Abstract

Reported is femtosecond laser direct patterning of sensing materials toward flexible integration of micronanosensors (FIMS), meaning the capability to fabricate multiple functional sensors of smaller size on a nonflat surface of a substrate that is not limited to silicon. As a representative example, a photosensitive SnO2 colloidal solution (sol) was developed, from which complex micronanostructures were written via a two-photon absorption process. After thermal decomposition of organic components, the patterned SnO2 microsensors responded to relative humidity (RH) with a variation range of 5 orders of magnitude. FIMS would open a new door for miniaturization of micronanosensors expected in intelligent microsystems.

© 2010 Optical Society of America

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