Abstract

Diffraction gratings used in extreme UV are typically coated with periodic multilayer thin films. These coatings have a small bandwidth, thus leading to a narrow usable spectral region of multilayer gratings. Well-designed aperiodic multilayer coatings could provide high reflectivity over a much broader wavelength region, so they could broaden the usable spectral region of multilayer gratings. We designed and deposited an aperiodic MoSi multilayer coating onto a blazed grating substrate. At an incidence angle of 10°, the –2nd-order diffraction efficiency of the multilayer grating is 10% through the wavelength range of 1316nm.

© 2009 Optical Society of America

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