Abstract

We have characterized macrorough surfaces by measuring angle-resolved Stokes parameters of scattering. The analysis of the parameters as a function of a virtual scattering angle shows that polarization properties of the scattering in the plane of incidence display a very strong dependence on the surface roughness. The method and results of this analysis have a significant impact on the application of light scattering to the inspection and process-evaluation industry.

© 2010 Optical Society of America

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