A microscale acoustic resonator fabricated on a standard single-mode fiber tip was demonstrated as a hydrogen sensor. The fabrication of the resonator involved standard fiber cleaving and splicing, radio frequency sputtering, focused-ion-beam patterning and deposition, and wet etching. A submicrometer layer of platinum was coated on the vibration arms of the resonator serving as a catalytic heater upon hydrogen exposure. The heat locally raised the resonator temperature, which led to an acoustic resonance frequency shift. The sensor’s resonance frequency at shifted upon exposure to 1% hydrogen concentration; the sensitivity of the sensor was estimated to be better than 0.1%.
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