Abstract

We observe sample morphology changes in real time (24kHz) during and between percussion drilling pulses by integrating a low-coherence microscope into a laser micromachining platform. Nonuniform cut speed and sidewall evolution in stainless steel are observed to strongly depend on assist gas. Interpulse morphology relaxation such as hole refill is directly imaged, showing dramatic differences in the material removal process dependent on pulse duration/peak power (μs0.1kW, ps20MW) and material (steel, lead zirconate titanate PZT). Blind hole depth precision is improved by over 1 order of magnitude using in situ feedback from the imaging system.

© 2010 Optical Society of America

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    [CrossRef]
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    [CrossRef]

2007 (4)

C. H. Li, M. J. Tsai, and C. D. Yang, Opt. Laser Technol. 39, 786 (2007).
[CrossRef]

D. Ilie, C. Mullan, G. M. O'Connor, T. Flaherty and T. J. Glynn, Appl. Surf. Sci. 254, 845 (2007).
[CrossRef]

P. J. L. Webster, M. S. Muller, and J. M. Fraser, Opt. Express 15, 14967 (2007).
[CrossRef] [PubMed]

B. J. Vakoc, G. J. Tearney, and B. E. Bouma, J. Biomed. Opt. 12, 020501 (2007).
[CrossRef] [PubMed]

2006 (1)

W. Y. Oh, S. H. Yun, B. J. Vakoc, G. J. Tearney, and B. E. Bouma, Appl. Phys. Lett. 88, 103902 (2006).
[CrossRef]

2005 (1)

2004 (3)

V. V. Temnov, K. Sokolowski-Tinten, P. Zhou, and D. von der Linde, Appl. Phys. A 78, 483 (2004).
[CrossRef]

S. H. Yun, G. J. Tearney, J. F. de Boer, and B. E. Bouma, Opt. Express 12, 2977 (2004).
[CrossRef] [PubMed]

M. S. Gross, I. Black, and W. H. Muller, Modell. Simul. Mater. Sci. Eng. 12, 1237 (2004).
[CrossRef]

2003 (4)

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[CrossRef]

T. Q. Jia, Z. Z. Xu, X. X. Li, R. X. Li, B. Shuai, and F. L. Zhao, Appl. Phys. Lett. 82, 4382 (2003).
[CrossRef]

U. Zuperl and F. Cus, Robot. Comput. Integrated Manuf. 19, 189 (2003).
[CrossRef]

A. F. Fercher, W. Drexler, C. K. Hitzenberger, and T. Lasser, Rep. Prog. Phys. 66, 239 (2003).
[CrossRef]

2001 (2)

W. S. O. Rodden, S. S. Kudesia, D. P. Hand, and J. D. C. Jones, J. Laser Appl. 13, 204 (2001).
[CrossRef]

R. Lausten and P. Balling, Appl. Phys. Lett. 79, 884 (2001).
[CrossRef]

1998 (1)

I. Black, J. M. Ritchie, and G. A. Thomson, Lasers Eng. 7, 147 (1998).

1997 (2)

R. K. Ganesh, A. Faghri, and Y. Hahn, Int. J. Heat Mass Transfer 40, 3361 (1997).
[CrossRef]

A. Matsunawa and V. Semak, J. Phys. D 30, 798 (1997).
[CrossRef]

Balling, P.

R. Lausten and P. Balling, Appl. Phys. Lett. 79, 884 (2001).
[CrossRef]

Bera, S.

Black, I.

M. S. Gross, I. Black, and W. H. Muller, Modell. Simul. Mater. Sci. Eng. 12, 1237 (2004).
[CrossRef]

I. Black, J. M. Ritchie, and G. A. Thomson, Lasers Eng. 7, 147 (1998).

Bouma, B. E.

B. J. Vakoc, G. J. Tearney, and B. E. Bouma, J. Biomed. Opt. 12, 020501 (2007).
[CrossRef] [PubMed]

W. Y. Oh, S. H. Yun, B. J. Vakoc, G. J. Tearney, and B. E. Bouma, Appl. Phys. Lett. 88, 103902 (2006).
[CrossRef]

S. H. Yun, G. J. Tearney, J. F. de Boer, and B. E. Bouma, Opt. Express 12, 2977 (2004).
[CrossRef] [PubMed]

Cus, F.

