Abstract

We propose a photolithographic method to fabricate nanostructures by employing a localized surface plasmon (LSP) mask generated by a soft mold on a thin metal film. The soft mold can be formed by transparent materials, such as polydimethylsiloxane, contacting firmly to the metal film. The pattern edges of the mold, serving as the fine tapers, can be used to excite LSPs and accumulate a large amount of localized energy from the incident light field, providing a modulated optical field in the resist with nanometer feature size. Nanolithographic results with a minimum feature size of 30nm are demonstrated.

© 2010 Optical Society of America

Full Article  |  PDF Article
More Like This
Resolution and stability analysis of localized surface plasmon lithography on the geometrical parameters of soft mold

Yukun Zhang, Jinglei Du, Xingzhan Wei, Lifang Shi, Qiling Deng, Xiaochun Dong, and Chunlei Du
Appl. Opt. 50(13) 1963-1967 (2011)

Localized surface plasmon nanolithography with ultrahigh resolution

Xingzhan Wei, Xiangang Luo, Xiaochun Dong, and Chunlei Du
Opt. Express 15(21) 14177-14183 (2007)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics