Abstract

In this Letter, a near-field optical excitation of gap modes in a metal particle-surface system for patterning periodic nanostructure is proposed and numerically demonstrated using the finite-difference time-domain method. It is observed that high-density sub-30nm periodic structures were achievable by employing an aluminium nanosphere-silver surface system. A 2D resist profile cross section using the modified cellular automata model, which was obtained through this proposed configuration, is also presented.

© 2009 Optical Society of America

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References

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  1. J. Jersch and K. Dickmann, Appl. Phys. Lett. 68, 868 (1996).
    [CrossRef]
  2. J. K. Chua, V. M. Murukeshan, S. K. Tan, and Q. Y. Lin, Opt. Express 15, 3437 (2007).
    [CrossRef] [PubMed]
  3. X. Guo, J. Du, Y. Guo, and J. Yao, Opt. Lett. 31, 2613 (2006).
    [CrossRef] [PubMed]
  4. X. Luo and T. Ishihara, Appl. Phys. Lett. 84, 4780 (2004).
    [CrossRef]
  5. X. Luo and T. Ishihara, Opt. Express 12, 3055 (2004).
    [CrossRef] [PubMed]
  6. L. L. Doskolovich, E. A. Kadomina, and I. I. Kadomin, J. Opt. A, Pure Appl. Opt. 9, 854 (2007).
    [CrossRef]
  7. T. Xu, Y. Zhao, J. Ma, C. Wang, J. Cui, C. Du, and X. Luo, Opt. Express 16, 13579 (2008).
    [CrossRef] [PubMed]
  8. A. Adams and P. K. Hansma, Phys. Rev. B 23, 3597 (1981).
    [CrossRef]
  9. R. W. Rendell and D. J. Scalapino, Phys. Rev. B 24, 3276 (1981).
    [CrossRef]
  10. S. Kawata, Near-field Optics and Surface Plasmon Polaritone (Springer, 2001).
    [CrossRef]
  11. E. D. Palik, Handbook of Optical Constants of Solids (Academic, 1985).
  12. I. Karafyllidis, Modell. Simul. Mater. Sci. Eng. 7, 157 (1999).
    [CrossRef]

2008 (1)

2007 (2)

L. L. Doskolovich, E. A. Kadomina, and I. I. Kadomin, J. Opt. A, Pure Appl. Opt. 9, 854 (2007).
[CrossRef]

J. K. Chua, V. M. Murukeshan, S. K. Tan, and Q. Y. Lin, Opt. Express 15, 3437 (2007).
[CrossRef] [PubMed]

2006 (1)

2004 (2)

X. Luo and T. Ishihara, Opt. Express 12, 3055 (2004).
[CrossRef] [PubMed]

X. Luo and T. Ishihara, Appl. Phys. Lett. 84, 4780 (2004).
[CrossRef]

1999 (1)

I. Karafyllidis, Modell. Simul. Mater. Sci. Eng. 7, 157 (1999).
[CrossRef]

1996 (1)

J. Jersch and K. Dickmann, Appl. Phys. Lett. 68, 868 (1996).
[CrossRef]

1981 (2)

A. Adams and P. K. Hansma, Phys. Rev. B 23, 3597 (1981).
[CrossRef]

R. W. Rendell and D. J. Scalapino, Phys. Rev. B 24, 3276 (1981).
[CrossRef]

Adams, A.

A. Adams and P. K. Hansma, Phys. Rev. B 23, 3597 (1981).
[CrossRef]

Chua, J. K.

Cui, J.

Dickmann, K.

J. Jersch and K. Dickmann, Appl. Phys. Lett. 68, 868 (1996).
[CrossRef]

Doskolovich, L. L.

L. L. Doskolovich, E. A. Kadomina, and I. I. Kadomin, J. Opt. A, Pure Appl. Opt. 9, 854 (2007).
[CrossRef]

Du, C.

Du, J.

Guo, X.

Guo, Y.

Hansma, P. K.

A. Adams and P. K. Hansma, Phys. Rev. B 23, 3597 (1981).
[CrossRef]

Ishihara, T.

X. Luo and T. Ishihara, Appl. Phys. Lett. 84, 4780 (2004).
[CrossRef]

X. Luo and T. Ishihara, Opt. Express 12, 3055 (2004).
[CrossRef] [PubMed]

Jersch, J.

J. Jersch and K. Dickmann, Appl. Phys. Lett. 68, 868 (1996).
[CrossRef]

Kadomin, I. I.

L. L. Doskolovich, E. A. Kadomina, and I. I. Kadomin, J. Opt. A, Pure Appl. Opt. 9, 854 (2007).
[CrossRef]

Kadomina, E. A.

L. L. Doskolovich, E. A. Kadomina, and I. I. Kadomin, J. Opt. A, Pure Appl. Opt. 9, 854 (2007).
[CrossRef]

Karafyllidis, I.

I. Karafyllidis, Modell. Simul. Mater. Sci. Eng. 7, 157 (1999).
[CrossRef]

Kawata, S.

S. Kawata, Near-field Optics and Surface Plasmon Polaritone (Springer, 2001).
[CrossRef]

Lin, Q. Y.

Luo, X.

Ma, J.

Murukeshan, V. M.

Palik, E. D.

E. D. Palik, Handbook of Optical Constants of Solids (Academic, 1985).

Rendell, R. W.

R. W. Rendell and D. J. Scalapino, Phys. Rev. B 24, 3276 (1981).
[CrossRef]

Scalapino, D. J.

R. W. Rendell and D. J. Scalapino, Phys. Rev. B 24, 3276 (1981).
[CrossRef]

Tan, S. K.

Wang, C.

Xu, T.

Yao, J.

Zhao, Y.

Appl. Phys. Lett. (2)

J. Jersch and K. Dickmann, Appl. Phys. Lett. 68, 868 (1996).
[CrossRef]

X. Luo and T. Ishihara, Appl. Phys. Lett. 84, 4780 (2004).
[CrossRef]

J. Opt. A, Pure Appl. Opt. (1)

L. L. Doskolovich, E. A. Kadomina, and I. I. Kadomin, J. Opt. A, Pure Appl. Opt. 9, 854 (2007).
[CrossRef]

Modell. Simul. Mater. Sci. Eng. (1)

I. Karafyllidis, Modell. Simul. Mater. Sci. Eng. 7, 157 (1999).
[CrossRef]

Opt. Express (3)

Opt. Lett. (1)

Phys. Rev. B (2)

A. Adams and P. K. Hansma, Phys. Rev. B 23, 3597 (1981).
[CrossRef]

R. W. Rendell and D. J. Scalapino, Phys. Rev. B 24, 3276 (1981).
[CrossRef]

Other (2)

S. Kawata, Near-field Optics and Surface Plasmon Polaritone (Springer, 2001).
[CrossRef]

E. D. Palik, Handbook of Optical Constants of Solids (Academic, 1985).

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Figures (5)

Fig. 1
Fig. 1

Schematic diagram of the proposed configuration.

Fig. 2
Fig. 2

Electric field distribution of the interference pattern generated on the photoresist layer. (a) E x , (b) E y of proposed configuration and (c) E x , (d) E y of prism-based configuration.

Fig. 3
Fig. 3

Normalized intensity variation as a function of decay direction.

Fig. 4
Fig. 4

Variation of normalized intensity (a) with metal particle-surface distance ( D ) calculated at origin and (b) with dielectric thickness at 50 nm on the photoresist layer.

Fig. 5
Fig. 5

2D resist profile cross section at exposure times (a) 100 s and (b) 150 s .

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