Abstract

In this Letter, a near-field optical excitation of gap modes in a metal particle-surface system for patterning periodic nanostructure is proposed and numerically demonstrated using the finite-difference time-domain method. It is observed that high-density sub-30 nm periodic structures were achievable by employing an aluminium nanosphere-silver surface system. A 2D resist profile cross section using the modified cellular automata model, which was obtained through this proposed configuration, is also presented.

© 2009 Optical Society of America

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  1. J. Jersch and K. Dickmann, Appl. Phys. Lett. 68, 868 (1996).
    [CrossRef]
  2. J. K. Chua, V. M. Murukeshan, S. K. Tan, and Q. Y. Lin, Opt. Express 15, 3437 (2007).
    [CrossRef]
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    [CrossRef]
  4. X. Luo and T. Ishihara, Appl. Phys. Lett. 84, 4780 (2004).
    [CrossRef]
  5. X. Luo and T. Ishihara, Opt. Express 12, 3055 (2004).
    [CrossRef]
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    [CrossRef]
  7. T. Xu, Y. Zhao, J. Ma, C. Wang, J. Cui, C. Du, and X. Luo, Opt. Express 16, 13579 (2008).
    [CrossRef]
  8. A. Adams and P. K. Hansma, Phys. Rev. B 23, 3597 (1981).
    [CrossRef]
  9. R. W. Rendell and D. J. Scalapino, Phys. Rev. B 24, 3276 (1981).
    [CrossRef]
  10. S. Kawata, Near-field Optics and Surface Plasmon Polaritone (Springer, 2001).
  11. E. D. Palik, Handbook of Optical Constants of Solids (Academic, 1985).
  12. I. Karafyllidis, Modell. Simul. Mater. Sci. Eng. 7, 157 (1999).
    [CrossRef]

2008 (1)

2007 (2)

L. L. Doskolovich, E. A. Kadomina, and I. I. Kadomin, J. Opt. A, Pure Appl. Opt. 9, 854 (2007).
[CrossRef]

J. K. Chua, V. M. Murukeshan, S. K. Tan, and Q. Y. Lin, Opt. Express 15, 3437 (2007).
[CrossRef]

2006 (1)

2004 (2)

X. Luo and T. Ishihara, Opt. Express 12, 3055 (2004).
[CrossRef]

X. Luo and T. Ishihara, Appl. Phys. Lett. 84, 4780 (2004).
[CrossRef]

1999 (1)

I. Karafyllidis, Modell. Simul. Mater. Sci. Eng. 7, 157 (1999).
[CrossRef]

1996 (1)

J. Jersch and K. Dickmann, Appl. Phys. Lett. 68, 868 (1996).
[CrossRef]

1981 (2)

A. Adams and P. K. Hansma, Phys. Rev. B 23, 3597 (1981).
[CrossRef]

R. W. Rendell and D. J. Scalapino, Phys. Rev. B 24, 3276 (1981).
[CrossRef]

Adams, A.

A. Adams and P. K. Hansma, Phys. Rev. B 23, 3597 (1981).
[CrossRef]

Chua, J. K.

Cui, J.

Dickmann, K.

J. Jersch and K. Dickmann, Appl. Phys. Lett. 68, 868 (1996).
[CrossRef]

Doskolovich, L. L.

L. L. Doskolovich, E. A. Kadomina, and I. I. Kadomin, J. Opt. A, Pure Appl. Opt. 9, 854 (2007).
[CrossRef]

Du, C.

Du, J.

Guo, X.

Guo, Y.

Hansma, P. K.

A. Adams and P. K. Hansma, Phys. Rev. B 23, 3597 (1981).
[CrossRef]

Ishihara, T.

X. Luo and T. Ishihara, Appl. Phys. Lett. 84, 4780 (2004).
[CrossRef]

X. Luo and T. Ishihara, Opt. Express 12, 3055 (2004).
[CrossRef]

Jersch, J.

J. Jersch and K. Dickmann, Appl. Phys. Lett. 68, 868 (1996).
[CrossRef]

Kadomin, I. I.

L. L. Doskolovich, E. A. Kadomina, and I. I. Kadomin, J. Opt. A, Pure Appl. Opt. 9, 854 (2007).
[CrossRef]

Kadomina, E. A.

L. L. Doskolovich, E. A. Kadomina, and I. I. Kadomin, J. Opt. A, Pure Appl. Opt. 9, 854 (2007).
[CrossRef]

Karafyllidis, I.

I. Karafyllidis, Modell. Simul. Mater. Sci. Eng. 7, 157 (1999).
[CrossRef]

Kawata, S.

S. Kawata, Near-field Optics and Surface Plasmon Polaritone (Springer, 2001).

Lin, Q. Y.

Luo, X.

Ma, J.

Murukeshan, V. M.

Palik, E. D.

E. D. Palik, Handbook of Optical Constants of Solids (Academic, 1985).

Rendell, R. W.

R. W. Rendell and D. J. Scalapino, Phys. Rev. B 24, 3276 (1981).
[CrossRef]

Scalapino, D. J.

R. W. Rendell and D. J. Scalapino, Phys. Rev. B 24, 3276 (1981).
[CrossRef]

Tan, S. K.

Wang, C.

Xu, T.

Yao, J.

Zhao, Y.

Appl. Phys. Lett. (2)

J. Jersch and K. Dickmann, Appl. Phys. Lett. 68, 868 (1996).
[CrossRef]

X. Luo and T. Ishihara, Appl. Phys. Lett. 84, 4780 (2004).
[CrossRef]

J. Opt. A, Pure Appl. Opt. (1)

L. L. Doskolovich, E. A. Kadomina, and I. I. Kadomin, J. Opt. A, Pure Appl. Opt. 9, 854 (2007).
[CrossRef]

Modell. Simul. Mater. Sci. Eng. (1)

I. Karafyllidis, Modell. Simul. Mater. Sci. Eng. 7, 157 (1999).
[CrossRef]

Opt. Express (3)

Opt. Lett. (1)

Phys. Rev. B (2)

A. Adams and P. K. Hansma, Phys. Rev. B 23, 3597 (1981).
[CrossRef]

R. W. Rendell and D. J. Scalapino, Phys. Rev. B 24, 3276 (1981).
[CrossRef]

Other (2)

S. Kawata, Near-field Optics and Surface Plasmon Polaritone (Springer, 2001).

E. D. Palik, Handbook of Optical Constants of Solids (Academic, 1985).

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