Abstract

We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized.

© 2010 Optical Society of America

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V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

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J. Zaumseil, M. A. Meitl, J. W. P. Hsu, B. R. Acharya, K. W. Baldwin, Y. L. Loo, and J. A. Rogers, Nano Lett. 3, 1223 (2003).
[CrossRef]

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, Appl. Phys. A A76, 857 (2003).
[CrossRef]

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, Opt. Lett. 28, 55 (2003).
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Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, Opt. Lett. 28, 1144 (2003).
[CrossRef] [PubMed]

2001

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K. Sato, M. Tokeshi, T. Kitamori, and T. Sawada, Anal. Sci. 15, 641 (1999).
[CrossRef]

Acharya, B. R.

J. Zaumseil, M. A. Meitl, J. W. P. Hsu, B. R. Acharya, K. W. Baldwin, Y. L. Loo, and J. A. Rogers, Nano Lett. 3, 1223 (2003).
[CrossRef]

Aoki, N.

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, Appl. Phys. A A76, 857 (2003).
[CrossRef]

Bado, P.

Baldwin, K. W.

J. Zaumseil, M. A. Meitl, J. W. P. Hsu, B. R. Acharya, K. W. Baldwin, Y. L. Loo, and J. A. Rogers, Nano Lett. 3, 1223 (2003).
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Bellini, N.

Bellouard, Y.

Bhardwaj, V. R.

Burg, T. P.

T. P. Burg and M. Godin, Nature 446, 1066 (2007).
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Cavallotti, P. L.

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Cerullo, G.

K. C. Vishnubhatla, N. Bellini, R. Ramponi, G. Cerullo, and R. Osellame, Opt. Express 17, 8685 (2009).
[CrossRef] [PubMed]

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Cheng, Y.

Corkum, P. B.

Dugan, M.

Godin, M.

T. P. Burg and M. Godin, Nature 446, 1066 (2007).
[CrossRef] [PubMed]

Helvajian, H.

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, Appl. Phys. A A76, 857 (2003).
[CrossRef]

Hnatovsky, C.

Hsu, J. W. P.

J. Zaumseil, M. A. Meitl, J. W. P. Hsu, B. R. Acharya, K. W. Baldwin, Y. L. Loo, and J. A. Rogers, Nano Lett. 3, 1223 (2003).
[CrossRef]

Itoh, K.

Jiang, Y.

Juodkazis, S.

Kawachi, M.

Kitamori, T.

K. Sato, M. Tokeshi, T. Kitamori, and T. Sawada, Anal. Sci. 15, 641 (1999).
[CrossRef]

Kuroda, D.

Laporta, P.

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Li, Y.

Loo, Y. L.

J. Zaumseil, M. A. Meitl, J. W. P. Hsu, B. R. Acharya, K. W. Baldwin, Y. L. Loo, and J. A. Rogers, Nano Lett. 3, 1223 (2003).
[CrossRef]

Magagnin, L.

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Marcinkevicius, A.

Maselli, V.

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Masuda, M.

Matsuo, S.

Meitl, M. A.

J. Zaumseil, M. A. Meitl, J. W. P. Hsu, B. R. Acharya, K. W. Baldwin, Y. L. Loo, and J. A. Rogers, Nano Lett. 3, 1223 (2003).
[CrossRef]

Midorikawa, K.

Misawa, H.

Miwa, M.

Nishii, J.

Osellame, R.

K. C. Vishnubhatla, N. Bellini, R. Ramponi, G. Cerullo, and R. Osellame, Opt. Express 17, 8685 (2009).
[CrossRef] [PubMed]

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Ramponi, R.

K. C. Vishnubhatla, N. Bellini, R. Ramponi, G. Cerullo, and R. Osellame, Opt. Express 17, 8685 (2009).
[CrossRef] [PubMed]

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Rayner, D. M.

Rogers, J. A.

J. Zaumseil, M. A. Meitl, J. W. P. Hsu, B. R. Acharya, K. W. Baldwin, Y. L. Loo, and J. A. Rogers, Nano Lett. 3, 1223 (2003).
[CrossRef]

Said, A.

Sato, K.

K. Sato, M. Tokeshi, T. Kitamori, and T. Sawada, Anal. Sci. 15, 641 (1999).
[CrossRef]

Sawada, T.

K. Sato, M. Tokeshi, T. Kitamori, and T. Sawada, Anal. Sci. 15, 641 (1999).
[CrossRef]

Shihoyama, K.

Simova, E.

Sugioka, K.

Taylor, R. S.

Tokeshi, M.

K. Sato, M. Tokeshi, T. Kitamori, and T. Sawada, Anal. Sci. 15, 641 (1999).
[CrossRef]

Toyoda, K.

Vishnubhatla, K. C.

Watanabe, M.

Watanabe, W.

Yamada, K.

Zaumseil, J.

J. Zaumseil, M. A. Meitl, J. W. P. Hsu, B. R. Acharya, K. W. Baldwin, Y. L. Loo, and J. A. Rogers, Nano Lett. 3, 1223 (2003).
[CrossRef]

Anal. Sci.

K. Sato, M. Tokeshi, T. Kitamori, and T. Sawada, Anal. Sci. 15, 641 (1999).
[CrossRef]

Appl. Phys. A

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, Appl. Phys. A A76, 857 (2003).
[CrossRef]

Appl. Phys. Lett.

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Nano Lett.

J. Zaumseil, M. A. Meitl, J. W. P. Hsu, B. R. Acharya, K. W. Baldwin, Y. L. Loo, and J. A. Rogers, Nano Lett. 3, 1223 (2003).
[CrossRef]

Nature

T. P. Burg and M. Godin, Nature 446, 1066 (2007).
[CrossRef] [PubMed]

Opt. Express

Opt. Lett.

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Figures (4)

Fig. 1
Fig. 1

Schematic view of (a) the 3D microfluidic channel and (b) the glass drawing setup.

Fig. 2
Fig. 2

Optical micrographs of the Y-branched channels. Top view of the channels (a) before and (b) after drawing, and (c)–(g) cross section view of the channels at the locations indicated by the cutting lines.

Fig. 3
Fig. 3

Top-view micrographs of T-shaped channels (a) before and (b) after drawing. (c) Schematic drawing of a 12-mm-long channel. (d)–(f) Cross sections at the different locations indicated by the cutting lines.

Fig. 4
Fig. 4

SEM images of the inner surfaces (a) before and (b) after drawing, and SPMs of the etched inner surfaces (c) before and (d) after drawing.

Tables (1)

Tables Icon

Table 1 Comparison of the RMS Roughness ( R q ) , Average Roughness ( R a ) , and Maximum Roughness ( R max ) Before and After Drawing

Metrics