Abstract

The transmission phase grating on anodic alumina membrane (AAM) was fabricated by a lithography and chemical etching method to demonstrate the feasibility of fabricating diffractive optical elements on AAM matrix. The monochromatic light diffraction property of the sample grating was tested using lasers with wavelengths of 532 and 650 nm, respectively. The measured diffraction efficiencies of zeroth and first orders were in good agreement with the calculated results. This method may offer an approach to prepare surface pattern on alumina and could be used in fabricating diffractive optical components such as linear gratings.

© 2010 Optical Society of America

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