Abstract

We propose a design for high quality factor two-dimensional (2D) photonic crystal cavities on silicon-on- insulator (SOI). A quality factor of up to 1.2×107 with a modal volume of 2.35(λ/n)3 is simulated. A very high quality factor of 200,000 is experimentally demonstrated for a 2D cavity fabricated on SOI.

© 2011 Optical Society of America

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  1. Y. Akahane, T. Asano, B. S. Song, and S. Noda, Nature 425, 944 (2003).
    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
  4. Z. Han, X. Checoury, D. Néel, S. David, M. El Kurdi, and P. Boucaud, Opt. Commun. 283, 4387 (2010).
    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
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    [CrossRef]
  13. X. Checoury, S. Enoch, C. Lopez, and A. Blanco, Appl. Phys. Lett. 90, 161131 (2007).
    [CrossRef]
  14. M. El Kurdi, X. Checoury, S. David, T. P. Ngo, N. Zerounian, P. Boucaud, O. Kermarrec, Y. Campidelli, and D. Bensahel, Opt. Express 16, 8780 (2008).
    [CrossRef] [PubMed]
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    [CrossRef]
  16. X. Checoury, Z. Han, and P. Boucaud, Phys. Rev. B 82, 041308 (2010).
    [CrossRef]

2011 (1)

2010 (5)

Z. Han, X. Checoury, D. Néel, S. David, M. El Kurdi, and P. Boucaud, Opt. Commun. 283, 4387 (2010).
[CrossRef]

E. Kuramochi, H. Taniyama, T. Tanabe, K. Kawasaki, Y. G. Roh, and M. Notomi, Opt. Express 18, 15859 (2010).
[CrossRef] [PubMed]

L.-D. Haret, X. Checoury, Z. Han, P. Boucaud, S. Combrié, and A. de Rossi, Opt. Express 18, 23965 (2010).
[CrossRef] [PubMed]

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, Comput. Phys. Commun. 181, 687 (2010).
[CrossRef]

X. Checoury, Z. Han, and P. Boucaud, Phys. Rev. B 82, 041308 (2010).
[CrossRef]

2009 (2)

H. Hagino, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, Phys. Rev. B 79, 085112 (2009).
[CrossRef]

X. Checoury, M. El Kurdi, Z. Han, and P. Boucaud, Opt. Express 17, 3500 (2009).
[CrossRef] [PubMed]

2008 (2)

2007 (2)

2006 (2)

Y. Tanaka, T. Asano, R. Hatsuta, and S. Noda, Appl. Phys. Lett. 88, 011112 (2006).
[CrossRef]

E. Kuramochi, M. Notomi, S. Mitsugi, A. Shinya, T. Tanabe, and T. Watanabe, Appl. Phys. Lett. 88, 041112 (2006).
[CrossRef]

2005 (1)

B. S. Song, S. Noda, T. Asano, and Y. Akahane, Nat. Mater. 4, 207 (2005).
[CrossRef]

2003 (1)

Y. Akahane, T. Asano, B. S. Song, and S. Noda, Nature 425, 944 (2003).
[CrossRef] [PubMed]

Akahane, Y.

B. S. Song, S. Noda, T. Asano, and Y. Akahane, Nat. Mater. 4, 207 (2005).
[CrossRef]

Y. Akahane, T. Asano, B. S. Song, and S. Noda, Nature 425, 944 (2003).
[CrossRef] [PubMed]

Asano, T.

H. Hagino, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, Phys. Rev. B 79, 085112 (2009).
[CrossRef]

Y. Tanaka, T. Asano, R. Hatsuta, and S. Noda, Appl. Phys. Lett. 88, 011112 (2006).
[CrossRef]

B. S. Song, S. Noda, T. Asano, and Y. Akahane, Nat. Mater. 4, 207 (2005).
[CrossRef]

Y. Akahane, T. Asano, B. S. Song, and S. Noda, Nature 425, 944 (2003).
[CrossRef] [PubMed]

Bensahel, D.

Bermel, P.

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, Comput. Phys. Commun. 181, 687 (2010).
[CrossRef]

Blanco, A.

X. Checoury, S. Enoch, C. Lopez, and A. Blanco, Appl. Phys. Lett. 90, 161131 (2007).
[CrossRef]

Boucaud, P.

