Abstract

Diffraction gratings used in extreme UV are typically coated with periodic multilayer thin films. These coatings have a small bandwidth, thus leading to a narrow usable spectral region of multilayer gratings. Well-designed aperiodic multilayer coatings could provide high reflectivity over a much broader wavelength region, so they could broaden the usable spectral region of multilayer gratings. We designed and deposited an aperiodic MoSi multilayer coating onto a blazed grating substrate. At an incidence angle of 10°, the –2nd-order diffraction efficiency of the multilayer grating is 10% through the wavelength range of 1316nm.

© 2009 Optical Society of America

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References

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  1. M. P. Kowalski, R. G. Cruddace, J. F. Seely, J. C. Rife, K. F. Heidemann, U. Kleineberg, K. Osterried, D. Menke, and W. R. Hunter, Opt. Lett. 22, 834 (1997).
    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
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2008 (2)

2006 (2)

2004 (1)

M. P. Kowalski, R. G. Cruddace, T. W. Barbee, Jr., W. R. Hunter, K. F. Heidemann, B. Nelles, R. Lenke, and H. Kierey, Proc. SPIE 5488, 910 (2004).
[CrossRef]

2003 (1)

S. Yulin, T. Kuhlmann, T. Feigl, and N. Kaiser, Proc. SPIE 5037, 286 (2003).
[CrossRef]

2001 (2)

I. V. Kozhevnikov, I. N. Bukreeva, and E. Ziegler, Nucl. Instrum. Methods Phys. Res. A 460, 424 (2001).
[CrossRef]

S. Bajt, D. G. Stearns, and P. Kearney, J. Appl. Phys. 90, 1017 (2001).
[CrossRef]

2000 (2)

J. F. Seely, Proc. SPIE 4138, 174 (2000).
[CrossRef]

Z. Wang and A. G. Michette, J. Opt. A 2, 452 (2000).
[CrossRef]

1998 (1)

1997 (2)

1991 (1)

1990 (1)

D. G. Stearns, M. B. Stearns, Y. Cheng, J. Stith, and N. M. Ceglio, J. Appl. Phys. 67, 2415 (1990).
[CrossRef]

1985 (1)

B. Vidal, P. Vincent, P. Dhez, and M. Nevière, Proc. SPIE 563, 142 (1985).

Aquila, A.

Bajt, S.

S. Bajt, D. G. Stearns, and P. Kearney, J. Appl. Phys. 90, 1017 (2001).
[CrossRef]

Barbee, T. W.

M. P. Kowalski, W. R. Hunter, and T. W. Barbee, Jr., Appl. Opt. 45, 305 (2006).
[CrossRef] [PubMed]

M. P. Kowalski, R. G. Cruddace, T. W. Barbee, Jr., W. R. Hunter, K. F. Heidemann, B. Nelles, R. Lenke, and H. Kierey, Proc. SPIE 5488, 910 (2004).
[CrossRef]

Bukreeva, I. N.

I. V. Kozhevnikov, I. N. Bukreeva, and E. Ziegler, Nucl. Instrum. Methods Phys. Res. A 460, 424 (2001).
[CrossRef]

Ceglio, N. M.

D. G. Stearns, M. B. Stearns, Y. Cheng, J. Stith, and N. M. Ceglio, J. Appl. Phys. 67, 2415 (1990).
[CrossRef]

Cheng, Y.

D. G. Stearns, M. B. Stearns, Y. Cheng, J. Stith, and N. M. Ceglio, J. Appl. Phys. 67, 2415 (1990).
[CrossRef]

Cruddace, R. G.

M. P. Kowalski, R. G. Cruddace, T. W. Barbee, Jr., W. R. Hunter, K. F. Heidemann, B. Nelles, R. Lenke, and H. Kierey, Proc. SPIE 5488, 910 (2004).
[CrossRef]

M. P. Kowalski, R. G. Cruddace, J. F. Seely, J. C. Rife, K. F. Heidemann, U. Kleineberg, K. Osterried, D. Menke, and W. R. Hunter, Opt. Lett. 22, 834 (1997).
[CrossRef] [PubMed]

Dhez, P.

B. Vidal, P. Vincent, P. Dhez, and M. Nevière, Proc. SPIE 563, 142 (1985).

Dollar, F.

Feigl, T.

S. Yulin, T. Kuhlmann, T. Feigl, and N. Kaiser, Proc. SPIE 5037, 286 (2003).
[CrossRef]

Gullikson, E. M.

Heidemann, K. F.

M. P. Kowalski, R. G. Cruddace, T. W. Barbee, Jr., W. R. Hunter, K. F. Heidemann, B. Nelles, R. Lenke, and H. Kierey, Proc. SPIE 5488, 910 (2004).
[CrossRef]

M. P. Kowalski, R. G. Cruddace, J. F. Seely, J. C. Rife, K. F. Heidemann, U. Kleineberg, K. Osterried, D. Menke, and W. R. Hunter, Opt. Lett. 22, 834 (1997).
[CrossRef] [PubMed]

Hunter, W. R.

Huo, T.

H. Lin, L. Zhang, L. Li, C. Jin, H. Zhou, and T. Huo, Opt. Lett. 33, 485 (2008).
[CrossRef] [PubMed]

H. Lin, L. Zhang, C. Jin, H. Zhou, and T. Huo, “Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for the extreme-ultraviolet region,” Chin. Opt. Lett. (to be published).

Jin, C.

H. Lin, L. Zhang, L. Li, C. Jin, H. Zhou, and T. Huo, Opt. Lett. 33, 485 (2008).
[CrossRef] [PubMed]

H. Lin, L. Zhang, C. Jin, H. Zhou, and T. Huo, “Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for the extreme-ultraviolet region,” Chin. Opt. Lett. (to be published).

Kaiser, N.

S. Yulin, T. Kuhlmann, T. Feigl, and N. Kaiser, Proc. SPIE 5037, 286 (2003).
[CrossRef]

Kearney, P.

S. Bajt, D. G. Stearns, and P. Kearney, J. Appl. Phys. 90, 1017 (2001).
[CrossRef]

Kierey, H.

M. P. Kowalski, R. G. Cruddace, T. W. Barbee, Jr., W. R. Hunter, K. F. Heidemann, B. Nelles, R. Lenke, and H. Kierey, Proc. SPIE 5488, 910 (2004).
[CrossRef]

Kleineberg, U.

Kowalski, M. P.

Kozhevnikov, I. V.

I. V. Kozhevnikov, I. N. Bukreeva, and E. Ziegler, Nucl. Instrum. Methods Phys. Res. A 460, 424 (2001).
[CrossRef]

Kuhlmann, T.

S. Yulin, T. Kuhlmann, T. Feigl, and N. Kaiser, Proc. SPIE 5037, 286 (2003).
[CrossRef]

Lenke, R.

M. P. Kowalski, R. G. Cruddace, T. W. Barbee, Jr., W. R. Hunter, K. F. Heidemann, B. Nelles, R. Lenke, and H. Kierey, Proc. SPIE 5488, 910 (2004).
[CrossRef]

Li, L.

Lin, H.

H. Lin and L. Li, Appl. Opt. 47, 6212 (2008).
[CrossRef] [PubMed]

H. Lin, L. Zhang, L. Li, C. Jin, H. Zhou, and T. Huo, Opt. Lett. 33, 485 (2008).
[CrossRef] [PubMed]

H. Lin, L. Zhang, C. Jin, H. Zhou, and T. Huo, “Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for the extreme-ultraviolet region,” Chin. Opt. Lett. (to be published).

Liu, Y.

Menke, D.

Michette, A. G.

Z. Wang and A. G. Michette, J. Opt. A 2, 452 (2000).
[CrossRef]

Nelles, B.

M. P. Kowalski, R. G. Cruddace, T. W. Barbee, Jr., W. R. Hunter, K. F. Heidemann, B. Nelles, R. Lenke, and H. Kierey, Proc. SPIE 5488, 910 (2004).
[CrossRef]

Nevière, M.

M. Nevière, J. Opt. Soc. Am. A 8, 1468 (1991).
[CrossRef]

B. Vidal, P. Vincent, P. Dhez, and M. Nevière, