Abstract

We designed, fabricated, and characterized three-level transmission gratings in the resonance domain with reduced shadowing losses based on a three-wave interference mechanism. A new technological approach allows for fabrication of homogeneous and large area multilevel gratings without spurious artifacts. To our knowledge, the measured efficiency of 86% exhibits the largest value yet reported for a multilevel transmission grating in the resonance domain close to normal incidence.

© 2010 Optical Society of America

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