2002).

Delâge, A.

J. Schmid, P. Cheben, P. Bock, J. Lapointe, S. Janz, D. Xu, A. Densmore, A. Delâge, and T. Hall, Opt. Photon. News 21, 24 (2010).
[CrossRef]

A. Delâge, S. Janz, B. Lamontagne, A. Bogdanov, D. Dalacu, D. Xu, and K. Yap, Opt. Express 14, 148 (2006).
[CrossRef]

Densmore, A.

J. Schmid, P. Cheben, P. Bock, J. Lapointe, S. Janz, D. Xu, A. Densmore, A. Delâge, and T. Hall, Opt. Photon. News 21, 24 (2010).
[CrossRef]

Dillon, T.

Fedeli, J.

B. Bakir, A. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J. Fedeli, IEEE Photon. Technol. Lett. 22, 739 (2010).
[CrossRef]

Fédéli, J.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

Gautier, P.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

Halir, R.

Hall, T.

J. Schmid, P. Cheben, P. Bock, J. Lapointe, S. Janz, D. Xu, A. Densmore, A. Delâge, and T. Hall, Opt. Photon. News 21, 24 (2010).
[CrossRef]

He, S.

Helfert, S.

J. Čtyroký, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petráček, P. Lalanne, J.-P. Hugonin, and R. de la Rue, Opt. Quantum Electron. 34, 455 (2002).

Hugonin, J.-P.

J. Čtyroký, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petráček, P. Lalanne, J.-P. Hugonin, and R. de la Rue, Opt. Quantum Electron. 34, 455 (2002).

Janz, S.

Klaasse, G.

J. Čtyroký, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petráček, P. Lalanne, J.-P. Hugonin, and R. de la Rue, Opt. Quantum Electron. 34, 455 (2002).

Lalanne, P.

J. Čtyroký, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petráček, P. Lalanne, J.-P. Hugonin, and R. de la Rue, Opt. Quantum Electron. 34, 455 (2002).

P. Lalanne and E. Silberstein, Opt. Lett. 25, 1092 (2000).
[CrossRef]

Lamontagne, B.

Lapointe, J.

J. Schmid, P. Cheben, P. Bock, J. Lapointe, S. Janz, D. Xu, A. Densmore, A. Delâge, and T. Hall, Opt. Photon. News 21, 24 (2010).
[CrossRef]

Lin, C.

Lyan, P.

B. Bakir, A. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J. Fedeli, IEEE Photon. Technol. Lett. 22, 739 (2010).
[CrossRef]

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

Molina-Fernández, I.

C. Alonso-Ramos, A. Ortega-Moñux, I. Molina-Fernández, P. Cheben, L. Zavargo-Peche, and R. Halir, Opt. Express 18, 15189 (2010).
[CrossRef]

R. Halir, I. Molina-Fernández, J. Wangüemert-Pérez, A. Ortega-Moñux, J. de Oliva-Rubio, and P. Cheben, Opt. Express 17, 8349 (2009).
[CrossRef]

L. Zavargo-Peche, C. A. Alonso-Ramos, A. Ortega-Moñux, R. Halir, J. Wangüemert-Pérez, and I. Molina-Fernández, in XVIII Workshop Optical Waveguide Theory and Numerical Modeling (2009), p. 45.

Molina-Fernández, Í.

Morita, H.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

Murakowski, J.

Orobtchouk, R.

B. Bakir, A. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J. Fedeli, IEEE Photon. Technol. Lett. 22, 739 (2010).
[CrossRef]

Ortega-Moñux, A.

C. Alonso-Ramos, A. Ortega-Moñux, I. Molina-Fernández, P. Cheben, L. Zavargo-Peche, and R. Halir, Opt. Express 18, 15189 (2010).
[CrossRef]

R. Halir, I. Molina-Fernández, J. Wangüemert-Pérez, A. Ortega-Moñux, J. de Oliva-Rubio, and P. Cheben, Opt. Express 17, 8349 (2009).
[CrossRef]

L. Zavargo-Peche, C. A. Alonso-Ramos, A. Ortega-Moñux, R. Halir, J. Wangüemert-Pérez, and I. Molina-Fernández, in XVIII Workshop Optical Waveguide Theory and Numerical Modeling (2009), p. 45.

Peng, S. T.

T. Tamir and S. T. Peng, Appl. Phys. 14, 235 (1977).
[CrossRef]

Petermann, K.

R. Soref, J. Schmidtchen, and K. Petermann, IEEE J. Quantum Electron. 27, 1971 (1991).
[CrossRef]

Petrácek, J.

