Abstract

We demonstrate, for the first time to the best of our knowledge, fabrication of three-dimensional microfluidic channels with arbitrary lengths and configurations inside glass by femtosecond laser direct writing. The main fabrication process includes two steps: (1) direct formation of hollow microchannels in a porous glass substrate immersed in water by femtosecond laser ablation and (2) postannealing of the glass substrate at 1150°C by which the porous glass can be consolidated. We show that a square-wavelike channel with a total length of 1.4cm and a diameter of 64μm can be easily produced 250μm beneath the glass surface.

© 2010 Optical Society of America

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2010 (1)

2009 (3)

K. C. Vishnubhatla, N. Bellini, R. Ramponi, G. Cerullo, and R. Osellame, Opt. Express 17, 8685 (2009).
[CrossRef] [PubMed]

S. Matsuo, H. Sumia, S. Kiyamaa, T. Tomitaa, and S. Hashimoto, Appl. Surf. Sci. 255, 9758 (2009).
[CrossRef]

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, J. Phys. Chem. C 113, 11560 (2009).
[CrossRef]

2006 (2)

G. M. Whitesides, Nature 442, 368 (2006).
[CrossRef] [PubMed]

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, Appl. Phys. A 84, 47 (2006).
[CrossRef]

2005 (2)

K. Sugioka, Y. Cheng, and K. Midorikawa, Appl. Phys. A 81, 1 (2005).
[CrossRef]

D. Chen, H. Miyoshi, T. Akai, and T. Yazawa, Appl. Phys. Lett. 86, 231908 (2005).
[CrossRef]

2004 (2)

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A 79, 605 (2004).
[CrossRef]

Y. Cheng, K. Sugioka, and K. Midorikawa, Opt. Lett. 29, 2007 (2004).
[CrossRef] [PubMed]

2003 (1)

2001 (2)

2000 (1)

B. H. Jo, L. M. Van Lerberghe, K. M. Motsegood, and D. J. Beebe, J. Microelectromech. Syst. 9, 76 (2000).
[CrossRef]

Akai, T.

D. Chen, H. Miyoshi, T. Akai, and T. Yazawa, Appl. Phys. Lett. 86, 231908 (2005).
[CrossRef]

Beebe, D. J.

B. H. Jo, L. M. Van Lerberghe, K. M. Motsegood, and D. J. Beebe, J. Microelectromech. Syst. 9, 76 (2000).
[CrossRef]

Bellini, N.

Bhardwaj, V. R.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, Appl. Phys. A 84, 47 (2006).
[CrossRef]

Cerullo, G.

Chen, D.

D. Chen, H. Miyoshi, T. Akai, and T. Yazawa, Appl. Phys. Lett. 86, 231908 (2005).
[CrossRef]

Chen, X. F.

Cheng, Y.

Choi, T. Y.

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A 79, 605 (2004).
[CrossRef]

Corkum, P. B.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, Appl. Phys. A 84, 47 (2006).
[CrossRef]

Grigoropoulos, C. P.

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A 79, 605 (2004).
[CrossRef]

Hashimoto, S.

S. Matsuo, H. Sumia, S. Kiyamaa, T. Tomitaa, and S. Hashimoto, Appl. Surf. Sci. 255, 9758 (2009).
[CrossRef]

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, J. Phys. Chem. C 113, 11560 (2009).
[CrossRef]

He, F.

Hnatovsky, C.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, Appl. Phys. A 84, 47 (2006).
[CrossRef]

Hwang, D. J.

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A 79, 605 (2004).
[CrossRef]

Itoh, K.

Jiang, Y. Y.

Jo, B. H.

B. H. Jo, L. M. Van Lerberghe, K. M. Motsegood, and D. J. Beebe, J. Microelectromech. Syst. 9, 76 (2000).
[CrossRef]

Juodkazis, S.

Kawachi, M.

Kiyama, S.

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, J. Phys. Chem. C 113, 11560 (2009).
[CrossRef]

Kiyamaa, S.

S. Matsuo, H. Sumia, S. Kiyamaa, T. Tomitaa, and S. Hashimoto, Appl. Surf. Sci. 255, 9758 (2009).
[CrossRef]

Kuroda, D.

Li, Y.

Liao, Y.

Marcinkevicius, A.

Masuda, M.

Matsuo, S.

