Abstract

The spectral responsivity and the dynamic behavior of microbolometers with an integrated absorbing metamaterial are investigated. Wavelength tailoring and tuning in different microbolometers are achieved by varying the lateral extension of the absorber elements. Maximum sensitivity is tuned between 2.9 and 7.7μm, with peak absorptions reaching up to 88%. The presence of a continuous metallic shielding layer affects heat conduction and leads to faster thermal response times.

© 2010 Optical Society of America

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References

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  1. Such a system is currently marketed by Cedip Infrared Systems, http://www.cedip-infrared.com.
  2. A. J. Syllaios and P. Chahal, “Integrated spectroscopic microbolometer with microfilter arrays,” U.S. patent 6,998,613 (February 14, 2006).
  3. F. J. Gonzáles, J. L. Porter, and G. D. Boreman, Microw. Opt. Technol. Lett. 48, 165 (2006).
    [CrossRef]
  4. A. S. Weling, P. F. Henning, D. P. Neikirk, and S. Han, Proc. SPIE 6206, 62061F (2006).
    [CrossRef]
  5. T. Maier and H. Brückl, Opt. Lett. 34, 3012 (2009).
    [CrossRef] [PubMed]
  6. N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, Phys. Rev. Lett. 100, 207402 (2008).
    [CrossRef] [PubMed]
  7. Y. Avitzour, Y. A. Urzhumov, and G. Shvets, Phys. Rev. B 79, 045131 (2009).
    [CrossRef]
  8. M. Klanjsek Gunde and M. Macek, Phys. Stat. Sol. A 183, 439 (2001).
    [CrossRef]
  9. M. A. Ordal, L. L. Long, R. J. Bell, S. E. Bell, R. R. Bell, R. W. Alexander, Jr., and C. A. Ward, Appl. Opt. 22, 1099 (1983).
    [CrossRef] [PubMed]
  10. D. Y. Smith, E. Shiles, and M. Inokuti, in Handbook of Optical Constants of Solids, E.D.Palik, ed. (Academic, 1998).

2009 (2)

Y. Avitzour, Y. A. Urzhumov, and G. Shvets, Phys. Rev. B 79, 045131 (2009).
[CrossRef]

T. Maier and H. Brückl, Opt. Lett. 34, 3012 (2009).
[CrossRef] [PubMed]

2008 (1)

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, Phys. Rev. Lett. 100, 207402 (2008).
[CrossRef] [PubMed]

2006 (2)

F. J. Gonzáles, J. L. Porter, and G. D. Boreman, Microw. Opt. Technol. Lett. 48, 165 (2006).
[CrossRef]

A. S. Weling, P. F. Henning, D. P. Neikirk, and S. Han, Proc. SPIE 6206, 62061F (2006).
[CrossRef]

2001 (1)

M. Klanjsek Gunde and M. Macek, Phys. Stat. Sol. A 183, 439 (2001).
[CrossRef]

1983 (1)

Alexander, R. W.

Avitzour, Y.

Y. Avitzour, Y. A. Urzhumov, and G. Shvets, Phys. Rev. B 79, 045131 (2009).
[CrossRef]

Bell, R. J.

Bell, R. R.

Bell, S. E.

Boreman, G. D.

F. J. Gonzáles, J. L. Porter, and G. D. Boreman, Microw. Opt. Technol. Lett. 48, 165 (2006).
[CrossRef]

Brückl, H.

Chahal, P.

A. J. Syllaios and P. Chahal, “Integrated spectroscopic microbolometer with microfilter arrays,” U.S. patent 6,998,613 (February 14, 2006).

Gonzáles, F. J.

F. J. Gonzáles, J. L. Porter, and G. D. Boreman, Microw. Opt. Technol. Lett. 48, 165 (2006).
[CrossRef]

Han, S.

A. S. Weling, P. F. Henning, D. P. Neikirk, and S. Han, Proc. SPIE 6206, 62061F (2006).
[CrossRef]

Henning, P. F.

A. S. Weling, P. F. Henning, D. P. Neikirk, and S. Han, Proc. SPIE 6206, 62061F (2006).
[CrossRef]

Inokuti, M.

D. Y. Smith, E. Shiles, and M. Inokuti, in Handbook of Optical Constants of Solids, E.D.Palik, ed. (Academic, 1998).

Klanjsek Gunde, M.