U. Zuperl and F. Cus, Robot. Comput. Integrated Manuf. 19, 189 (2003).
[CrossRef]

de Boer, J. F.

Drexler, W.

A. F. Fercher, W. Drexler, C. K. Hitzenberger, and T. Lasser, Rep. Prog. Phys. 66, 239 (2003).
[CrossRef]

Durfee, C. G.

Faghri, A.

R. K. Ganesh, A. Faghri, and Y. Hahn, Int. J. Heat Mass Transfer 40, 3361 (1997).
[CrossRef]

Fercher, A. F.

A. F. Fercher, W. Drexler, C. K. Hitzenberger, and T. Lasser, Rep. Prog. Phys. 66, 239 (2003).
[CrossRef]

Flaherty, T.

D. Ilie, C. Mullan, G. M. O'Connor, T. Flaherty and T. J. Glynn, Appl. Surf. Sci. 254, 845 (2007).
[CrossRef]

Fraser, J. M.

Ganesh, R. K.

R. K. Ganesh, A. Faghri, and Y. Hahn, Int. J. Heat Mass Transfer 40, 3361 (1997).
[CrossRef]

Glynn, T. J.

D. Ilie, C. Mullan, G. M. O'Connor, T. Flaherty and T. J. Glynn, Appl. Surf. Sci. 254, 845 (2007).
[CrossRef]

Gross, M. S.

M. S. Gross, I. Black, and W. H. Muller, Modell. Simul. Mater. Sci. Eng. 12, 1237 (2004).
[CrossRef]

Hahn, Y.

R. K. Ganesh, A. Faghri, and Y. Hahn, Int. J. Heat Mass Transfer 40, 3361 (1997).
[CrossRef]

Hand, D. P.

W. S. O. Rodden, S. S. Kudesia, D. P. Hand, and J. D. C. Jones, J. Laser Appl. 13, 204 (2001).
[CrossRef]

Hitzenberger, C. K.

A. F. Fercher, W. Drexler, C. K. Hitzenberger, and T. Lasser, Rep. Prog. Phys. 66, 239 (2003).
[CrossRef]

Hunt, A. J.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[CrossRef]

Ilie, D.

D. Ilie, C. Mullan, G. M. O'Connor, T. Flaherty and T. J. Glynn, Appl. Surf. Sci. 254, 845 (2007).
[CrossRef]

Jia, T. Q.

T. Q. Jia, Z. Z. Xu, X. X. Li, R. X. Li, B. Shuai, and F. L. Zhao, Appl. Phys. Lett. 82, 4382 (2003).
[CrossRef]

Joglekar, A. P.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[CrossRef]

Jones, J. D. C.

W. S. O. Rodden, S. S. Kudesia, D. P. Hand, and J. D. C. Jones, J. Laser Appl. 13, 204 (2001).
[CrossRef]

Kudesia, S. S.

W. S. O. Rodden, S. S. Kudesia, D. P. Hand, and J. D. C. Jones, J. Laser Appl. 13, 204 (2001).
[CrossRef]

Lasser, T.

A. F. Fercher, W. Drexler, C. K. Hitzenberger, and T. Lasser, Rep. Prog. Phys. 66, 239 (2003).
[CrossRef]

Lausten, R.

R. Lausten and P. Balling, Appl. Phys. Lett. 79, 884 (2001).
[CrossRef]

Li, C. H.

C. H. Li, M. J. Tsai, and C. D. Yang, Opt. Laser Technol. 39, 786 (2007).
[CrossRef]

Li, R. X.

T. Q. Jia, Z. Z. Xu, X. X. Li, R. X. Li, B. Shuai, and F. L. Zhao, Appl. Phys. Lett. 82, 4382 (2003).
[CrossRef]

Li, X. X.

T. Q. Jia, Z. Z. Xu, X. X. Li, R. X. Li, B. Shuai, and F. L. Zhao, Appl. Phys. Lett. 82, 4382 (2003).
[CrossRef]

Liu, H.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[CrossRef]

Matsunawa, A.

A. Matsunawa and V. Semak, J. Phys. D 30, 798 (1997).
[CrossRef]

Meyhofer, E.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[CrossRef]

Mourou, G.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[CrossRef]

Mullan, C.

