Abstract

Optical data are essential for the accurate nondestructive determination of profiles of periodic structures in integrated-circuit technology. In rigorous coupled-wave analysis, the sample is generally modeled as layers consisting of a single material and the ambient. We extend present capabilities to the analysis of structures with overlayers and demonstrate our approach by determining quantitatively the thicknesses of top, sidewall, and bottom oxides of deliberately and naturally oxidized structures.

© 2010 Optical Society of America

PDF Article

References

  • View by:
  • |
  • |
  • |

  1. 2007 International Technology Roadmap for Semiconductors, http://public.itrs.net.
  2. H.-T. Huang and F. L. Terry, Jr., Thin Solid Films 455-456, 828 (2004).
    [CrossRef]
  3. P. Reinig, T. Geiler, M. Mört, T. Hingst, H. Bloeß, J. Renger, and L. M. Eng, AIP Conf. Proc. 931, 89 (2007).
    [CrossRef]
  4. E. Liu and F. L. Terry, Jr., Phys. Status Solidi A 205, 784 (2008).
    [CrossRef]
  5. S. B. Hatit, M. Foldyna, A. D. Martino, and B. Drévillon, Phys. Status Solidi A 205, 743 (2008).
    [CrossRef]
  6. J. Opsal, H. Chu, Y. Wen, Y.-C. Chang, and G. Li, Proc. SPIE 4689, 163 (2002).
    [CrossRef]
  7. X. Niu, N. Jakatdar, J. Bao, and C. J. Spanos, IEEE Trans. Semicond. Manuf. 14, 97 (2001).
    [CrossRef]
  8. M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. J. Gaylord, J. Opt. Soc. Am. A 12, 1068 (1996).
    [CrossRef]
  9. Y.-C. Chang, G. Li, H. Chu, and J. J. Opsal, J. Opt. Soc. Am. A 23, 638 (2006).
    [CrossRef]
  10. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1977).
  11. L. Li, J. Opt. Soc. Am. A 13, 1870 (1996).
    [CrossRef]
  12. L. E. Katz, in VLSI Technology, S.M.Sze, ed. (McGraw-Hill, 1988), pp. 99-262.
  13. J. A. Woollam Co. VASE, with the Autoretarder option.
  14. D. E. Aspnes, Thin Solid Films 89, 249 (1982) and references therein.
    [CrossRef]
  15. J. L. Freeouf, Appl. Phys. Lett. 53, 2426 (1988).
    [CrossRef]

2008 (2)

E. Liu and F. L. Terry, Jr., Phys. Status Solidi A 205, 784 (2008).
[CrossRef]

S. B. Hatit, M. Foldyna, A. D. Martino, and B. Drévillon, Phys. Status Solidi A 205, 743 (2008).
[CrossRef]

2007 (1)

P. Reinig, T. Geiler, M. Mört, T. Hingst, H. Bloeß, J. Renger, and L. M. Eng, AIP Conf. Proc. 931, 89 (2007).
[CrossRef]

2006 (1)

2004 (1)

H.-T. Huang and F. L. Terry, Jr., Thin Solid Films 455-456, 828 (2004).
[CrossRef]

2002 (1)

J. Opsal, H. Chu, Y. Wen, Y.-C. Chang, and G. Li, Proc. SPIE 4689, 163 (2002).
[CrossRef]

2001 (1)

X. Niu, N. Jakatdar, J. Bao, and C. J. Spanos, IEEE Trans. Semicond. Manuf. 14, 97 (2001).
[CrossRef]

1996 (2)

1988 (1)

J. L. Freeouf, Appl. Phys. Lett. 53, 2426 (1988).
[CrossRef]

1982 (1)

D. E. Aspnes, Thin Solid Films 89, 249 (1982) and references therein.
[CrossRef]

Aspnes, D. E.

D. E. Aspnes, Thin Solid Films 89, 249 (1982) and references therein.
[CrossRef]

Azzam, R. M. A.

R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1977).

Bao, J.

X. Niu, N. Jakatdar, J. Bao, and C. J. Spanos, IEEE Trans. Semicond. Manuf. 14, 97 (2001).
[CrossRef]

Bashara, N. M.

R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1977).

Bloeß, H.

P. Reinig, T. Geiler, M. Mört, T. Hingst, H. Bloeß, J. Renger, and L. M. Eng, AIP Conf. Proc. 931, 89 (2007).
[CrossRef]

Chang, Y.-C.

Y.-C. Chang, G. Li, H. Chu, and J. J. Opsal, J. Opt. Soc. Am. A 23, 638 (2006).
[CrossRef]

J. Opsal, H. Chu, Y. Wen, Y.-C. Chang, and G. Li, Proc. SPIE 4689, 163 (2002).
[CrossRef]

Chu, H.

Y.-C. Chang, G. Li, H. Chu, and J. J. Opsal, J. Opt. Soc. Am. A 23, 638 (2006).
[CrossRef]

J. Opsal, H. Chu, Y. Wen, Y.-C. Chang, and G. Li, Proc. SPIE 4689, 163 (2002).
[CrossRef]

Drévillon, B.

S. B. Hatit, M. Foldyna, A. D. Martino, and B. Drévillon, Phys. Status Solidi A 205, 743 (2008).
[CrossRef]

Eng, L. M.

P. Reinig, T. Geiler, M. Mört, T. Hingst, H. Bloeß, J. Renger, and L. M. Eng, AIP Conf. Proc. 931, 89 (2007).
[CrossRef]

Foldyna, M.

