Abstract

We demonstrate low-loss chalcogenide (As2S3) waveguides on a LiNbO3 substrate for the mid-IR wavelength (4.8μm). Designed for single-mode propagation, they are fabricated through photolithography and dry-etching technology and characterized on a mid-IR measurement setup with a quantum cascade laser. For straight waveguides, propagation loss as low as 0.33dB/cm is measured and low-loss bends on the order of 100μm are simulated, with measurement results showing <3dB for a 250μm bend radius. The coupling efficiency is estimated to be 81%. In addition, the influences of variations in width and bend radius are also investigated.

© 2010 Optical Society of America

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2010 (1)

W. C. Tan, M. E. Solmaz, J. Gardner, R. Atkins, and C. Madsen, J. Appl. Phys. 107, 033524 (2010).
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2007 (3)

2006 (1)

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J. S. Sanghera, L. B. Shaw, and I. D. Aggarwal, Compt. Rend. Chim. 5, 873 (2002).
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Benson, T. M.

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Diehl, L.

Duguay, M. A.

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Elliott, S. R.

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Feng, N.-N.

Finsterbusch, K.

Fu, L.

Furniss, D.

Galstian, T. V.

Gardner, J.

W. C. Tan, M. E. Solmaz, J. Gardner, R. Atkins, and C. Madsen, J. Appl. Phys. 107, 033524 (2010).
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Hofler, G.

Hu, J.

Jarvis, R.

Jean-Francois Viens, C. M.

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Kohoutek, T.

Krishnaswami, K.

Lamont, M. R. E.

Li, W.

Lian, Z. G.

Luther-Davies, B.

Madden, S.

Madsen, C.

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Madsen, N.

Malitson, I. H.

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Orava, J.

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Petit, L.

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Shaw, L. B.

J. S. Sanghera, L. B. Shaw, and I. D. Aggarwal, Compt. Rend. Chim. 5, 873 (2002).
[CrossRef]

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W. C. Tan, M. E. Solmaz, J. Gardner, R. Atkins, and C. Madsen, J. Appl. Phys. 107, 033524 (2010).
[CrossRef]

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Tan, W. C.

W. C. Tan, M. E. Solmaz, J. Gardner, R. Atkins, and C. Madsen, J. Appl. Phys. 107, 033524 (2010).
[CrossRef]

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Tsay, C.

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Wagner, T.

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R. S. Weis and T. K. Gaylord, Appl. Phys. A 37, 191 (1985).
[CrossRef]

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Zakery, A.

A. Zakery and S. R. Elliott, J. Non-Cryst. Solids 330, 1 (2003).
[CrossRef]

Zhu, J.

Appl. Phys. A (1)

R. S. Weis and T. K. Gaylord, Appl. Phys. A 37, 191 (1985).
[CrossRef]

Compt. Rend. Chim. (1)

J. S. Sanghera, L. B. Shaw, and I. D. Aggarwal, Compt. Rend. Chim. 5, 873 (2002).
[CrossRef]

J. Appl. Phys. (1)

W. C. Tan, M. E. Solmaz, J. Gardner, R. Atkins, and C. Madsen, J. Appl. Phys. 107, 033524 (2010).
[CrossRef]

J. Lightwave Technol. (1)

J. Non-Cryst. Solids (1)

A. Zakery and S. R. Elliott, J. Non-Cryst. Solids 330, 1 (2003).
[CrossRef]

J. Opt. Soc. Am. (1)

Opt. Express (4)

Opt. Lett. (2)

Other (2)

L. R. Deng and M. Osinski, in 2006 NNIN REU Research Accomplishments (NNIN, 2006), p. 100.

C. Tsay, E. Mujagic, C. F. Gmachl, and C. B. Arnold, in Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum Electronics and Laser Science Conference (IEEE, 2009), pp. 1–2.

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Figures (4)

Fig. 1
Fig. 1

Straight waveguide simulations: (a) mode profile and (b) single-mode conditions.

Fig. 2
Fig. 2

Bend waveguide simulations: (a) mode profile and (b) bend loss.

Fig. 3
Fig. 3

Waveguides after fabrication: (a) microscopic picture and (b) SEM picture.

Fig. 4
Fig. 4

Measurement results: (a) straight waveguides of varying widths and (b) propagation loss.

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