Abstract

We design and fabricate an efficient broadband grating coupler on a 400nm thick silicon-on-insulator wafer. The measured coupling loss is 3dB when coupling to a single-mode fiber at 1310nm wavelength with TE polarization. The spectral FWHM and backreflection are determined to be 58nm and 27dB, respectively.

© 2011 Optical Society of America

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  1. D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
    [CrossRef]
  2. L. Vivien, D. Pascal, S. Lardenois, D. Marris-Morini, E. Cassan, F. Grillot, S. Laval, J.-M. Fédéli, and L. E. Melhaoui, J. Lightwave Technol. 24, 3810 (2006).
    [CrossRef]
  3. G. Roelkens, D. Van Thourhout, and R. Baets, Opt. Express 14, 11622 (2006).
    [CrossRef] [PubMed]
  4. G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
    [CrossRef]
  5. D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, Opt. Express 18, 18278 (2010).
    [CrossRef] [PubMed]
  6. A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. De Dobbelaere, Jpn. J. Appl. Phys. Part 1 45, 6071 (2006).
    [CrossRef]
  7. B. Wang, J. Jiang, and G. P. Nordin, IEEE Photon. Technol. Lett. 17, 1884 (2005).
    [CrossRef]
  8. G. Roelkens, D. Van Thourhout, and R. Baets, Opt. Lett. 32, 1495 (2007).
    [CrossRef] [PubMed]
  9. R. Halir, P. Cheben, S. Janz, D.-X. Xu, Í. Molina-Fernández, and J. G. Wangüemert-Pérez, Opt. Lett. 34, 1408 (2009).
    [CrossRef] [PubMed]
  10. L. Liu, M. Pu, K. Yvind, and J. M. Hvam, Appl. Phys. Lett. 96, 051126 (2010).
    [CrossRef]
  11. M. Antelius, K. B. Gylfason, and H. Sohlström, Opt. Express 19, 3592 (2011).
    [CrossRef] [PubMed]
  12. A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, IEEE Photon. Technol. Lett. 20, 1667 (2008).
    [CrossRef]
  13. A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, Opt. Express 15, 660 (2007).
    [CrossRef] [PubMed]

2011 (1)

2010 (2)

2009 (1)

2008 (2)

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, IEEE Photon. Technol. Lett. 20, 1667 (2008).
[CrossRef]

2007 (2)

2006 (4)

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. De Dobbelaere, Jpn. J. Appl. Phys. Part 1 45, 6071 (2006).
[CrossRef]

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

L. Vivien, D. Pascal, S. Lardenois, D. Marris-Morini, E. Cassan, F. Grillot, S. Laval, J.-M. Fédéli, and L. E. Melhaoui, J. Lightwave Technol. 24, 3810 (2006).
[CrossRef]

G. Roelkens, D. Van Thourhout, and R. Baets, Opt. Express 14, 11622 (2006).
[CrossRef] [PubMed]

2005 (1)

B. Wang, J. Jiang, and G. P. Nordin, IEEE Photon. Technol. Lett. 17, 1884 (2005).
[CrossRef]

Absil, P.

Antelius, M.

Ayre, M.

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

Baets, R.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

G. Roelkens, D. Van Thourhout, and R. Baets, Opt. Lett. 32, 1495 (2007).
[CrossRef] [PubMed]

G. Roelkens, D. Van Thourhout, and R. Baets, Opt. Express 14, 11622 (2006).
[CrossRef] [PubMed]

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

Bienstman, P.

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

Bogaerts, W.

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, Opt. Express 18, 18278 (2010).
[CrossRef] [PubMed]

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

Bowers, J. E.

A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, IEEE Photon. Technol. Lett. 20, 1667 (2008).
[CrossRef]

Brision, S.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

Cassan, E.

Cheben, P.

Chetrit, Y.

Ciftcioglu, B.

De Dobbelaere, P.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. De Dobbelaere, Jpn. J. Appl. Phys. Part 1 45, 6071 (2006).
[CrossRef]

Fang, A. W.

A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, IEEE Photon. Technol. Lett. 20, 1667 (2008).
[CrossRef]

Fédéli, J.-M.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

L. Vivien, D. Pascal, S. Lardenois, D. Marris-Morini, E. Cassan, F. Grillot, S. Laval, J.-M. Fédéli, and L. E. Melhaoui, J. Lightwave Technol. 24, 3810 (2006).
[CrossRef]

Gautier, P.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

Gloeckner, S.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. De Dobbelaere, Jpn. J. Appl. Phys. Part 1 45, 6071 (2006).
[CrossRef]

Grillot, F.

Gylfason, K. B.

Halir, R.

Hvam, J. M.

L. Liu, M. Pu, K. Yvind, and J. M. Hvam, Appl. Phys. Lett. 96, 051126 (2010).
[CrossRef]

Izhaky, N.

Janz, S.

Jiang, J.

B. Wang, J. Jiang, and G. P. Nordin, IEEE Photon. Technol. Lett. 17, 1884 (2005).
[CrossRef]

Jones, R.

