Abstract

We demonstrate a fully etched, continuously apodized fiber-to-chip surface grating coupler for the first time (to our knowledge). The device is fabricated in a single-etch step and operates with TM-polarized light, achieving a coupling efficiency of 3.7dB and a 3dB bandwidth of 60nm. A subwavelength microstructure is employed to generate an effective medium engineered to vary the strength of the grating and thereby maximize coupling efficiency, while mitigating backreflections at the same time. Minimum feature size is 100nm for compatibility with deep-UV 193nm lithography.

© 2010 Optical Society of America

Full Article  |  PDF Article
Related Articles
Waveguide grating coupler with subwavelength microstructures

Robert Halir, Pavel Cheben, Siegfried Janz, Dan-Xia Xu, Íñigo Molina-Fernández, and Juan G. Wangüemert-Pérez
Opt. Lett. 34(9) 1408-1410 (2009)

High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens
Opt. Express 18(17) 18278-18283 (2010)

Single-etch grating coupler for micrometric silicon rib waveguides

C. Alonso-Ramos, A. Ortega-Moñux, L. Zavargo-Peche, R. Halir, J. de Oliva-Rubio, I. Molina-Fernández, P. Cheben, D.-X. Xu, S. Janz, N. Kim, and B. Lamontagne
Opt. Lett. 36(14) 2647-2649 (2011)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription