Abstract

We report the experimental realization of horizontal plasmonic slot waveguides capable of subdiffraction modal confinement at IR wavelengths. These waveguides have a propagation length of 6λg and are monolithically integrated with conventional silicon photonic waveguides on the same silicon-on-insulator platform. Direct coupling of light from the silicon waveguides to the plasmonic waveguides was achieved with an efficiency of 30% using taper-funnel couplers to obtain mode matching between the two waveguide systems.

© 2010 Optical Society of America

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2009 (1)

J. Tian, S. Yu, W. Yan, and M. Qiu, Appl. Phys. Lett. 95, 013504 (2009).
[CrossRef]

2007 (1)

A. V. Krasavin and A. V. Zayats, Appl. Phys. Lett. 90, 211101 (2007).
[CrossRef]

2006 (3)

S. I. Bozhevolnyi, V. S. Volkov, E. Devaux, J.-Y. Laluet, and T. W. Ebbesen, Nature 440, 508 (2006).
[CrossRef] [PubMed]

J. A. Dionne, H. J. Lezec, and H. A. Atwater, Nano Lett. 6, 1928 (2006).
[CrossRef] [PubMed]

L. Chen, J. Shakya, and M. Lipson, Opt. Lett. 31, 2133 (2006).
[CrossRef] [PubMed]

2005 (2)

2004 (1)

2003 (1)

W. L. Barnes, A. Dereux, and T. W. Ebbesen, Nature 424, 824 (2003).
[CrossRef] [PubMed]

2000 (1)

P. Berini, Phys. Rev. B 61, 10484 (2000).
[CrossRef]

1972 (1)

P. B. Johnson and R. W. Christy, Phys. Rev. B 6, 4370 (1972).
[CrossRef]

Atwater, H. A.

J. A. Dionne, H. J. Lezec, and H. A. Atwater, Nano Lett. 6, 1928 (2006).
[CrossRef] [PubMed]

Barnes, W. L.

W. L. Barnes, A. Dereux, and T. W. Ebbesen, Nature 424, 824 (2003).
[CrossRef] [PubMed]

Berini, P.

P. Berini, Phys. Rev. B 61, 10484 (2000).
[CrossRef]

Bozhevolnyi, S. I.

S. I. Bozhevolnyi, V. S. Volkov, E. Devaux, J.-Y. Laluet, and T. W. Ebbesen, Nature 440, 508 (2006).
[CrossRef] [PubMed]

Brongersma, M. L.

Catrysse, P. B.

Chen, L.

Christy, R. W.

P. B. Johnson and R. W. Christy, Phys. Rev. B 6, 4370 (1972).
[CrossRef]

Dereux, A.

W. L. Barnes, A. Dereux, and T. W. Ebbesen, Nature 424, 824 (2003).
[CrossRef] [PubMed]

Devaux, E.

S. I. Bozhevolnyi, V. S. Volkov, E. Devaux, J.-Y. Laluet, and T. W. Ebbesen, Nature 440, 508 (2006).
[CrossRef] [PubMed]

Dionne, J. A.

J. A. Dionne, H. J. Lezec, and H. A. Atwater, Nano Lett. 6, 1928 (2006).
[CrossRef] [PubMed]

Ebbesen, T. W.

S. I. Bozhevolnyi, V. S. Volkov, E. Devaux, J.-Y. Laluet, and T. W. Ebbesen, Nature 440, 508 (2006).
[CrossRef] [PubMed]

W. L. Barnes, A. Dereux, and T. W. Ebbesen, Nature 424, 824 (2003).
[CrossRef] [PubMed]

Fan, S.

Han, Z.

He, S.

Johnson, P. B.

P. B. Johnson and R. W. Christy, Phys. Rev. B 6, 4370 (1972).
[CrossRef]

Krasavin, A. V.

A. V. Krasavin and A. V. Zayats, Appl. Phys. Lett. 90, 211101 (2007).
[CrossRef]

Laluet, J. -Y.