D. Ilie, C. Mullan, G. M. O'Connor, T. Flaherty and T. J. Glynn, Appl. Surf. Sci. 254, 845 (2007).
[CrossRef]

Muller, M. S.

Muller, W. H.

M. S. Gross, I. Black, and W. H. Muller, Modell. Simul. Mater. Sci. Eng. 12, 1237 (2004).
[CrossRef]

O'Connor, G. M.

D. Ilie, C. Mullan, G. M. O'Connor, T. Flaherty and T. J. Glynn, Appl. Surf. Sci. 254, 845 (2007).
[CrossRef]

Oh, W. Y.

W. Y. Oh, S. H. Yun, B. J. Vakoc, G. J. Tearney, and B. E. Bouma, Appl. Phys. Lett. 88, 103902 (2006).
[CrossRef]

Ritchie, J. M.

I. Black, J. M. Ritchie, and G. A. Thomson, Lasers Eng. 7, 147 (1998).

Rodden, W. S. O.

W. S. O. Rodden, S. S. Kudesia, D. P. Hand, and J. D. C. Jones, J. Laser Appl. 13, 204 (2001).
[CrossRef]

Sabbah, A. J.

Semak, V.

A. Matsunawa and V. Semak, J. Phys. D 30, 798 (1997).
[CrossRef]

Shuai, B.

T. Q. Jia, Z. Z. Xu, X. X. Li, R. X. Li, B. Shuai, and F. L. Zhao, Appl. Phys. Lett. 82, 4382 (2003).
[CrossRef]

Sokolowski-Tinten, K.

V. V. Temnov, K. Sokolowski-Tinten, P. Zhou, and D. von der Linde, Appl. Phys. A 78, 483 (2004).
[CrossRef]

Spooner, G. J.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[CrossRef]

Squier, J. A.

Tearney, G. J.

B. J. Vakoc, G. J. Tearney, and B. E. Bouma, J. Biomed. Opt. 12, 020501 (2007).
[CrossRef] [PubMed]

W. Y. Oh, S. H. Yun, B. J. Vakoc, G. J. Tearney, and B. E. Bouma, Appl. Phys. Lett. 88, 103902 (2006).
[CrossRef]

S. H. Yun, G. J. Tearney, J. F. de Boer, and B. E. Bouma, Opt. Express 12, 2977 (2004).
[CrossRef] [PubMed]

Temnov, V. V.

V. V. Temnov, K. Sokolowski-Tinten, P. Zhou, and D. von der Linde, Appl. Phys. A 78, 483 (2004).
[CrossRef]

Thomson, G. A.

I. Black, J. M. Ritchie, and G. A. Thomson, Lasers Eng. 7, 147 (1998).

Tsai, M. J.

C. H. Li, M. J. Tsai, and C. D. Yang, Opt. Laser Technol. 39, 786 (2007).
[CrossRef]

Vakoc, B. J.

B. J. Vakoc, G. J. Tearney, and B. E. Bouma, J. Biomed. Opt. 12, 020501 (2007).
[CrossRef] [PubMed]

W. Y. Oh, S. H. Yun, B. J. Vakoc, G. J. Tearney, and B. E. Bouma, Appl. Phys. Lett. 88, 103902 (2006).
[CrossRef]

von der Linde, D.

V. V. Temnov, K. Sokolowski-Tinten, P. Zhou, and D. von der Linde, Appl. Phys. A 78, 483 (2004).
[CrossRef]

Webster, P. J. L.

Xu, Z. Z.

T. Q. Jia, Z. Z. Xu, X. X. Li, R. X. Li, B. Shuai, and F. L. Zhao, Appl. Phys. Lett. 82, 4382 (2003).
[CrossRef]

Yang, C. D.

C. H. Li, M. J. Tsai, and C. D. Yang, Opt. Laser Technol. 39, 786 (2007).
[CrossRef]

Yun, S. H.

W. Y. Oh, S. H. Yun, B. J. Vakoc, G. J. Tearney, and B. E. Bouma, Appl. Phys. Lett. 88, 103902 (2006).
[CrossRef]

S. H. Yun, G. J. Tearney, J. F. de Boer, and B. E. Bouma, Opt. Express 12, 2977 (2004).
[CrossRef] [PubMed]

Zhao, F. L.