J. Čtyroký, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petráček, P. Lalanne, J.-P. Hugonin, and R. de la Rue, Opt. Quantum Electron. 34, 455 (2002).

Porzier, C.

B. Bakir, A. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J. Fedeli, IEEE Photon. Technol. Lett. 22, 739 (2010).
[CrossRef]

Prather, D.

Pregla, R.

J. Čtyroký, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petráček, P. Lalanne, J.-P. Hugonin, and R. de la Rue, Opt. Quantum Electron. 34, 455 (2002).

Pustai, D.

Roelkens, G.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

Roman, A.

B. Bakir, A. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J. Fedeli, IEEE Photon. Technol. Lett. 22, 739 (2010).
[CrossRef]

Schmid, J.

J. Schmid, P. Cheben, P. Bock, J. Lapointe, S. Janz, D. Xu, A. Densmore, A. Delâge, and T. Hall, Opt. Photon. News 21, 24 (2010).
[CrossRef]

Schmidtchen, J.

R. Soref, J. Schmidtchen, and K. Petermann, IEEE J. Quantum Electron. 27, 1971 (1991).
[CrossRef]

Shoji, T.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

Silberstein, E.

Soref, R.

R. Soref, J. Schmidtchen, and K. Petermann, IEEE J. Quantum Electron. 27, 1971 (1991).
[CrossRef]

Stoffer, R.

J. Čtyroký, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petráček, P. Lalanne, J.-P. Hugonin, and R. de la Rue, Opt. Quantum Electron. 34, 455 (2002).

Sure, A.

Tamir, T.

T. Tamir and S. T. Peng, Appl. Phys. 14, 235 (1977).
[CrossRef]

Tang, Y.

Tsuchizawa, T.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

Van Thourhout, D.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

Vermeulen, D.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

Wang, Z.

Wangüemert-Pérez, J.

L. Zavargo-Peche, C. A. Alonso-Ramos, A. Ortega-Moñux, R. Halir, J. Wangüemert-Pérez, and I. Molina-Fernández, in XVIII Workshop Optical Waveguide Theory and Numerical Modeling (2009), p. 45.

R. Halir, P. Cheben, S. Janz, D. Xu, Í. Molina-Fernández, and J. Wangüemert-Pérez, Opt. Lett. 34, 1408 (2009).
[CrossRef]

R. Halir, I. Molina-Fernández, J. Wangüemert-Pérez, A. Ortega-Moñux, J. de Oliva-Rubio, and P. Cheben, Opt. Express 17, 8349 (2009).
[CrossRef]

Watanabe, T.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

Westergren, U.

Wosinski, L.

Xu, D.

Yamada, K.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

Yap, K.

Zavargo-Peche, L.

C. Alonso-Ramos, A. Ortega-Moñux, I. Molina-Fernández, P. Cheben, L. Zavargo-Peche, and R. Halir, Opt. Express 18, 15189 (2010).
[CrossRef]

L. Zavargo-Peche, C. A. Alonso-Ramos, A. Ortega-Moñux, R. Halir, J. Wangüemert-Pérez, and I. Molina-Fernández, in XVIII Workshop Optical Waveguide Theory and Numerical Modeling (2009), p. 45.

Appl. Phys. (1)

T. Tamir and S. T. Peng, Appl. Phys. 14, 235 (1977).
[CrossRef]

Appl. Phys. Lett. (1)

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

Electron. Lett. (1)

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

IEEE J. Quantum Electron. (1)

R. Soref, J. Schmidtchen, and K. Petermann, IEEE J. Quantum Electron. 27, 1971 (1991).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

B. Bakir, A. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J. Fedeli, IEEE Photon. Technol. Lett. 22, 739 (2010).
[CrossRef]

Opt. Express (4)

Opt. Lett. (3)

Opt. Photon. News (1)

J. Schmid, P. Cheben, P. Bock, J. Lapointe, S. Janz, D. Xu, A. Densmore, A. Delâge, and T. Hall, Opt. Photon. News 21, 24 (2010).
[CrossRef]

Opt. Quantum Electron. (1)

J. Čtyroký, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. De Ridder, R. Stoffer, G. Klaasse, J. Petráček, P. Lalanne, J.-P. Hugonin, and R. de la Rue, Opt. Quantum Electron. 34, 455 (2002).

Other (1)

L. Zavargo-Peche, C. A. Alonso-Ramos, A. Ortega-Moñux, R. Halir, J. Wangüemert-Pérez, and I. Molina-Fernández, in XVIII Workshop Optical Waveguide Theory and Numerical Modeling (2009), p. 45.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Metrics