Abstract

We introduce the characteristics of the titanium dioxide (TiO2) inorganic film deposited by rf magnetron sputtering for liquid crystal display applications. The TiO2 films demonstrated vertical alignment (VA) of the liquid crystals (LCs) obtained by using ion-beam (IB) bombardment. As observed by using x-ray photoelectron spectroscopy, the chemical structure of the TiO2 was changed by IB bombardment, altering the Ti–O bonding of the Ti 2p spectra to lower intensity levels. Breaking Ti–O bonding by IB bombardment created pretilt angles between the TiO2 film and LC molecules. The better voltage-transmittance characteristics of the VA LCDs based on TiO2 film were measured and compared with the same characteristics of polyimide film.

© 2010 Optical Society of America

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