Abstract

We demonstrate low-loss chalcogenide (As2S3) waveguides on a LiNbO3 substrate for the mid-IR wavelength (4.8μm). Designed for single-mode propagation, they are fabricated through photolithography and dry-etching technology and characterized on a mid-IR measurement setup with a quantum cascade laser. For straight waveguides, propagation loss as low as 0.33dB/cm is measured and low-loss bends on the order of 100μm are simulated, with measurement results showing <3dB for a 250μm bend radius. The coupling efficiency is estimated to be 81%. In addition, the influences of variations in width and bend radius are also investigated.

© 2010 Optical Society of America

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