Abstract

We demonstrate photodiodes in deposited polycrystalline silicon at 1550nm wavelength with 0.15A/W responsivity, 40nA dark current, and gigahertz time response. Subband absorption is mediated by defects that are naturally present in the polycrystalline material structure. The material exhibits a moderate absorption coefficient of 6dB/cm, which allows the same microring resonator device to act as both a demultiplexing filter and a photodetector. We discuss the use of deposited silicon-based complementary metal-oxide semiconductor materials for nanophotonic interconnects.

© 2010 Optical Society of America

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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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2010 (3)

J. Michel, J. Liu, and L. C. Kimerling, Nat. Photon. 4, 527 (2010).
[CrossRef]

J. K. Doylend, P. E. Jessop, and A. P. Knights, Opt. Express 18, 14671 (2010).
[CrossRef] [PubMed]

I. A. Young, E. Mohammed, J. T. S. Liao, A. M. Kern, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, IEEE J. Solid-State Circuits 45, 235 (2010).
[CrossRef]

2009 (4)

2008 (2)

T. Baehr-Jones, M. Hochberg, and A. Scherer, Opt. Express 16, 1659 (2008).
[CrossRef] [PubMed]

K. Preston, P. Dong, B. Schmidt, and M. Lipson, Appl. Phys. Lett. 92, 151104 (2008).
[CrossRef]

2005 (1)

J. D. B. Bradley, P. E. Jessop, and A. P. Knights, Appl. Phys. Lett. 86, 241103 (2005).
[CrossRef]

2000 (1)

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, J. Electron. Mater. 29, 1380 (2000).
[CrossRef]

1983 (1)

W. B. Jackson, N. M. Johnson, and D. K. Biegelsen, Appl. Phys. Lett. 43, 195 (1983).
[CrossRef]

1960 (1)

M. Wolf, Proc. IRE 48, 1246 (1960).
[CrossRef]

1959 (1)

H. Y. Fan and A. K. Ramdas, J. Appl. Phys. 30, 1127 (1959).
[CrossRef]

Agarwal, A. M.

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, J. Electron. Mater. 29, 1380 (2000).
[CrossRef]

Ashok, V. K.

S. Roshanak, Z. Dawei, L. Shirong, D. Po, L. Hong, F. Ning-Ning, B. J. Luff, F. Dazeng, L. Guoliang, C. John, R. Kannan, V. K. Ashok, and A. Mehdi, in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OMI8.

Baehr-Jones, T.

Biegelsen, D. K.

W. B. Jackson, N. M. Johnson, and D. K. Biegelsen, Appl. Phys. Lett. 43, 195 (1983).
[CrossRef]

Block, B. A.

I. A. Young, E. Mohammed, J. T. S. Liao, A. M. Kern, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, IEEE J. Solid-State Circuits 45, 235 (2010).
[CrossRef]

Bradley, J. D. B.

J. D. B. Bradley, P. E. Jessop, and A. P. Knights, Appl. Phys. Lett. 86, 241103 (2005).
[CrossRef]

Chang, P. L. D.

I. A. Young, E. Mohammed, J. T. S. Liao, A. M. Kern, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, IEEE J. Solid-State Circuits 45, 235 (2010).
[CrossRef]

Dawei, Z.

S. Roshanak, Z. Dawei, L. Shirong, D. Po, L. Hong, F. Ning-Ning, B. J. Luff, F. Dazeng, L. Guoliang, C. John, R. Kannan, V. K. Ashok, and A. Mehdi, in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OMI8.

Dazeng, F.

S. Roshanak, Z. Dawei, L. Shirong, D. Po, L. Hong, F. Ning-Ning, B. J. Luff, F. Dazeng, L. Guoliang, C. John, R. Kannan, V. K. Ashok, and A. Mehdi, in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OMI8.

Dong, P.

K. Preston, P. Dong, B. Schmidt, and M. Lipson, Appl. Phys. Lett. 92, 151104 (2008).
[CrossRef]

Doylend, J. K.

Duan, X.

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, J. Electron. Mater. 29, 1380 (2000).
[CrossRef]

Fan, H. Y.

H. Y. Fan and A. K. Ramdas, J. Appl. Phys. 30, 1127 (1959).
[CrossRef]

Geis, M. W.

Gondarenko, A.

Grein, M. E.

Guoliang, L.

S. Roshanak, Z. Dawei, L. Shirong, D. Po, L. Hong, F. Ning-Ning, B. J. Luff, F. Dazeng, L. Guoliang, C. John, R. Kannan, V. K. Ashok, and A. Mehdi, in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OMI8.

Hochberg, M.

Hong, L.

S. Roshanak, Z. Dawei, L. Shirong, D. Po, L. Hong, F. Ning-Ning, B. J. Luff, F. Dazeng, L. Guoliang, C. John, R. Kannan, V. K. Ashok, and A. Mehdi, in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OMI8.

Jackson, W. B.

W. B. Jackson, N. M. Johnson, and D. K. Biegelsen, Appl. Phys. Lett. 43, 195 (1983).
[CrossRef]

Jessop, P. E.

John, C.

S. Roshanak, Z. Dawei, L. Shirong, D. Po, L. Hong, F. Ning-Ning, B. J. Luff, F. Dazeng, L. Guoliang, C. John, R. Kannan, V. K. Ashok, and A. Mehdi, in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OMI8.

Johnson, N. M.

W. B. Jackson, N. M. Johnson, and D. K. Biegelsen, Appl. Phys. Lett. 43, 195 (1983).
[CrossRef]

Kamins, T.

T. Kamins, Polycrystalline Silicon for Integrated Circuits and Displays, 2nd ed. (Kluwer, 1998).
[CrossRef]

Kannan, R.

S. Roshanak, Z. Dawei, L. Shirong, D. Po, L. Hong, F. Ning-Ning, B. J. Luff, F. Dazeng, L. Guoliang, C. John, R. Kannan, V. K. Ashok, and A. Mehdi, in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OMI8.

Kern, A. M.

I. A. Young, E. Mohammed, J. T. S. Liao, A. M. Kern, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, IEEE J. Solid-State Circuits 45, 235 (2010).
[CrossRef]

Kimerling, L. C.

J. Michel, J. Liu, and L. C. Kimerling, Nat. Photon. 4, 527 (2010).
[CrossRef]

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, J. Electron. Mater. 29, 1380 (2000).
[CrossRef]

Knights, A. P.

Lee, K. K.

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, J. Electron. Mater. 29, 1380 (2000).
[CrossRef]

Lennon, D. M.

Levy, J. S.

Liao, J. T. S.

I. A. Young, E. Mohammed, J. T. S. Liao, A. M. Kern, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, IEEE J. Solid-State Circuits 45, 235 (2010).
[CrossRef]

Liao, L.

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, J. Electron. Mater. 29, 1380 (2000).
[CrossRef]

Lim, D. R.

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, J. Electron. Mater. 29, 1380 (2000).
[CrossRef]

Lipson, M.

Liu, J.

J. Michel, J. Liu, and L. C. Kimerling, Nat. Photon. 4, 527 (2010).
[CrossRef]

Logan, D.

Luff, B. J.

S. Roshanak, Z. Dawei, L. Shirong, D. Po, L. Hong, F. Ning-Ning, B. J. Luff, F. Dazeng, L. Guoliang, C. John, R. Kannan, V. K. Ashok, and A. Mehdi, in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OMI8.

Lyszczarz, T. M.

Manipatruni, S.

Mehdi, A.

S. Roshanak, Z. Dawei, L. Shirong, D. Po, L. Hong, F. Ning-Ning, B. J. Luff, F. Dazeng, L. Guoliang, C. John, R. Kannan, V. K. Ashok, and A. Mehdi, in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OMI8.

Michel, J.

J. Michel, J. Liu, and L. C. Kimerling, Nat. Photon. 4, 527 (2010).
[CrossRef]

Mohammed, E.

I. A. Young, E. Mohammed, J. T. S. Liao, A. M. Kern, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, IEEE J. Solid-State Circuits 45, 235 (2010).
[CrossRef]

Ning-Ning, F.

S. Roshanak, Z. Dawei, L. Shirong, D. Po, L. Hong, F. Ning-Ning, B. J. Luff, F. Dazeng, L. Guoliang, C. John, R. Kannan, V. K. Ashok, and A. Mehdi, in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OMI8.

Palermo, S.

I. A. Young, E. Mohammed, J. T. S. Liao, A. M. Kern, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, IEEE J. Solid-State Circuits 45, 235 (2010).
[CrossRef]

Po, D.

S. Roshanak, Z. Dawei, L. Shirong, D. Po, L. Hong, F. Ning-Ning, B. J. Luff, F. Dazeng, L. Guoliang, C. John, R. Kannan, V. K. Ashok, and A. Mehdi, in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OMI8.