M. Klanjsek Gunde and M. Macek, Phys. Stat. Sol. A 183, 439 (2001).
[CrossRef]

Landy, N. I.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, Phys. Rev. Lett. 100, 207402 (2008).
[CrossRef] [PubMed]

Long, L. L.

Macek, M.

M. Klanjsek Gunde and M. Macek, Phys. Stat. Sol. A 183, 439 (2001).
[CrossRef]

Maier, T.

Mock, J. J.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, Phys. Rev. Lett. 100, 207402 (2008).
[CrossRef] [PubMed]

Neikirk, D. P.

A. S. Weling, P. F. Henning, D. P. Neikirk, and S. Han, Proc. SPIE 6206, 62061F (2006).
[CrossRef]

Ordal, M. A.

Padilla, W. J.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, Phys. Rev. Lett. 100, 207402 (2008).
[CrossRef] [PubMed]

Porter, J. L.

F. J. Gonzáles, J. L. Porter, and G. D. Boreman, Microw. Opt. Technol. Lett. 48, 165 (2006).
[CrossRef]

Sajuyigbe, S.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, Phys. Rev. Lett. 100, 207402 (2008).
[CrossRef] [PubMed]

Shiles, E.

D. Y. Smith, E. Shiles, and M. Inokuti, in Handbook of Optical Constants of Solids, E.D.Palik, ed. (Academic, 1998).

Shvets, G.

Y. Avitzour, Y. A. Urzhumov, and G. Shvets, Phys. Rev. B 79, 045131 (2009).
[CrossRef]

Smith, D. R.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, Phys. Rev. Lett. 100, 207402 (2008).
[CrossRef] [PubMed]

Smith, D. Y.

D. Y. Smith, E. Shiles, and M. Inokuti, in Handbook of Optical Constants of Solids, E.D.Palik, ed. (Academic, 1998).

Syllaios, A. J.

A. J. Syllaios and P. Chahal, “Integrated spectroscopic microbolometer with microfilter arrays,” U.S. patent 6,998,613 (February 14, 2006).

Urzhumov, Y. A.

Y. Avitzour, Y. A. Urzhumov, and G. Shvets, Phys. Rev. B 79, 045131 (2009).
[CrossRef]

Ward, C. A.

Weling, A. S.

A. S. Weling, P. F. Henning, D. P. Neikirk, and S. Han, Proc. SPIE 6206, 62061F (2006).
[CrossRef]

Appl. Opt. (1)

Microw. Opt. Technol. Lett. (1)

F. J. Gonzáles, J. L. Porter, and G. D. Boreman, Microw. Opt. Technol. Lett. 48, 165 (2006).
[CrossRef]

Opt. Lett. (1)

Phys. Rev. B (1)

Y. Avitzour, Y. A. Urzhumov, and G. Shvets, Phys. Rev. B 79, 045131 (2009).
[CrossRef]

Phys. Rev. Lett. (1)

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, Phys. Rev. Lett. 100, 207402 (2008).
[CrossRef] [PubMed]

Phys. Stat. Sol. A (1)

M. Klanjsek Gunde and M. Macek, Phys. Stat. Sol. A 183, 439 (2001).
[CrossRef]

Proc. SPIE (1)

A. S. Weling, P. F. Henning, D. P. Neikirk, and S. Han, Proc. SPIE 6206, 62061F (2006).
[CrossRef]

Other (3)

Such a system is currently marketed by Cedip Infrared Systems, http://www.cedip-infrared.com.

A. J. Syllaios and P. Chahal, “Integrated spectroscopic microbolometer with microfilter arrays,” U.S. patent 6,998,613 (February 14, 2006).

D. Y. Smith, E. Shiles, and M. Inokuti, in Handbook of Optical Constants of Solids, E.D.Palik, ed. (Academic, 1998).

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Figures (2)

Fig. 1
Fig. 1

Schematic representation of the elementary cell used in the numerical simulations.

Fig. 2
Fig. 2

Absorption spectra of microbolometers with integrated absorbers: solid lines, experimental data; dashed lines, simulations. Absorber widths are as follows: (A) 0.60 μm , (B) 0.85 μm , (C) 1.05 μm , (D) 1.25 μm , (E) 1.50 μm , (F) 1.75 μm , (G) 2.10 μm .

Tables (1)

Tables Icon

Table 1 Geometrical and Experimental Data of the Investigated Devices

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