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, J. Phys. Chem. C 113, 11560 (2009).
[CrossRef]

S. Matsuo, H. Sumia, S. Kiyamaa, T. Tomitaa, and S. Hashimoto, Appl. Surf. Sci. 255, 9758 (2009).
[CrossRef]

A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, Opt. Lett. 26, 277 (2001).
[CrossRef]

Midorikawa, K.

Misawa, H.

Miwa, M.

Miyoshi, H.

D. Chen, H. Miyoshi, T. Akai, and T. Yazawa, Appl. Phys. Lett. 86, 231908 (2005).
[CrossRef]

Morihira, Y.

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, J. Phys. Chem. C 113, 11560 (2009).
[CrossRef]

Motsegood, K. M.

B. H. Jo, L. M. Van Lerberghe, K. M. Motsegood, and D. J. Beebe, J. Microelectromech. Syst. 9, 76 (2000).
[CrossRef]

Nishii, J.

Osellame, R.

Rajeev, P. P.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, Appl. Phys. A 84, 47 (2006).
[CrossRef]

Ramponi, R.

Rayner, D. M.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, Appl. Phys. A 84, 47 (2006).
[CrossRef]

Shihoyama, K.

Simova, E.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, Appl. Phys. A 84, 47 (2006).
[CrossRef]

Sugioka, K.

Sumia, H.

S. Matsuo, H. Sumia, S. Kiyamaa, T. Tomitaa, and S. Hashimoto, Appl. Surf. Sci. 255, 9758 (2009).
[CrossRef]

Sun, H. Y.

Taylor, R. S.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, Appl. Phys. A 84, 47 (2006).
[CrossRef]

Tomitaa, T.

S. Matsuo, H. Sumia, S. Kiyamaa, T. Tomitaa, and S. Hashimoto, Appl. Surf. Sci. 255, 9758 (2009).
[CrossRef]

Toyoda, K.

Van Lerberghe, L. M.

B. H. Jo, L. M. Van Lerberghe, K. M. Motsegood, and D. J. Beebe, J. Microelectromech. Syst. 9, 76 (2000).
[CrossRef]

Vishnubhatla, K. C.

Wang, C.

Watanabe, M.

Watanabe, W.

Whitesides, G. M.

G. M. Whitesides, Nature 442, 368 (2006).
[CrossRef] [PubMed]

Xu, J.

Xu, Y. H.

Xu, Z. Z.

Yamada, K.

Yazawa, T.

D. Chen, H. Miyoshi, T. Akai, and T. Yazawa, Appl. Phys. Lett. 86, 231908 (2005).
[CrossRef]

Zhou, Z. H.

Appl. Phys. A (3)

K. Sugioka, Y. Cheng, and K. Midorikawa, Appl. Phys. A 81, 1 (2005).
[CrossRef]

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, Appl. Phys. A 84, 47 (2006).
[CrossRef]

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A 79, 605 (2004).
[CrossRef]

Appl. Phys. Lett. (1)

D. Chen, H. Miyoshi, T. Akai, and T. Yazawa, Appl. Phys. Lett. 86, 231908 (2005).
[CrossRef]

Appl. Surf. Sci. (1)

S. Matsuo, H. Sumia, S. Kiyamaa, T. Tomitaa, and S. Hashimoto, Appl. Surf. Sci. 255, 9758 (2009).
[CrossRef]

J. Microelectromech. Syst. (1)

B. H. Jo, L. M. Van Lerberghe, K. M. Motsegood, and D. J. Beebe, J. Microelectromech. Syst. 9, 76 (2000).
[CrossRef]

J. Phys. Chem. C (1)

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, J. Phys. Chem. C 113, 11560 (2009).
[CrossRef]

Nature (1)

G. M. Whitesides, Nature 442, 368 (2006).
[CrossRef] [PubMed]

Opt. Express (1)

Opt. Lett. (5)

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Figures (3)

Fig. 1
Fig. 1

(a) Schematic view of experimental setup and (b) flow diagram for the fabrication process.

Fig. 2
Fig. 2

(a) Top-view micrograph of a 1.6-cm-long microchannel embedded in porous glass before postannealing. (b), (c) Close-up views of postannealed microchannel filled with red ink: (b) low magnification; (c) high magnification.

Fig. 3
Fig. 3

Cross-sectional views of the cleaved microchannel (a) before and (b) after the postannealing.

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