Abstract

We demonstrate, for the first time to the best of our knowledge, fabrication of three-dimensional microfluidic channels with arbitrary lengths and configurations inside glass by femtosecond laser direct writing. The main fabrication process includes two steps: (1) direct formation of hollow microchannels in a porous glass substrate immersed in water by femtosecond laser ablation and (2) postannealing of the glass substrate at 1150°C by which the porous glass can be consolidated. We show that a square-wavelike channel with a total length of 1.4cm and a diameter of 64μm can be easily produced 250μm beneath the glass surface.

© 2010 Optical Society of America

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