Abstract

A cavity-resonator-integrated grating input/output coupler (CRIGIC) is designed to operate at about $850\mathrm{nm}$ wavelength for high-efficiency vertical coupling of a guided wave and a free-space wave with a small aperture. The CRIGIC consists of a grating coupler and a waveguide cavity resonator constructed by two distributed Bragg reflectors. A coupling efficiency of 96% with a $3\mathrm{dB}$ bandwidth of $1.2\mathrm{nm}$ is predicted by a theoretical calculation. An output coupling efficiency of about 60% is experimentally demonstrated on a $20\mathrm{\mu m}$ aperture device, fabricated in a thin-film $\mathrm{Si}{\mathrm{O}}_2$-based waveguide on a substrate with an Au reflection layer, for what we believe to be the first time.

© 2010 Optical Society of America

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