Abstract

We present a method for eliminating the temperature dependence of the resonance wavelength in high-Q silicon-based microdisk resonators by using a polymer cladding with a negative thermo-optic coefficient. Design requirements for athermal performance are derived based on theory and simulation, and their validity is experimentally verified.

© 2010 Optical Society of America

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References

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2009

2008

2007

2005

2004

G. T. Reed and A. P. Knights, Silicon Photonics: an Introduction (Wiley, 2004).
[CrossRef]

1993

Y. Kokuban, N. Funato, and M. Takizawa, IEEE Photonics Technol. Lett. 5, 1297 (1993).
[CrossRef]

1988

H. Kogelnik, in Guided-Wave Optoelectronics, T.Tamir, ed. (Springer-Verlag, 1988), pp. 7–88.

Adibi, A.

Ahn, H.

Apsel, A. B.

Baets, R.

Bogaerts, W.

Borselli, M.

Dokania, R. K.

Dumon, P.

Funato, N.

Y. Kokuban, N. Funato, and M. Takizawa, IEEE Photonics Technol. Lett. 5, 1297 (1993).
[CrossRef]

Han, X.

Jian, X.

Johnson, T. J.

Khan, M. H.

Kim, D. J.

Kim, G.

Kimerling, L. C.

W. N. Ye, J. Michel, and L. C. Kimerling, IEEE Photonics Technol. Lett. 20, 885 (2008).
[CrossRef]

Knights, A. P.

G. T. Reed and A. P. Knights, Silicon Photonics: an Introduction (Wiley, 2004).
[CrossRef]

Kogelnik, H.

H. Kogelnik, in Guided-Wave Optoelectronics, T.Tamir, ed. (Springer-Verlag, 1988), pp. 7–88.

Kokuban, Y.

Y. Kokuban, N. Funato, and M. Takizawa, IEEE Photonics Technol. Lett. 5, 1297 (1993).
[CrossRef]

Lee, J. M.

Lipson, M.

Manipatruni, S.

Michel, J.

W. N. Ye, J. Michel, and L. C. Kimerling, IEEE Photonics Technol. Lett. 20, 885 (2008).
[CrossRef]

Morthier, G.

Painter, O.

Park, S. H.

Poitras, C. B.

Qi, M.

Reed, G. T.

G. T. Reed and A. P. Knights, Silicon Photonics: an Introduction (Wiley, 2004).
[CrossRef]

Schmidt, B.

Shen, H.

Sherwood-Droz, N.

Soltani, M.

Takizawa, M.

Y. Kokuban, N. Funato, and M. Takizawa, IEEE Photonics Technol. Lett. 5, 1297 (1993).
[CrossRef]

Teng, J.

Xiao, S.

Ye, W. N.

W. N. Ye, J. Michel, and L. C. Kimerling, IEEE Photonics Technol. Lett. 20, 885 (2008).
[CrossRef]

Yegnanarayanan, S.

Zhang, H.

Zhao, M.

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Figures (2)

Fig. 1
Fig. 1

Simulation results for the temperature-induced resonance shift (TIRS) (a) at 1550 nm in PUA-clad on-substrate microdisk resonators with various thicknesses and radii and (b) at 1450 nm versus the Si layer thickness, in 10 μm radius PUA-clad undercut microdisk resonators. The results are shown for the fundamental TE mode, for which the cross-sectional profile can be seen in the inset.

Fig. 2
Fig. 2

(a) SEM image of an undercut microdisk resonator with a radius of 10 μm . Undercutting depth is 1 μm , and the undercutting boundary beneath the disk is visible from the top and has been marked in the image. (b) Temperature- induced resonance shift in a 10 μm radius, 220-nm-thick on- substrate microdisk with air cladding. (c) Athermal resonance in a 10 μm radius, 110-nm-thick PUA-clad undercut microdisk. This feature has an intrinsic Q of 180,000. The solid and dashed curves in (b) and (c) correspond to two measurements with 9 ° C temperature difference.

Equations (5)

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d λ d T = λ N g N eff T ,
N eff T = c ε 0 | E | 2 d x d y 2 P ( Γ core n core d n core d T + Γ clad n clad d n clad d T + Γ sub n sub d n sub d T ) ,
Γ A = A | E | 2 d x d y / | E | 2 d x d y ,
d n clad d T ( Γ core n core Γ clad n clad ) d n core d T .
Γ core 1 Γ core = n clad d n clad d T n core d n core d T ,

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