Abstract

In this Letter we report on the fabrication and testing of an extremely thin variable aperture stop based on the design of a single chamber adaptive membrane lens with integrated actuation. The aperture consists of a ring-shaped piezoelectric bending actuator with an elastic silicone membrane in the center. The formed cavity is filled with a nontransparent fluid and sealed with a glass platelet. In a voltage range up to 80 V, an opening of the aperture of 4.55 mm in diameter is obtained. The transmission in comparison to a standard mechanical aperture stop is maximum 6% lower.

© 2011 Optical Society of America

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2010

P. Mueller, N. Spengler, H. Zappe, and W. Moench, J. Microelectromech. Syst. 19, 1477 (2010).
[CrossRef]

2008

2004

R. R. A. Syms, H. Zou, J. Stagg, and H. Veladi, J. Micromech. Microeng. 14, 1700 (2004).
[CrossRef]

Burger, T.

J. Draheim, F. Schneider, T. Burger, R. Kamberger, and U. Wallrabe, in Proceedings of Optical MEMS and Nanophotonics (IEEE, 2010), pp. 15.

J. Draheim, T. Burger, F. Schneider, and U. Wallrabe, in Proceedings of IEEE International Conference on MEMS (IEEE, 2011), pp. 692.

Doering, C.

C. Kimmle, U. Schmittat, C. Doering, and H. Fouckhardt, Microelectron. Eng. (2011, in press).

Draheim, J.

J. Draheim, F. Schneider, T. Burger, R. Kamberger, and U. Wallrabe, in Proceedings of Optical MEMS and Nanophotonics (IEEE, 2010), pp. 15.

J. Draheim, T. Burger, F. Schneider, and U. Wallrabe, in Proceedings of IEEE International Conference on MEMS (IEEE, 2011), pp. 692.

Feiwen, L.

Fouckhardt, H.

C. Kimmle, U. Schmittat, C. Doering, and H. Fouckhardt, Microelectron. Eng. (2011, in press).

Guangya, Z.

Hongbin, Y.

Jung, K.-D.

C.-H. Kim, K.-D. Jung, and W. Kim, in Proceedings of IEEE International Conference on MEMS (IEEE, 2009), pp. 156.

Kamberger, R.

J. Draheim, F. Schneider, T. Burger, R. Kamberger, and U. Wallrabe, in Proceedings of Optical MEMS and Nanophotonics (IEEE, 2010), pp. 15.

Kim, C.-H.

C.-H. Kim, K.-D. Jung, and W. Kim, in Proceedings of IEEE International Conference on MEMS (IEEE, 2009), pp. 156.

Kim, W.

C.-H. Kim, K.-D. Jung, and W. Kim, in Proceedings of IEEE International Conference on MEMS (IEEE, 2009), pp. 156.

Kimmle, C.

C. Kimmle, U. Schmittat, C. Doering, and H. Fouckhardt, Microelectron. Eng. (2011, in press).

Moench, W.

P. Mueller, N. Spengler, H. Zappe, and W. Moench, J. Microelectromech. Syst. 19, 1477 (2010).
[CrossRef]

Mueller, P.

P. Mueller, N. Spengler, H. Zappe, and W. Moench, J. Microelectromech. Syst. 19, 1477 (2010).
[CrossRef]

Schmittat, U.

C. Kimmle, U. Schmittat, C. Doering, and H. Fouckhardt, Microelectron. Eng. (2011, in press).

Schneider, F.

J. Draheim, F. Schneider, T. Burger, R. Kamberger, and U. Wallrabe, in Proceedings of Optical MEMS and Nanophotonics (IEEE, 2010), pp. 15.

J. Draheim, T. Burger, F. Schneider, and U. Wallrabe, in Proceedings of IEEE International Conference on MEMS (IEEE, 2011), pp. 692.

Siong, C. F.

Spengler, N.

P. Mueller, N. Spengler, H. Zappe, and W. Moench, J. Microelectromech. Syst. 19, 1477 (2010).
[CrossRef]

Stagg, J.

R. R. A. Syms, H. Zou, J. Stagg, and H. Veladi, J. Micromech. Microeng. 14, 1700 (2004).
[CrossRef]

Syms, R. R. A.

R. R. A. Syms, H. Zou, J. Stagg, and H. Veladi, J. Micromech. Microeng. 14, 1700 (2004).
[CrossRef]

Veladi, H.

R. R. A. Syms, H. Zou, J. Stagg, and H. Veladi, J. Micromech. Microeng. 14, 1700 (2004).
[CrossRef]

Wallrabe, U.

J. Draheim, F. Schneider, T. Burger, R. Kamberger, and U. Wallrabe, in Proceedings of Optical MEMS and Nanophotonics (IEEE, 2010), pp. 15.

J. Draheim, T. Burger, F. Schneider, and U. Wallrabe, in Proceedings of IEEE International Conference on MEMS (IEEE, 2011), pp. 692.

Zappe, H.

P. Mueller, N. Spengler, H. Zappe, and W. Moench, J. Microelectromech. Syst. 19, 1477 (2010).
[CrossRef]

Zou, H.

R. R. A. Syms, H. Zou, J. Stagg, and H. Veladi, J. Micromech. Microeng. 14, 1700 (2004).
[CrossRef]

J. Microelectromech. Syst.

P. Mueller, N. Spengler, H. Zappe, and W. Moench, J. Microelectromech. Syst. 19, 1477 (2010).
[CrossRef]

J. Micromech. Microeng.

R. R. A. Syms, H. Zou, J. Stagg, and H. Veladi, J. Micromech. Microeng. 14, 1700 (2004).
[CrossRef]

Opt. Lett.

Other

C. Kimmle, U. Schmittat, C. Doering, and H. Fouckhardt, Microelectron. Eng. (2011, in press).

C.-H. Kim, K.-D. Jung, and W. Kim, in Proceedings of IEEE International Conference on MEMS (IEEE, 2009), pp. 156.

J. Draheim, F. Schneider, T. Burger, R. Kamberger, and U. Wallrabe, in Proceedings of Optical MEMS and Nanophotonics (IEEE, 2010), pp. 15.

J. Draheim, T. Burger, F. Schneider, and U. Wallrabe, in Proceedings of IEEE International Conference on MEMS (IEEE, 2011), pp. 692.

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