Poitras, C. B.

Preston, K.

Ramdas, A. K.

H. Y. Fan and A. K. Ramdas, J. Appl. Phys. 30, 1127 (1959).
[CrossRef]

Reshotko, M. R.

I. A. Young, E. Mohammed, J. T. S. Liao, A. M. Kern, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, IEEE J. Solid-State Circuits 45, 235 (2010).
[CrossRef]

Roshanak, S.

S. Roshanak, Z. Dawei, L. Shirong, D. Po, L. Hong, F. Ning-Ning, B. J. Luff, F. Dazeng, L. Guoliang, C. John, R. Kannan, V. K. Ashok, and A. Mehdi, in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OMI8.

Scherer, A.

Schmidt, B.

K. Preston, P. Dong, B. Schmidt, and M. Lipson, Appl. Phys. Lett. 92, 151104 (2008).
[CrossRef]

Shirong, L.

S. Roshanak, Z. Dawei, L. Shirong, D. Po, L. Hong, F. Ning-Ning, B. J. Luff, F. Dazeng, L. Guoliang, C. John, R. Kannan, V. K. Ashok, and A. Mehdi, in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OMI8.

Spector, S. J.

Wolf, M.

M. Wolf, Proc. IRE 48, 1246 (1960).
[CrossRef]

Yoon, J. U.

Young, I. A.

I. A. Young, E. Mohammed, J. T. S. Liao, A. M. Kern, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, IEEE J. Solid-State Circuits 45, 235 (2010).
[CrossRef]

Appl. Phys. Lett. (3)

J. D. B. Bradley, P. E. Jessop, and A. P. Knights, Appl. Phys. Lett. 86, 241103 (2005).
[CrossRef]

K. Preston, P. Dong, B. Schmidt, and M. Lipson, Appl. Phys. Lett. 92, 151104 (2008).
[CrossRef]

W. B. Jackson, N. M. Johnson, and D. K. Biegelsen, Appl. Phys. Lett. 43, 195 (1983).
[CrossRef]

IEEE J. Solid-State Circuits (1)

I. A. Young, E. Mohammed, J. T. S. Liao, A. M. Kern, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, IEEE J. Solid-State Circuits 45, 235 (2010).
[CrossRef]

J. Appl. Phys. (1)

H. Y. Fan and A. K. Ramdas, J. Appl. Phys. 30, 1127 (1959).
[CrossRef]

J. Electron. Mater. (1)

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, J. Electron. Mater. 29, 1380 (2000).
[CrossRef]

J. Lightwave Technol. (1)

Nat. Photon. (1)

J. Michel, J. Liu, and L. C. Kimerling, Nat. Photon. 4, 527 (2010).
[CrossRef]

Opt. Express (5)

Proc. IRE (1)

M. Wolf, Proc. IRE 48, 1246 (1960).
[CrossRef]

Other (2)

T. Kamins, Polycrystalline Silicon for Integrated Circuits and Displays, 2nd ed. (Kluwer, 1998).
[CrossRef]

S. Roshanak, Z. Dawei, L. Shirong, D. Po, L. Hong, F. Ning-Ning, B. J. Luff, F. Dazeng, L. Guoliang, C. John, R. Kannan, V. K. Ashok, and A. Mehdi, in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OMI8.

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Figures (3)

Fig. 1
Fig. 1

(a) Optical microscope image of 50 μm radius polysilicon ring resonator with bus waveguide and metal contacts. (b) Cross-sectional schematic of the electro-optic device region (not to scale). Carriers are generated in the 550 nm wide waveguide region and extracted to the external circuit through the 40 nm slab.

Fig. 2
Fig. 2

(a) Transmission and photocurrent spectra. (b) Close scan of resonance with 6.7 μW optical power coupled into the device at 13 V bias, demonstrating Q = 10,500. Solid curve is a Lorentzian fit. (c) Current-voltage characteristics under dark and light conditions, with wavelength set to resonance peak. Legend, optical power coupled into the device. (d) Responsivity (circles) and photocurrent (triangles) at 13 V versus optical power coupled into the device, with wavelength set to resonance peak.

Fig. 3
Fig. 3

(a) Direct ac output of the photodetector on a sampling oscilloscope with a 2.5 Gbps 2 7 1 PRBS (pseudorandom bit sequence) input optical signal. (b) Amplified electrical output eye diagram at 1 Gbps . Scale: 200 ps / div , 5 mV / div .

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