Abstract

We measured a multilayer sample in air and water ambient below the critical angle of incidence based on internal reflection ellipsometry (IRE). Measurements with varying incident angle and varying wavelength both provided values by the fitting for refractive indices and thicknesses of layers consistent with design or theoretical ones. This verified that IRE is useful in measurement and analysis of thin films on transparent substrates and especially effective to study thin films at transparent substrate–liquid interfaces.

© 2010 Optical Society of America

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