S. I. Bozhevolnyi, V. S. Volkov, E. Devaux, J.-Y. Laluet, and T. W. Ebbesen, Nature 440, 508 (2006).
[CrossRef] [PubMed]

Lezec, H. J.

J. A. Dionne, H. J. Lezec, and H. A. Atwater, Nano Lett. 6, 1928 (2006).
[CrossRef] [PubMed]

Lipson, M.

Liu, L.

Qiu, M.

J. Tian, S. Yu, W. Yan, and M. Qiu, Appl. Phys. Lett. 95, 013504 (2009).
[CrossRef]

Selker, M. D.

Shakya, J.

Tian, J.

J. Tian, S. Yu, W. Yan, and M. Qiu, Appl. Phys. Lett. 95, 013504 (2009).
[CrossRef]

Veronis, G.

Volkov, V. S.

S. I. Bozhevolnyi, V. S. Volkov, E. Devaux, J.-Y. Laluet, and T. W. Ebbesen, Nature 440, 508 (2006).
[CrossRef] [PubMed]

Yan, W.

J. Tian, S. Yu, W. Yan, and M. Qiu, Appl. Phys. Lett. 95, 013504 (2009).
[CrossRef]

Yu, S.

J. Tian, S. Yu, W. Yan, and M. Qiu, Appl. Phys. Lett. 95, 013504 (2009).
[CrossRef]

Zayats, A. V.

A. V. Krasavin and A. V. Zayats, Appl. Phys. Lett. 90, 211101 (2007).
[CrossRef]

Zia, R.

Appl. Phys. Lett. (2)

A. V. Krasavin and A. V. Zayats, Appl. Phys. Lett. 90, 211101 (2007).
[CrossRef]

J. Tian, S. Yu, W. Yan, and M. Qiu, Appl. Phys. Lett. 95, 013504 (2009).
[CrossRef]

J. Opt. Soc. Am. A (1)

Nano Lett. (1)

J. A. Dionne, H. J. Lezec, and H. A. Atwater, Nano Lett. 6, 1928 (2006).
[CrossRef] [PubMed]

Nature (2)

S. I. Bozhevolnyi, V. S. Volkov, E. Devaux, J.-Y. Laluet, and T. W. Ebbesen, Nature 440, 508 (2006).
[CrossRef] [PubMed]

W. L. Barnes, A. Dereux, and T. W. Ebbesen, Nature 424, 824 (2003).
[CrossRef] [PubMed]

Opt. Express (1)

Opt. Lett. (2)

Phys. Rev. B (2)

P. Berini, Phys. Rev. B 61, 10484 (2000).
[CrossRef]

P. B. Johnson and R. W. Christy, Phys. Rev. B 6, 4370 (1972).
[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

(a) and (b) Schematics of the cross section of the PSW and the Si waveguide, respectively; (c) fundamental quasi-TEM and (d) fundamental TE mode ( E x ) at 1550 nm wavelength for waveguide in (a) and (b), respectively.

Fig. 2
Fig. 2

(a) Top-view schematic of the Si-plasmonic taper-funnel coupler with dimensions of w 1 = 300   nm , w 2 = 200   nm , w 3 = 800   nm , w 4 = 200   nm , L = 1 μ m . (b) 3D-FDTD result of the E x field distribution at 1550 nm wavelength taken at the central horizontal plane of the funnel.

Fig. 3
Fig. 3

Schematic of the fabrication process flow: (a) the blank SOI substrate, (b) the Si tapers after the first EBL step and ICPRIE etching, (c) deposition of the Au layer for the plasmonic waveguide after the second EBL and liftoff, (d) the PSW and funnels after the third EBL step and Ar ion milling.

Fig. 4
Fig. 4

(a) Transmitted power through a 6 μ m long PSW as a function of wavelength; inset, SEM image of the fabricated PSW with both ends coupled to Si waveguides via taper-funnel couplers. (b) Propagation length of PSW as a function of wavelength; inset, transmitted power as a function of the plasmonic waveguide length at the 1550 nm wavelength, with the solid curve representing the exponential fit.

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