Campidelli, Y.

Charvolin, T.

Checoury, X.

Combrié, S.

David, S.

De la Rue, R. M.

de Rossi, A.

El Kurdi, M.

Enoch, S.

X. Checoury, S. Enoch, C. Lopez, and A. Blanco, Appl. Phys. Lett. 90, 161131 (2007).
[CrossRef]

Hadji, E.

Hagino, H.

H. Hagino, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, Phys. Rev. B 79, 085112 (2009).
[CrossRef]

Han, Z.

Z. Han, X. Checoury, D. Néel, S. David, M. El Kurdi, and P. Boucaud, Opt. Commun. 283, 4387 (2010).
[CrossRef]

X. Checoury, Z. Han, and P. Boucaud, Phys. Rev. B 82, 041308 (2010).
[CrossRef]

L.-D. Haret, X. Checoury, Z. Han, P. Boucaud, S. Combrié, and A. de Rossi, Opt. Express 18, 23965 (2010).
[CrossRef] [PubMed]

X. Checoury, M. El Kurdi, Z. Han, and P. Boucaud, Opt. Express 17, 3500 (2009).
[CrossRef] [PubMed]

Haret, L.-D.

Hatsuta, R.

Y. Tanaka, T. Asano, R. Hatsuta, and S. Noda, Appl. Phys. Lett. 88, 011112 (2006).
[CrossRef]

Ibanescu, M.

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, Comput. Phys. Commun. 181, 687 (2010).
[CrossRef]

Jeon, S.-W.

Joannopoulos, J. D.

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, Comput. Phys. Commun. 181, 687 (2010).
[CrossRef]

Johnson, N. P.

Johnson, S. G.

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, Comput. Phys. Commun. 181, 687 (2010).
[CrossRef]

Kawasaki, K.

Kermarrec, O.

Kuramochi, E.

E. Kuramochi, H. Taniyama, T. Tanabe, K. Kawasaki, Y. G. Roh, and M. Notomi, Opt. Express 18, 15859 (2010).
[CrossRef] [PubMed]

E. Kuramochi, M. Notomi, S. Mitsugi, A. Shinya, T. Tanabe, and T. Watanabe, Appl. Phys. Lett. 88, 041112 (2006).
[CrossRef]

Lalanne, P.

Lopez, C.

X. Checoury, S. Enoch, C. Lopez, and A. Blanco, Appl. Phys. Lett. 90, 161131 (2007).
[CrossRef]

Mitsugi, S.

E. Kuramochi, M. Notomi, S. Mitsugi, A. Shinya, T. Tanabe, and T. Watanabe, Appl. Phys. Lett. 88, 041112 (2006).
[CrossRef]

Néel, D.

Z. Han, X. Checoury, D. Néel, S. David, M. El Kurdi, and P. Boucaud, Opt. Commun. 283, 4387 (2010).
[CrossRef]

Ngo, T. P.

Noda, S.

B.-S. Song, S.-W. Jeon, and S. Noda, Opt. Lett. 36, 91 (2011).
[CrossRef] [PubMed]

H. Hagino, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, Phys. Rev. B 79, 085112 (2009).
[CrossRef]

Y. Tanaka, T. Asano, R. Hatsuta, and S. Noda, Appl. Phys. Lett. 88, 011112 (2006).
[CrossRef]

B. S. Song, S. Noda, T. Asano, and Y. Akahane, Nat. Mater. 4, 207 (2005).
[CrossRef]

Y. Akahane, T. Asano, B. S. Song, and S. Noda, Nature 425, 944 (2003).
[CrossRef] [PubMed]

Notomi, M.

E. Kuramochi, H. Taniyama, T. Tanabe, K. Kawasaki, Y. G. Roh, and M. Notomi, Opt. Express 18, 15859 (2010).
[CrossRef] [PubMed]

E. Kuramochi, M. Notomi, S. Mitsugi, A. Shinya, T. Tanabe, and T. Watanabe, Appl. Phys. Lett. 88, 041112 (2006).
[CrossRef]

Oskooi, A. F.

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, Comput. Phys. Commun. 181, 687 (2010).
[CrossRef]

Peyrade, D.

Picard, E.

Rodier, J. C.

Roh, Y. G.

Roundy, D.

