Abstract

We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized.

© 2010 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing

Yang Liao, Yongfeng Ju, Long Zhang, Fei He, Qiang Zhang, Yinglong Shen, Danping Chen, Ya Cheng, Zhizhan Xu, Koji Sugioka, and Katsumi Midorikawa
Opt. Lett. 35(19) 3225-3227 (2010)

Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses

Fei He, Han Xu, Ya Cheng, Jielei Ni, Hui Xiong, Zhizhan Xu, Koji Sugioka, and Katsumi Midorikawa
Opt. Lett. 35(7) 1106-1108 (2010)

Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching

Krishna Chaitanya Vishnubhatla, Nicola Bellini, Roberta Ramponi, Giulio Cerullo, and Roberto Osellame
Opt. Express 17(10) 8685-8695 (2009)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription