Abstract

We report a surface-enhanced Raman scattering (SERS) microchip that is capable of measuring SERS signals of liquid samples with high sensitivity. The microdevice is an integration of a silicon-based SERS substrate, a multimode optical fiber (MMF), and a microchannel embedded in the photosensitive glass fabricated by the femtosecond laser followed by thermal treatment, wet etching, and annealing. The performance of the SERS microchip is evaluated by measuring rhodamine 6G using a 632.8nm He–Ne laser at 4.3mW excitation power, which reveals that the detection limit is lower than 1010M at a 1s short accumulation time.

© 2010 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. R. R. Gattass and E. Mazur, Nat. Photon. 2, 219 (2008).
    [Crossref]
  2. S. K. Hsiung, C. H. Lin, and G. B. Lee, Electrophoresis 26, 1122 (2005).
    [Crossref] [PubMed]
  3. C.-H. Lin, L. Jiang, H. Xiao, Y.-H. Chai, S.-J. Chen, and H.-L. Tsai, Opt. Lett. 34, 2408 (2009).
    [Crossref] [PubMed]
  4. C. H. Lin, L. Jiang, H. Xiao, Y. H. Chai, S. J. Chen, and H. L. Tsai, Appl. Phys. A 97, 751 (2009).
    [Crossref]
  5. Y. Cheng, K. Sugioka, and K. Midorikawa, Opt. Lett. 28, 1144 (2003).
    [Crossref] [PubMed]
  6. G. L. Liu and L. P. Lee, Appl. Phys. Lett. 87, 074101 (2005).
    [Crossref]
  7. T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, I. Miyamoto, H. Takai, and K. Midorikawa, J. Appl. Phys. 97, 063517 (2005).
    [Crossref]
  8. J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, Phys. Rev. B 27, 1141 (1983).
    [Crossref]
  9. J. F. Young, J. S. Preston, H. M. van Driel, and J. E. Sipe, Phys. Rev. B 27, 1155 (1983).
    [Crossref]
  10. J. F. Young, J. E. Sipe, and H. M. van Driel, Phys. Rev. B 30, 2001 (1984).
    [Crossref]
  11. H. Hada, Y. Yonezawa, A. Yoshida, and A. Kurakake, J. Phys. Chem. 80, 2728 (1976).
    [Crossref]
  12. I. W. Sztainbuch, J. Chem. Phys. 125, 124707 (2006).
    [Crossref] [PubMed]
  13. M. Futamata and Y. Maruyama, Anal. Bioanal. Chem. 388, 89 (2007).
    [Crossref] [PubMed]

2009 (2)

C. H. Lin, L. Jiang, H. Xiao, Y. H. Chai, S. J. Chen, and H. L. Tsai, Appl. Phys. A 97, 751 (2009).
[Crossref]

C.-H. Lin, L. Jiang, H. Xiao, Y.-H. Chai, S.-J. Chen, and H.-L. Tsai, Opt. Lett. 34, 2408 (2009).
[Crossref] [PubMed]

2008 (1)

R. R. Gattass and E. Mazur, Nat. Photon. 2, 219 (2008).
[Crossref]

2007 (1)

M. Futamata and Y. Maruyama, Anal. Bioanal. Chem. 388, 89 (2007).
[Crossref] [PubMed]

2006 (1)

I. W. Sztainbuch, J. Chem. Phys. 125, 124707 (2006).
[Crossref] [PubMed]

2005 (3)

G. L. Liu and L. P. Lee, Appl. Phys. Lett. 87, 074101 (2005).
[Crossref]

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, I. Miyamoto, H. Takai, and K. Midorikawa, J. Appl. Phys. 97, 063517 (2005).
[Crossref]

S. K. Hsiung, C. H. Lin, and G. B. Lee, Electrophoresis 26, 1122 (2005).
[Crossref] [PubMed]

2003 (1)

1984 (1)

J. F. Young, J. E. Sipe, and H. M. van Driel, Phys. Rev. B 30, 2001 (1984).
[Crossref]

1983 (2)

J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, Phys. Rev. B 27, 1141 (1983).
[Crossref]

J. F. Young, J. S. Preston, H. M. van Driel, and J. E. Sipe, Phys. Rev. B 27, 1155 (1983).
[Crossref]

1976 (1)

H. Hada, Y. Yonezawa, A. Yoshida, and A. Kurakake, J. Phys. Chem. 80, 2728 (1976).
[Crossref]

Chai, Y. H.

C. H. Lin, L. Jiang, H. Xiao, Y. H. Chai, S. J. Chen, and H. L. Tsai, Appl. Phys. A 97, 751 (2009).
[Crossref]

Chai, Y.-H.

Chen, S. J.

C. H. Lin, L. Jiang, H. Xiao, Y. H. Chai, S. J. Chen, and H. L. Tsai, Appl. Phys. A 97, 751 (2009).
[Crossref]

Chen, S.-J.

Cheng, Y.

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, I. Miyamoto, H. Takai, and K. Midorikawa, J. Appl. Phys. 97, 063517 (2005).
[Crossref]

Y. Cheng, K. Sugioka, and K. Midorikawa, Opt. Lett. 28, 1144 (2003).
[Crossref] [PubMed]

Futamata, M.

M. Futamata and Y. Maruyama, Anal. Bioanal. Chem. 388, 89 (2007).
[Crossref] [PubMed]

Gattass, R. R.

R. R. Gattass and E. Mazur, Nat. Photon. 2, 219 (2008).
[Crossref]

Hada, H.

H. Hada, Y. Yonezawa, A. Yoshida, and A. Kurakake, J. Phys. Chem. 80, 2728 (1976).
[Crossref]

Hongo, T.

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, I. Miyamoto, H. Takai, and K. Midorikawa, J. Appl. Phys. 97, 063517 (2005).
[Crossref]

Hsiung, S. K.

S. K. Hsiung, C. H. Lin, and G. B. Lee, Electrophoresis 26, 1122 (2005).
[Crossref] [PubMed]

Jiang, L.

C. H. Lin, L. Jiang, H. Xiao, Y. H. Chai, S. J. Chen, and H. L. Tsai, Appl. Phys. A 97, 751 (2009).
[Crossref]

C.-H. Lin, L. Jiang, H. Xiao, Y.-H. Chai, S.-J. Chen, and H.-L. Tsai, Opt. Lett. 34, 2408 (2009).
[Crossref] [PubMed]

Kurakake, A.

H. Hada, Y. Yonezawa, A. Yoshida, and A. Kurakake, J. Phys. Chem. 80, 2728 (1976).
[Crossref]

Lee, G. B.

S. K. Hsiung, C. H. Lin, and G. B. Lee, Electrophoresis 26, 1122 (2005).
[Crossref] [PubMed]

Lee, L. P.

G. L. Liu and L. P. Lee, Appl. Phys. Lett. 87, 074101 (2005).
[Crossref]

Lin, C. H.

C. H. Lin, L. Jiang, H. Xiao, Y. H. Chai, S. J. Chen, and H. L. Tsai, Appl. Phys. A 97, 751 (2009).
[Crossref]

S. K. Hsiung, C. H. Lin, and G. B. Lee, Electrophoresis 26, 1122 (2005).
[Crossref] [PubMed]

Lin, C.-H.

Liu, G. L.

G. L. Liu and L. P. Lee, Appl. Phys. Lett. 87, 074101 (2005).
[Crossref]

Maruyama, Y.

M. Futamata and Y. Maruyama, Anal. Bioanal. Chem. 388, 89 (2007).
[Crossref] [PubMed]

Masuda, M.

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, I. Miyamoto, H. Takai, and K. Midorikawa, J. Appl. Phys. 97, 063517 (2005).
[Crossref]

Mazur, E.

R. R. Gattass and E. Mazur, Nat. Photon. 2, 219 (2008).
[Crossref]

Midorikawa, K.

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, I. Miyamoto, H. Takai, and K. Midorikawa, J. Appl. Phys. 97, 063517 (2005).
[Crossref]

Y. Cheng, K. Sugioka, and K. Midorikawa, Opt. Lett. 28, 1144 (2003).
[Crossref] [PubMed]

Miyamoto, I.

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, I. Miyamoto, H. Takai, and K. Midorikawa, J. Appl. Phys. 97, 063517 (2005).
[Crossref]

Niino, H.

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, I. Miyamoto, H. Takai, and K. Midorikawa, J. Appl. Phys. 97, 063517 (2005).
[Crossref]

Preston, J. S.

J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, Phys. Rev. B 27, 1141 (1983).
[Crossref]

J. F. Young, J. S. Preston, H. M. van Driel, and J. E. Sipe, Phys. Rev. B 27, 1155 (1983).
[Crossref]

Sipe, J. E.

J. F. Young, J. E. Sipe, and H. M. van Driel, Phys. Rev. B 30, 2001 (1984).
[Crossref]

J. F. Young, J. S. Preston, H. M. van Driel, and J. E. Sipe, Phys. Rev. B 27, 1155 (1983).
[Crossref]

J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, Phys. Rev. B 27, 1141 (1983).
[Crossref]

Sugioka, K.

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, I. Miyamoto, H. Takai, and K. Midorikawa, J. Appl. Phys. 97, 063517 (2005).
[Crossref]

Y. Cheng, K. Sugioka, and K. Midorikawa, Opt. Lett. 28, 1144 (2003).
[Crossref] [PubMed]

Sztainbuch, I. W.

I. W. Sztainbuch, J. Chem. Phys. 125, 124707 (2006).
[Crossref] [PubMed]

Takai, H.

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, I. Miyamoto, H. Takai, and K. Midorikawa, J. Appl. Phys. 97, 063517 (2005).
[Crossref]

Tsai, H. L.

C. H. Lin, L. Jiang, H. Xiao, Y. H. Chai, S. J. Chen, and H. L. Tsai, Appl. Phys. A 97, 751 (2009).
[Crossref]

Tsai, H.-L.

van Driel, H. M.

J. F. Young, J. E. Sipe, and H. M. van Driel, Phys. Rev. B 30, 2001 (1984).
[Crossref]

J. F. Young, J. S. Preston, H. M. van Driel, and J. E. Sipe, Phys. Rev. B 27, 1155 (1983).
[Crossref]

J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, Phys. Rev. B 27, 1141 (1983).
[Crossref]

Xiao, H.

C. H. Lin, L. Jiang, H. Xiao, Y. H. Chai, S. J. Chen, and H. L. Tsai, Appl. Phys. A 97, 751 (2009).
[Crossref]

C.-H. Lin, L. Jiang, H. Xiao, Y.-H. Chai, S.-J. Chen, and H.-L. Tsai, Opt. Lett. 34, 2408 (2009).
[Crossref] [PubMed]

Yonezawa, Y.

H. Hada, Y. Yonezawa, A. Yoshida, and A. Kurakake, J. Phys. Chem. 80, 2728 (1976).
[Crossref]

Yoshida, A.

H. Hada, Y. Yonezawa, A. Yoshida, and A. Kurakake, J. Phys. Chem. 80, 2728 (1976).
[Crossref]

Young, J. F.

J. F. Young, J. E. Sipe, and H. M. van Driel, Phys. Rev. B 30, 2001 (1984).
[Crossref]

J. F. Young, J. S. Preston, H. M. van Driel, and J. E. Sipe, Phys. Rev. B 27, 1155 (1983).
[Crossref]

J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, Phys. Rev. B 27, 1141 (1983).
[Crossref]

Anal. Bioanal. Chem. (1)

M. Futamata and Y. Maruyama, Anal. Bioanal. Chem. 388, 89 (2007).
[Crossref] [PubMed]

Appl. Phys. A (1)

C. H. Lin, L. Jiang, H. Xiao, Y. H. Chai, S. J. Chen, and H. L. Tsai, Appl. Phys. A 97, 751 (2009).
[Crossref]

Appl. Phys. Lett. (1)

G. L. Liu and L. P. Lee, Appl. Phys. Lett. 87, 074101 (2005).
[Crossref]

Electrophoresis (1)

S. K. Hsiung, C. H. Lin, and G. B. Lee, Electrophoresis 26, 1122 (2005).
[Crossref] [PubMed]

J. Appl. Phys. (1)

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, I. Miyamoto, H. Takai, and K. Midorikawa, J. Appl. Phys. 97, 063517 (2005).
[Crossref]

J. Chem. Phys. (1)

I. W. Sztainbuch, J. Chem. Phys. 125, 124707 (2006).
[Crossref] [PubMed]

J. Phys. Chem. (1)

H. Hada, Y. Yonezawa, A. Yoshida, and A. Kurakake, J. Phys. Chem. 80, 2728 (1976).
[Crossref]

Nat. Photon. (1)

R. R. Gattass and E. Mazur, Nat. Photon. 2, 219 (2008).
[Crossref]

Opt. Lett. (2)

Phys. Rev. B (3)

J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, Phys. Rev. B 27, 1141 (1983).
[Crossref]

J. F. Young, J. S. Preston, H. M. van Driel, and J. E. Sipe, Phys. Rev. B 27, 1155 (1983).
[Crossref]

J. F. Young, J. E. Sipe, and H. M. van Driel, Phys. Rev. B 30, 2001 (1984).
[Crossref]

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1
Fig. 1

Optical image of the glass microchip with a 1 mm scale bar. a, sample inlet/outlet ports opened to the top surface of the glass chip; b, embedded microchannels connecting a and e; c, an opened part of the fiber holder; d, an embedded fiber clamp; e, an embedded microchannel with an opened end along the side surface (dashed line) of the glass chip; and f, the SERS substrate is bound to the chip along the dashed line.

Fig. 2
Fig. 2

Surface morphology of the silicon wafer substrate machined by fs laser pulses in (a) deionized water and (b) 0.1 M silver nitrate solutions at a scanning speed of 1 mm / min .

Fig. 3
Fig. 3

SERS spectra of R6G at concentrations of (a) 10 10 , (b) 10 9 , (c) 10 8 , and (d) 10 7 M .

Fig. 4
Fig. 4

Normalized SERS intensities at different R6G concentrations.

Metrics