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, Comput. Phys. Commun. 181, 687 (2010).
[CrossRef]

Shinya, A.

E. Kuramochi, M. Notomi, S. Mitsugi, A. Shinya, T. Tanabe, and T. Watanabe, Appl. Phys. Lett. 88, 041112 (2006).
[CrossRef]

Song, B. S.

B. S. Song, S. Noda, T. Asano, and Y. Akahane, Nat. Mater. 4, 207 (2005).
[CrossRef]

Y. Akahane, T. Asano, B. S. Song, and S. Noda, Nature 425, 944 (2003).
[CrossRef] [PubMed]

Song, B.-S.

Sorel, M.

Takahashi, Y.

H. Hagino, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, Phys. Rev. B 79, 085112 (2009).
[CrossRef]

Tanabe, T.

E. Kuramochi, H. Taniyama, T. Tanabe, K. Kawasaki, Y. G. Roh, and M. Notomi, Opt. Express 18, 15859 (2010).
[CrossRef] [PubMed]

E. Kuramochi, M. Notomi, S. Mitsugi, A. Shinya, T. Tanabe, and T. Watanabe, Appl. Phys. Lett. 88, 041112 (2006).
[CrossRef]

Tanaka, Y.

H. Hagino, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, Phys. Rev. B 79, 085112 (2009).
[CrossRef]

Y. Tanaka, T. Asano, R. Hatsuta, and S. Noda, Appl. Phys. Lett. 88, 011112 (2006).
[CrossRef]

Taniyama, H.

Velha, P.

Watanabe, T.

E. Kuramochi, M. Notomi, S. Mitsugi, A. Shinya, T. Tanabe, and T. Watanabe, Appl. Phys. Lett. 88, 041112 (2006).
[CrossRef]

Zain, A. R. M.

Zerounian, N.

Appl. Phys. Lett. (3)

E. Kuramochi, M. Notomi, S. Mitsugi, A. Shinya, T. Tanabe, and T. Watanabe, Appl. Phys. Lett. 88, 041112 (2006).
[CrossRef]

Y. Tanaka, T. Asano, R. Hatsuta, and S. Noda, Appl. Phys. Lett. 88, 011112 (2006).
[CrossRef]

X. Checoury, S. Enoch, C. Lopez, and A. Blanco, Appl. Phys. Lett. 90, 161131 (2007).
[CrossRef]

Comput. Phys. Commun. (1)

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, Comput. Phys. Commun. 181, 687 (2010).
[CrossRef]

Nat. Mater. (1)

B. S. Song, S. Noda, T. Asano, and Y. Akahane, Nat. Mater. 4, 207 (2005).
[CrossRef]

Nature (1)

Y. Akahane, T. Asano, B. S. Song, and S. Noda, Nature 425, 944 (2003).
[CrossRef] [PubMed]

Opt. Commun. (1)

Z. Han, X. Checoury, D. Néel, S. David, M. El Kurdi, and P. Boucaud, Opt. Commun. 283, 4387 (2010).
[CrossRef]

Opt. Express (6)

Opt. Lett. (1)

Phys. Rev. B (2)

H. Hagino, Y. Takahashi, Y. Tanaka, T. Asano, and S. Noda, Phys. Rev. B 79, 085112 (2009).
[CrossRef]

X. Checoury, Z. Han, and P. Boucaud, Phys. Rev. B 82, 041308 (2010).
[CrossRef]

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Figures (3)

Fig. 1
Fig. 1

(a) Structure of the cavity: the holes in warm colors define the cavity. The blue holes show the coupling zone. All the displacements of the colored holes are exaggerated for clarity. (b) Profile of the electric field module | E y | of the resonant mode in the x y plane calculated by 3D-FDTD. (c), (d) Fourier transform of E y in the case of this cavity (c) and of the Kuramochi type cavity on SOI (d). The white circles represent the silica light cone.

Fig. 2
Fig. 2

(a) Calculated quality factor as a function of the barrier length l for a hole shift d of 8 nm . (b) Calculated quality factor as a function of hole shift d for a barrier length l of 29 holes.

Fig. 3
Fig. 3

(a) Measured quality factor as a function of the barrier length l. The hole shift d is 8 nm . (b) Measured transmission spectrum of the cavity for a barrier length l of 19 periods.

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