Abstract

We demonstrate a broadband mirror for the IR wavelength region comprising a subwavelength grating made of germanium. We design and optimize the guided-mode resonances in the structure for TM-polarized incident light by rigorous electromagnetic simulations. The grating structure is realized by nanoimprint lithography and dry etching. The reflectivity of the mirror is over 95% for the wavelength range between 2245 and 3080nm.

© 2010 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. C. J. Fecko, J. D. Eaves, J. J. Loparo, A. Tokmakoff, and P. L. Geissler, Science 301, 1698 (2003).
    [CrossRef] [PubMed]
  2. Z. Wu, P. E. Powers, A. M. Sarangan, and Q. Zhan, Opt. Lett. 33, 1653 (2008).
    [CrossRef] [PubMed]
  3. Yu. I. Zavadskiĭ, A. S. Skrylev, B. M. Khotyanov, and V. V. Chernokozhin, J. Opt. Technol. 76, 755 (2009).
    [CrossRef]
  4. R. Ramirez-Iniguez, S. M. Idrus, and Z. Sun, Optical Wireless Communications: IR for Wireless Connectivity (CRC Press, 2008).
    [CrossRef]
  5. M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, Nat. Photon. 1, 119 (2007).
    [CrossRef]
  6. R. Magnusson and M. Shokooh-Saremi, Opt. Express 16, 3456 (2008).
    [CrossRef] [PubMed]
  7. S. S. Wang and R. Magnusson, Appl. Opt. 32, 2606(1993).
    [CrossRef] [PubMed]
  8. D. R. Lide, in CRC Handbook of Chemistry and Physics, 90th ed., Internet Version (CRC Press, 2010).
  9. T.-P. Ngo, M. El Kurdi, X. Checoury, P. Boucaud, J. F. Damlencourt, O. Kermarrec, and D. Bensahel, Appl. Phys. Lett. 93, 241112 (2008).
    [CrossRef]
  10. M. Lindblom, J. Reinspach, O. von Hofsten, M. Bertilson, H. M. Hertz, and A. Holmberg, J. Vac. Sci. Technol. B 27, L1 (2009).
    [CrossRef]
  11. C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, IEEE Photonics Technol. Lett. 16, 1676 (2004).
    [CrossRef]
  12. M. G. Moharam and T. K. Gaylord, J. Opt. Soc. Am. 71, 811 (1981).
    [CrossRef]
  13. B. J. Frey, D. B. Leviton, and T. J. Madison, Proc. SPIE 6273, 62732J (2006).
    [CrossRef]
  14. K. Kobayashi, J. Non-Cryst. Solids 316, 403 (2003).
    [CrossRef]
  15. A.-L. Fehrembach, A. Talneau, O. Boyko, F. Lemarchand, and A. Sentenac, Opt. Lett. 32, 2269 (2007).
    [CrossRef] [PubMed]

2009

Yu. I. Zavadskiĭ, A. S. Skrylev, B. M. Khotyanov, and V. V. Chernokozhin, J. Opt. Technol. 76, 755 (2009).
[CrossRef]

M. Lindblom, J. Reinspach, O. von Hofsten, M. Bertilson, H. M. Hertz, and A. Holmberg, J. Vac. Sci. Technol. B 27, L1 (2009).
[CrossRef]

2008

R. Magnusson and M. Shokooh-Saremi, Opt. Express 16, 3456 (2008).
[CrossRef] [PubMed]

Z. Wu, P. E. Powers, A. M. Sarangan, and Q. Zhan, Opt. Lett. 33, 1653 (2008).
[CrossRef] [PubMed]

T.-P. Ngo, M. El Kurdi, X. Checoury, P. Boucaud, J. F. Damlencourt, O. Kermarrec, and D. Bensahel, Appl. Phys. Lett. 93, 241112 (2008).
[CrossRef]

2007

2006

B. J. Frey, D. B. Leviton, and T. J. Madison, Proc. SPIE 6273, 62732J (2006).
[CrossRef]

2004

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, IEEE Photonics Technol. Lett. 16, 1676 (2004).
[CrossRef]

2003

C. J. Fecko, J. D. Eaves, J. J. Loparo, A. Tokmakoff, and P. L. Geissler, Science 301, 1698 (2003).
[CrossRef] [PubMed]

K. Kobayashi, J. Non-Cryst. Solids 316, 403 (2003).
[CrossRef]

1993

1981

Bensahel, D.

T.-P. Ngo, M. El Kurdi, X. Checoury, P. Boucaud, J. F. Damlencourt, O. Kermarrec, and D. Bensahel, Appl. Phys. Lett. 93, 241112 (2008).
[CrossRef]

Bertilson, M.

M. Lindblom, J. Reinspach, O. von Hofsten, M. Bertilson, H. M. Hertz, and A. Holmberg, J. Vac. Sci. Technol. B 27, L1 (2009).
[CrossRef]

Boucaud, P.

T.-P. Ngo, M. El Kurdi, X. Checoury, P. Boucaud, J. F. Damlencourt, O. Kermarrec, and D. Bensahel, Appl. Phys. Lett. 93, 241112 (2008).
[CrossRef]

Boyko, O.

Chang-Hasnain, C. J.

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, Nat. Photon. 1, 119 (2007).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, IEEE Photonics Technol. Lett. 16, 1676 (2004).
[CrossRef]

Checoury, X.

T.-P. Ngo, M. El Kurdi, X. Checoury, P. Boucaud, J. F. Damlencourt, O. Kermarrec, and D. Bensahel, Appl. Phys. Lett. 93, 241112 (2008).
[CrossRef]

Chen, L.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, IEEE Photonics Technol. Lett. 16, 1676 (2004).
[CrossRef]

Chernokozhin, V. V.

Damlencourt, J. F.

T.-P. Ngo, M. El Kurdi, X. Checoury, P. Boucaud, J. F. Damlencourt, O. Kermarrec, and D. Bensahel, Appl. Phys. Lett. 93, 241112 (2008).
[CrossRef]

Eaves, J. D.

C. J. Fecko, J. D. Eaves, J. J. Loparo, A. Tokmakoff, and P. L. Geissler, Science 301, 1698 (2003).
[CrossRef] [PubMed]

El Kurdi, M.

T.-P. Ngo, M. El Kurdi, X. Checoury, P. Boucaud, J. F. Damlencourt, O. Kermarrec, and D. Bensahel, Appl. Phys. Lett. 93, 241112 (2008).
[CrossRef]

Fecko, C. J.

C. J. Fecko, J. D. Eaves, J. J. Loparo, A. Tokmakoff, and P. L. Geissler, Science 301, 1698 (2003).
[CrossRef] [PubMed]

Fehrembach, A.-L.

Frey, B. J.

B. J. Frey, D. B. Leviton, and T. J. Madison, Proc. SPIE 6273, 62732J (2006).
[CrossRef]

Gaylord, T. K.

Geissler, P. L.

C. J. Fecko, J. D. Eaves, J. J. Loparo, A. Tokmakoff, and P. L. Geissler, Science 301, 1698 (2003).
[CrossRef] [PubMed]

Hertz, H. M.

M. Lindblom, J. Reinspach, O. von Hofsten, M. Bertilson, H. M. Hertz, and A. Holmberg, J. Vac. Sci. Technol. B 27, L1 (2009).
[CrossRef]

Holmberg, A.

M. Lindblom, J. Reinspach, O. von Hofsten, M. Bertilson, H. M. Hertz, and A. Holmberg, J. Vac. Sci. Technol. B 27, L1 (2009).
[CrossRef]

Huang, M. C. Y.

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, Nat. Photon. 1, 119 (2007).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, IEEE Photonics Technol. Lett. 16, 1676 (2004).
[CrossRef]

Idrus, S. M.

R. Ramirez-Iniguez, S. M. Idrus, and Z. Sun, Optical Wireless Communications: IR for Wireless Connectivity (CRC Press, 2008).
[CrossRef]

Kermarrec, O.

T.-P. Ngo, M. El Kurdi, X. Checoury, P. Boucaud, J. F. Damlencourt, O. Kermarrec, and D. Bensahel, Appl. Phys. Lett. 93, 241112 (2008).
[CrossRef]

Khotyanov, B. M.

Kobayashi, K.

K. Kobayashi, J. Non-Cryst. Solids 316, 403 (2003).
[CrossRef]

Lemarchand, F.

Leviton, D. B.

B. J. Frey, D. B. Leviton, and T. J. Madison, Proc. SPIE 6273, 62732J (2006).
[CrossRef]

Lide, D. R.

D. R. Lide, in CRC Handbook of Chemistry and Physics, 90th ed., Internet Version (CRC Press, 2010).

Lindblom, M.

M. Lindblom, J. Reinspach, O. von Hofsten, M. Bertilson, H. M. Hertz, and A. Holmberg, J. Vac. Sci. Technol. B 27, L1 (2009).
[CrossRef]

Loparo, J. J.

C. J. Fecko, J. D. Eaves, J. J. Loparo, A. Tokmakoff, and P. L. Geissler, Science 301, 1698 (2003).
[CrossRef] [PubMed]

Madison, T. J.

B. J. Frey, D. B. Leviton, and T. J. Madison, Proc. SPIE 6273, 62732J (2006).
[CrossRef]

Magnusson, R.

Mateus, C. F. R.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, IEEE Photonics Technol. Lett. 16, 1676 (2004).
[CrossRef]

Moharam, M. G.

Ngo, T.-P.

T.-P. Ngo, M. El Kurdi, X. Checoury, P. Boucaud, J. F. Damlencourt, O. Kermarrec, and D. Bensahel, Appl. Phys. Lett. 93, 241112 (2008).
[CrossRef]

Powers, P. E.

Ramirez-Iniguez, R.

R. Ramirez-Iniguez, S. M. Idrus, and Z. Sun, Optical Wireless Communications: IR for Wireless Connectivity (CRC Press, 2008).
[CrossRef]

Reinspach, J.

M. Lindblom, J. Reinspach, O. von Hofsten, M. Bertilson, H. M. Hertz, and A. Holmberg, J. Vac. Sci. Technol. B 27, L1 (2009).
[CrossRef]

Sarangan, A. M.

Sentenac, A.

Shokooh-Saremi, M.

Skrylev, A. S.

Sun, Z.

R. Ramirez-Iniguez, S. M. Idrus, and Z. Sun, Optical Wireless Communications: IR for Wireless Connectivity (CRC Press, 2008).
[CrossRef]

Suzuki, Y.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, IEEE Photonics Technol. Lett. 16, 1676 (2004).
[CrossRef]

Talneau, A.

Tokmakoff, A.

C. J. Fecko, J. D. Eaves, J. J. Loparo, A. Tokmakoff, and P. L. Geissler, Science 301, 1698 (2003).
[CrossRef] [PubMed]

von Hofsten, O.

M. Lindblom, J. Reinspach, O. von Hofsten, M. Bertilson, H. M. Hertz, and A. Holmberg, J. Vac. Sci. Technol. B 27, L1 (2009).
[CrossRef]

Wang, S. S.

Wu, Z.

Zavadskii, Yu. I.

Zhan, Q.

Zhou, Y.

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, Nat. Photon. 1, 119 (2007).
[CrossRef]

Appl. Opt.

Appl. Phys. Lett.

T.-P. Ngo, M. El Kurdi, X. Checoury, P. Boucaud, J. F. Damlencourt, O. Kermarrec, and D. Bensahel, Appl. Phys. Lett. 93, 241112 (2008).
[CrossRef]

IEEE Photonics Technol. Lett.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, IEEE Photonics Technol. Lett. 16, 1676 (2004).
[CrossRef]

J. Non-Cryst. Solids

K. Kobayashi, J. Non-Cryst. Solids 316, 403 (2003).
[CrossRef]

J. Opt. Soc. Am.

J. Opt. Technol.

J. Vac. Sci. Technol. B

M. Lindblom, J. Reinspach, O. von Hofsten, M. Bertilson, H. M. Hertz, and A. Holmberg, J. Vac. Sci. Technol. B 27, L1 (2009).
[CrossRef]

Nat. Photon.

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, Nat. Photon. 1, 119 (2007).
[CrossRef]

Opt. Express

Opt. Lett.

Proc. SPIE

B. J. Frey, D. B. Leviton, and T. J. Madison, Proc. SPIE 6273, 62732J (2006).
[CrossRef]

Science

C. J. Fecko, J. D. Eaves, J. J. Loparo, A. Tokmakoff, and P. L. Geissler, Science 301, 1698 (2003).
[CrossRef] [PubMed]

Other

R. Ramirez-Iniguez, S. M. Idrus, and Z. Sun, Optical Wireless Communications: IR for Wireless Connectivity (CRC Press, 2008).
[CrossRef]

D. R. Lide, in CRC Handbook of Chemistry and Physics, 90th ed., Internet Version (CRC Press, 2010).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (3)

Fig. 1
Fig. 1

Simulation of the reflectance of the GMR mirror design. Period of the grating design is fixed to 1.0 μm . (a) Effect of changing the fill factor. The thickness of Ge layer is fixed to 550 nm . (b) Effect of Ge film thickness. Fill factor is fixed to 0.72. Dashed lines represent the reflectivity with the optimal operation conditions.

Fig. 2
Fig. 2

(a) Ge grating on a fused silica wafer with a 1 μm period and a 285 nm groove width imaged from above. (b) Cross section of the Ge grating on a Si reference wafer. The Ge layer is 557 nm thick, and the residual SiNx etch mask layer is 35 nm thick. The Si wafer was used in a reference sample to enable good cross-section quality for inspection of the etching profile.

Fig. 3
Fig. 3

Measured (solid curves) and simulated (dotted curves) reflection spectra of the Ge mirror for TM and TE polarization. The mirror was designed for TM po larization (“SIM TM OPT”). The spectra (“TM” and “TE”) were derived from transmission measurements with an IR- spectrophotometer. “SIM TM” and “SIM TE” spectra represent simulated reflectivities for the measured sample with the real ized dimensions.

Metrics