Abstract

Using a KBe2BO3F2 prism-coupled device, we have realized the high-average-power output in the wide range from 170to232.5nm by second-harmonic generation of a frequency-doubled Ti:sapphire laser. The output power in the UV from 175to232.5nm exceeds 2mW, the highest power being 119.8mW at 202.5nm. Moreover, tunable output powers above 100mW have also been obtained for deep-UV light from 193.5to200nm.

© 2009 Optical Society of America

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