Abstract

We measured a multilayer sample in air and water ambient below the critical angle of incidence based on internal reflection ellipsometry (IRE). Measurements with varying incident angle and varying wavelength both provided values by the fitting for refractive indices and thicknesses of layers consistent with design or theoretical ones. This verified that IRE is useful in measurement and analysis of thin films on transparent substrates and especially effective to study thin films at transparent substrate–liquid interfaces.

© 2010 Optical Society of America

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2010 (1)

S. Otsuki and M. Ishikawa, Biosens. Bioelectron. 26, 202 (2010).
[CrossRef] [PubMed]

2009 (1)

Z. Balevicius, V. Vaicikauskas, and G.-J. Babonas, Appl. Surf. Sci. 256, 640 (2009).
[CrossRef]

2007 (1)

2005 (3)

2002 (1)

T. Dougan, J. B. Levy, A. Salama, A. J. T. George, and C. D. Pusey, Clin. Exp. Immunol. 128, 555 (2002).
[CrossRef] [PubMed]

2001 (1)

S. Okutani, M. Kimura, H. Toriumi, K. Akao, T. Tadokoro, and T. Akahane, Jpn. J. Appl. Phys. 40, 244 (2001).
[CrossRef]

1999 (1)

1998 (1)

T. E. Tiwald, D. W. Thompson, J. A. Woollam, and S. V. Pepper, Thin Solid Films 313–314, 718 (1998).
[CrossRef]

1996 (1)

J. H. Moon, J. W. Shin, S. Y. Kim, and J. W. Park, Langmuir 12, 4621 (1996).
[CrossRef]

1991 (1)

M. W. Kim, D. G. Peiffer, W. Chen, and Y. R. Shen, Macromolecules 24, 4216 (1991).
[CrossRef]

1979 (1)

1975 (1)

Akahane, T.

S. Okutani, M. Kimura, H. Toriumi, K. Akao, T. Tadokoro, and T. Akahane, Jpn. J. Appl. Phys. 40, 244 (2001).
[CrossRef]

Akao, K.

S. Okutani, M. Kimura, H. Toriumi, K. Akao, T. Tadokoro, and T. Akahane, Jpn. J. Appl. Phys. 40, 244 (2001).
[CrossRef]

Arwin, H.

M. Poksinski and H. Arwin, Opt. Lett. 32, 1308 (2007).
[CrossRef] [PubMed]

H. Arwin, in Handbook of Ellipsometry, H.G.Tompkins and E.A.Irene, eds. (William Andrew, 2005), pp. 799–855.
[CrossRef]

Azzam, R. M. A.

Babonas, G.-J.

Z. Balevicius, V. Vaicikauskas, and G.-J. Babonas, Appl. Surf. Sci. 256, 640 (2009).
[CrossRef]

Balevicius, Z.

Z. Balevicius, V. Vaicikauskas, and G.-J. Babonas, Appl. Surf. Sci. 256, 640 (2009).
[CrossRef]

Bashara, N. M.

Baumeister, P.

Chen, W.

M. W. Kim, D. G. Peiffer, W. Chen, and Y. R. Shen, Macromolecules 24, 4216 (1991).
[CrossRef]

Dougan, T.

T. Dougan, J. B. Levy, A. Salama, A. J. T. George, and C. D. Pusey, Clin. Exp. Immunol. 128, 555 (2002).
[CrossRef] [PubMed]

Elshazly-Zaghloul, M.

Gauglitz, G.

G. Gauglitz, Rev. Sci. Instrum. 76, 062224 (2005).
[CrossRef]

George, A. J. T.

T. Dougan, J. B. Levy, A. Salama, A. J. T. George, and C. D. Pusey, Clin. Exp. Immunol. 128, 555 (2002).
[CrossRef] [PubMed]

Ishikawa, M.

S. Otsuki and M. Ishikawa, Biosens. Bioelectron. 26, 202 (2010).
[CrossRef] [PubMed]

Kim, M. W.

M. W. Kim, D. G. Peiffer, W. Chen, and Y. R. Shen, Macromolecules 24, 4216 (1991).
[CrossRef]

Kim, S. Y.

J. H. Moon, J. W. Shin, S. Y. Kim, and J. W. Park, Langmuir 12, 4621 (1996).
[CrossRef]

Kimura, M.

S. Okutani, M. Kimura, H. Toriumi, K. Akao, T. Tadokoro, and T. Akahane, Jpn. J. Appl. Phys. 40, 244 (2001).
[CrossRef]

Levy, J. B.

T. Dougan, J. B. Levy, A. Salama, A. J. T. George, and C. D. Pusey, Clin. Exp. Immunol. 128, 555 (2002).
[CrossRef] [PubMed]

Moon, J. H.

J. H. Moon, J. W. Shin, S. Y. Kim, and J. W. Park, Langmuir 12, 4621 (1996).
[CrossRef]

Ohta, K.

Okutani, S.

S. Okutani, M. Kimura, H. Toriumi, K. Akao, T. Tadokoro, and T. Akahane, Jpn. J. Appl. Phys. 40, 244 (2001).
[CrossRef]

Otsuki, S.

Park, J. W.

J. H. Moon, J. W. Shin, S. Y. Kim, and J. W. Park, Langmuir 12, 4621 (1996).
[CrossRef]

Peiffer, D. G.

M. W. Kim, D. G. Peiffer, W. Chen, and Y. R. Shen, Macromolecules 24, 4216 (1991).
[CrossRef]

Pepper, S. V.

T. E. Tiwald, D. W. Thompson, J. A. Woollam, and S. V. Pepper, Thin Solid Films 313–314, 718 (1998).
[CrossRef]

Poksinski, M.

Pusey, C. D.

T. Dougan, J. B. Levy, A. Salama, A. J. T. George, and C. D. Pusey, Clin. Exp. Immunol. 128, 555 (2002).
[CrossRef] [PubMed]

Salama, A.

T. Dougan, J. B. Levy, A. Salama, A. J. T. George, and C. D. Pusey, Clin. Exp. Immunol. 128, 555 (2002).
[CrossRef] [PubMed]

Shen, Y. R.

M. W. Kim, D. G. Peiffer, W. Chen, and Y. R. Shen, Macromolecules 24, 4216 (1991).
[CrossRef]

Shin, J. W.

J. H. Moon, J. W. Shin, S. Y. Kim, and J. W. Park, Langmuir 12, 4621 (1996).
[CrossRef]

Smith, D.

Tadokoro, T.

S. Okutani, M. Kimura, H. Toriumi, K. Akao, T. Tadokoro, and T. Akahane, Jpn. J. Appl. Phys. 40, 244 (2001).
[CrossRef]

Tamada, K.

Thompson, D. W.

T. E. Tiwald, D. W. Thompson, J. A. Woollam, and S. V. Pepper, Thin Solid Films 313–314, 718 (1998).
[CrossRef]

Tiwald, T. E.

T. E. Tiwald, D. W. Thompson, J. A. Woollam, and S. V. Pepper, Thin Solid Films 313–314, 718 (1998).
[CrossRef]

Toriumi, H.

S. Okutani, M. Kimura, H. Toriumi, K. Akao, T. Tadokoro, and T. Akahane, Jpn. J. Appl. Phys. 40, 244 (2001).
[CrossRef]

Vaicikauskas, V.

Z. Balevicius, V. Vaicikauskas, and G.-J. Babonas, Appl. Surf. Sci. 256, 640 (2009).
[CrossRef]

Wakida, S.

Woollam, J. A.

T. E. Tiwald, D. W. Thompson, J. A. Woollam, and S. V. Pepper, Thin Solid Films 313–314, 718 (1998).
[CrossRef]

Appl. Opt. (4)

Appl. Surf. Sci. (1)

Z. Balevicius, V. Vaicikauskas, and G.-J. Babonas, Appl. Surf. Sci. 256, 640 (2009).
[CrossRef]

Biosens. Bioelectron. (1)

S. Otsuki and M. Ishikawa, Biosens. Bioelectron. 26, 202 (2010).
[CrossRef] [PubMed]

Clin. Exp. Immunol. (1)

T. Dougan, J. B. Levy, A. Salama, A. J. T. George, and C. D. Pusey, Clin. Exp. Immunol. 128, 555 (2002).
[CrossRef] [PubMed]

J. Opt. Soc. Am. A (1)

Jpn. J. Appl. Phys. (1)

S. Okutani, M. Kimura, H. Toriumi, K. Akao, T. Tadokoro, and T. Akahane, Jpn. J. Appl. Phys. 40, 244 (2001).
[CrossRef]

Langmuir (1)

J. H. Moon, J. W. Shin, S. Y. Kim, and J. W. Park, Langmuir 12, 4621 (1996).
[CrossRef]

Macromolecules (1)

M. W. Kim, D. G. Peiffer, W. Chen, and Y. R. Shen, Macromolecules 24, 4216 (1991).
[CrossRef]

Opt. Lett. (1)

Rev. Sci. Instrum. (1)

G. Gauglitz, Rev. Sci. Instrum. 76, 062224 (2005).
[CrossRef]

Thin Solid Films (1)

T. E. Tiwald, D. W. Thompson, J. A. Woollam, and S. V. Pepper, Thin Solid Films 313–314, 718 (1998).
[CrossRef]

Other (2)

H. Arwin, in Handbook of Ellipsometry, H.G.Tompkins and E.A.Irene, eds. (William Andrew, 2005), pp. 799–855.
[CrossRef]

Handbook of Optical Constants of Solids, E.D.Palik, ed. (Academic, 1985).

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Figures (4)

Fig. 1
Fig. 1

Experimental setup: (a) layer structure of the sample; (b) optical configuration of an imaging ellipsometer; (c) liquid cell; (d) cell plate.

Fig. 2
Fig. 2

(a) Fabrication process of a sample; (1) silanization; (2) UV irradiation. (b) Change in the chemical structure of APMS; the organic moiety surrounded by a dotted curve is removed.

Fig. 3
Fig. 3

Ellipsometric data for measurement in air ambient: (a) varying incident angle and (b) varying wavelength for irradiated (solid curve with filled circles) and nonirradiated (dotted curve with open circles) regions. Measured and fit data are represented by symbols and curves, respectively. The designated angles are of incidence inside the prism.

Fig. 4
Fig. 4

Ellipsometric data for measurement in water ambient. See the caption in Fig. 3 for details.

Tables (2)

Tables Icon

Table 1 Fitting Results for a Measurement in Air Ambient

Tables Icon

Table 2 Fitting Results for a Measurement in Water Ambient

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