S. B. Hatit, M. Foldyna, A. D. Martino, and B. Drévillon, Phys. Status Solidi A 205, 743 (2008).
[CrossRef]

Freeouf, J. L.

J. L. Freeouf, Appl. Phys. Lett. 53, 2426 (1988).
[CrossRef]

Gaylord, T. K. J.

Geiler, T.

P. Reinig, T. Geiler, M. Mört, T. Hingst, H. Bloeß, J. Renger, and L. M. Eng, AIP Conf. Proc. 931, 89 (2007).
[CrossRef]

Grann, E. B.

Hatit, S. B.

S. B. Hatit, M. Foldyna, A. D. Martino, and B. Drévillon, Phys. Status Solidi A 205, 743 (2008).
[CrossRef]

Hingst, T.

P. Reinig, T. Geiler, M. Mört, T. Hingst, H. Bloeß, J. Renger, and L. M. Eng, AIP Conf. Proc. 931, 89 (2007).
[CrossRef]

Huang, H.-T.

H.-T. Huang and F. L. Terry, Jr., Thin Solid Films 455-456, 828 (2004).
[CrossRef]

Jakatdar, N.

X. Niu, N. Jakatdar, J. Bao, and C. J. Spanos, IEEE Trans. Semicond. Manuf. 14, 97 (2001).
[CrossRef]

Katz, L. E.

L. E. Katz, in VLSI Technology, S.M.Sze, ed. (McGraw-Hill, 1988), pp. 99-262.

Li, G.

Y.-C. Chang, G. Li, H. Chu, and J. J. Opsal, J. Opt. Soc. Am. A 23, 638 (2006).
[CrossRef]

J. Opsal, H. Chu, Y. Wen, Y.-C. Chang, and G. Li, Proc. SPIE 4689, 163 (2002).
[CrossRef]

Li, L.

Liu, E.

E. Liu and F. L. Terry, Jr., Phys. Status Solidi A 205, 784 (2008).
[CrossRef]

Martino, A. D.

S. B. Hatit, M. Foldyna, A. D. Martino, and B. Drévillon, Phys. Status Solidi A 205, 743 (2008).
[CrossRef]

Moharam, M. G.

Mört, M.

P. Reinig, T. Geiler, M. Mört, T. Hingst, H. Bloeß, J. Renger, and L. M. Eng, AIP Conf. Proc. 931, 89 (2007).
[CrossRef]

Niu, X.

X. Niu, N. Jakatdar, J. Bao, and C. J. Spanos, IEEE Trans. Semicond. Manuf. 14, 97 (2001).
[CrossRef]

Opsal, J.

J. Opsal, H. Chu, Y. Wen, Y.-C. Chang, and G. Li, Proc. SPIE 4689, 163 (2002).
[CrossRef]

Opsal, J. J.

Pommet, D. A.

Reinig, P.

P. Reinig, T. Geiler, M. Mört, T. Hingst, H. Bloeß, J. Renger, and L. M. Eng, AIP Conf. Proc. 931, 89 (2007).
[CrossRef]

Renger, J.

P. Reinig, T. Geiler, M. Mört, T. Hingst, H. Bloeß, J. Renger, and L. M. Eng, AIP Conf. Proc. 931, 89 (2007).
[CrossRef]

Spanos, C. J.

X. Niu, N. Jakatdar, J. Bao, and C. J. Spanos, IEEE Trans. Semicond. Manuf. 14, 97 (2001).
[CrossRef]

Terry, F. L.

E. Liu and F. L. Terry, Jr., Phys. Status Solidi A 205, 784 (2008).
[CrossRef]

H.-T. Huang and F. L. Terry, Jr., Thin Solid Films 455-456, 828 (2004).
[CrossRef]

Wen, Y.

J. Opsal, H. Chu, Y. Wen, Y.-C. Chang, and G. Li, Proc. SPIE 4689, 163 (2002).
[CrossRef]

AIP Conf. Proc. (1)

P. Reinig, T. Geiler, M. Mört, T. Hingst, H. Bloeß, J. Renger, and L. M. Eng, AIP Conf. Proc. 931, 89 (2007).
[CrossRef]

Appl. Phys. Lett. (1)

J. L. Freeouf, Appl. Phys. Lett. 53, 2426 (1988).
[CrossRef]

IEEE Trans. Semicond. Manuf. (1)

X. Niu, N. Jakatdar, J. Bao, and C. J. Spanos, IEEE Trans. Semicond. Manuf. 14, 97 (2001).
[CrossRef]

J. Opt. Soc. Am. A (3)

Phys. Status Solidi A (2)

E. Liu and F. L. Terry, Jr., Phys. Status Solidi A 205, 784 (2008).
[CrossRef]

S. B. Hatit, M. Foldyna, A. D. Martino, and B. Drévillon, Phys. Status Solidi A 205, 743 (2008).
[CrossRef]

Proc. SPIE (1)

J. Opsal, H. Chu, Y. Wen, Y.-C. Chang, and G. Li, Proc. SPIE 4689, 163 (2002).
[CrossRef]

Thin Solid Films (2)

H.-T. Huang and F. L. Terry, Jr., Thin Solid Films 455-456, 828 (2004).
[CrossRef]

D. E. Aspnes, Thin Solid Films 89, 249 (1982) and references therein.
[CrossRef]

Other (4)

R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1977).

2007 International Technology Roadmap for Semiconductors, http://public.itrs.net.

L. E. Katz, in VLSI Technology, S.M.Sze, ed. (McGraw-Hill, 1988), pp. 99-262.

J. A. Woollam Co. VASE, with the Autoretarder option.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Metrics