T. Q. Jia, Z. Z. Xu, X. X. Li, R. X. Li, B. Shuai, and F. L. Zhao, Appl. Phys. Lett. 82, 4382 (2003).
[CrossRef]

Zhou, P.

V. V. Temnov, K. Sokolowski-Tinten, P. Zhou, and D. von der Linde, Appl. Phys. A 78, 483 (2004).
[CrossRef]

Zuperl, U.

U. Zuperl and F. Cus, Robot. Comput. Integrated Manuf. 19, 189 (2003).
[CrossRef]

Appl. Phys. A (1)

V. V. Temnov, K. Sokolowski-Tinten, P. Zhou, and D. von der Linde, Appl. Phys. A 78, 483 (2004).
[CrossRef]

Appl. Phys. B (1)

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[CrossRef]

Appl. Phys. Lett. (3)

T. Q. Jia, Z. Z. Xu, X. X. Li, R. X. Li, B. Shuai, and F. L. Zhao, Appl. Phys. Lett. 82, 4382 (2003).
[CrossRef]

R. Lausten and P. Balling, Appl. Phys. Lett. 79, 884 (2001).
[CrossRef]

W. Y. Oh, S. H. Yun, B. J. Vakoc, G. J. Tearney, and B. E. Bouma, Appl. Phys. Lett. 88, 103902 (2006).
[CrossRef]

Appl. Surf. Sci. (1)

D. Ilie, C. Mullan, G. M. O'Connor, T. Flaherty and T. J. Glynn, Appl. Surf. Sci. 254, 845 (2007).
[CrossRef]

Int. J. Heat Mass Transfer (1)

R. K. Ganesh, A. Faghri, and Y. Hahn, Int. J. Heat Mass Transfer 40, 3361 (1997).
[CrossRef]

J. Biomed. Opt. (1)

B. J. Vakoc, G. J. Tearney, and B. E. Bouma, J. Biomed. Opt. 12, 020501 (2007).
[CrossRef] [PubMed]

J. Laser Appl. (1)

W. S. O. Rodden, S. S. Kudesia, D. P. Hand, and J. D. C. Jones, J. Laser Appl. 13, 204 (2001).
[CrossRef]

J. Phys. D (1)

A. Matsunawa and V. Semak, J. Phys. D 30, 798 (1997).
[CrossRef]

Lasers Eng. (1)

I. Black, J. M. Ritchie, and G. A. Thomson, Lasers Eng. 7, 147 (1998).

Modell. Simul. Mater. Sci. Eng. (1)

M. S. Gross, I. Black, and W. H. Muller, Modell. Simul. Mater. Sci. Eng. 12, 1237 (2004).
[CrossRef]

Opt. Express (2)

Opt. Laser Technol. (1)

C. H. Li, M. J. Tsai, and C. D. Yang, Opt. Laser Technol. 39, 786 (2007).
[CrossRef]

Opt. Lett. (1)

Rep. Prog. Phys. (1)

A. F. Fercher, W. Drexler, C. K. Hitzenberger, and T. Lasser, Rep. Prog. Phys. 66, 239 (2003).
[CrossRef]

Robot. Comput. Integrated Manuf. (1)

U. Zuperl and F. Cus, Robot. Comput. Integrated Manuf. 19, 189 (2003).
[CrossRef]

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Figures (3)

Fig. 1
Fig. 1

Hole evolution in QCW drilling of stainless steel, for no gas, N 2 and O 2 assist gases. Light is incident from the top of the figure. Vertical scale bars are 200 μ m .

Fig. 2
Fig. 2

(A) QCW and (B) picosecond machining in steel; (C) QCW machining in PZT with only five laser pulses. White and black scale bars are 150 μ m and 50 μ m , respectively. Gray areas in insets indicate machining laser exposure, and connecting lines are intended as a guide to the eye.

Fig. 3
Fig. 3

Side view of 3D surface topography of holes cut (A) without and (B) with feedback (B). Volumes above and below the surface correspond to air and steel, respectively. Scale bars are 100 μ m (both axes).

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