A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, IEEE Photon. Technol. Lett. 20, 1667 (2008).
[CrossRef]

Koch, B. R.

A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, IEEE Photon. Technol. Lett. 20, 1667 (2008).
[CrossRef]

Kuo, Y.-H.

A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, IEEE Photon. Technol. Lett. 20, 1667 (2008).
[CrossRef]

Laere, F. V.

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

Lardenois, S.

Laval, S.

Lepage, G.

Liang, D.

A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, IEEE Photon. Technol. Lett. 20, 1667 (2008).
[CrossRef]

Liao, L.

Liu, A.

Liu, L.

L. Liu, M. Pu, K. Yvind, and J. M. Hvam, Appl. Phys. Lett. 96, 051126 (2010).
[CrossRef]

Lively, E.

A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, IEEE Photon. Technol. Lett. 20, 1667 (2008).
[CrossRef]

Lyan, P.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

Marris-Morini, D.

Masini, G.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. De Dobbelaere, Jpn. J. Appl. Phys. Part 1 45, 6071 (2006).
[CrossRef]

Mekis, A.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. De Dobbelaere, Jpn. J. Appl. Phys. Part 1 45, 6071 (2006).
[CrossRef]

Melhaoui, L. E.

Molina-Fernández, Í.

Narasimha, A.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. De Dobbelaere, Jpn. J. Appl. Phys. Part 1 45, 6071 (2006).
[CrossRef]

Nguyen, H.

Nordin, G. P.

B. Wang, J. Jiang, and G. P. Nordin, IEEE Photon. Technol. Lett. 17, 1884 (2005).
[CrossRef]

Paniccia, M.

Pascal, D.

Pinguet, T.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. De Dobbelaere, Jpn. J. Appl. Phys. Part 1 45, 6071 (2006).
[CrossRef]

Pu, M.

L. Liu, M. Pu, K. Yvind, and J. M. Hvam, Appl. Phys. Lett. 96, 051126 (2010).
[CrossRef]

Roelkens, G.

Rubin, D.

Sahni, S.

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. De Dobbelaere, Jpn. J. Appl. Phys. Part 1 45, 6071 (2006).
[CrossRef]

Selvaraja, S.

Sohlström, H.

Taillaert, D.

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

Van Thourhout, D.

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, Opt. Express 18, 18278 (2010).
[CrossRef] [PubMed]

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

G. Roelkens, D. Van Thourhout, and R. Baets, Opt. Lett. 32, 1495 (2007).
[CrossRef] [PubMed]

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

G. Roelkens, D. Van Thourhout, and R. Baets, Opt. Express 14, 11622 (2006).
[CrossRef] [PubMed]

Verheyen, P.

Vermeulen, D.

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, Opt. Express 18, 18278 (2010).
[CrossRef] [PubMed]

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

Vivien, L.

Wang, B.

B. Wang, J. Jiang, and G. P. Nordin, IEEE Photon. Technol. Lett. 17, 1884 (2005).
[CrossRef]

Wangüemert-Pérez, J. G.

Xu, D.-X.

Yvind, K.

L. Liu, M. Pu, K. Yvind, and J. M. Hvam, Appl. Phys. Lett. 96, 051126 (2010).
[CrossRef]

Appl. Phys. Lett. (2)

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J.-M. Fédéli, Appl. Phys. Lett. 92, 131101 (2008).
[CrossRef]

L. Liu, M. Pu, K. Yvind, and J. M. Hvam, Appl. Phys. Lett. 96, 051126 (2010).
[CrossRef]

IEEE Photon. Technol. Lett. (2)

A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, IEEE Photon. Technol. Lett. 20, 1667 (2008).
[CrossRef]

B. Wang, J. Jiang, and G. P. Nordin, IEEE Photon. Technol. Lett. 17, 1884 (2005).
[CrossRef]

J. Lightwave Technol. (1)

Jpn. J. Appl. Phys. (2)

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. De Dobbelaere, Jpn. J. Appl. Phys. Part 1 45, 6071 (2006).
[CrossRef]

Opt. Express (4)

Opt. Lett. (2)

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Figures (6)

Fig. 1
Fig. 1

(a) Schematic plot of a conventional GC. (b) Fraction of power diffracted upward as a function of trench width and grating period, given 55% etch depth. Trench width is normalized by grating period and etch depth is normalized by 400 nm .

Fig. 2
Fig. 2

(a) Schematic plot of a modified GC. (b) Fraction of power diffracted upward as a function of trench width and grating period, given 55% etch depth. Trench width is normalized by grating period and etch depth is normalized by 400 nm .

Fig. 3
Fig. 3

Schematic plot of the proposed GC design concept.

Fig. 4
Fig. 4

SEM images of (a) grating and (b) rib tip, with oxide cladding removed.

Fig. 5
Fig. 5

Measured GC spectrum when interfacing a SMF. Inset, measured etalon fringes at spectrum peak.

Fig. 6
Fig. 6

Standard deviation of within-die GC loss plotted as a function of die location.

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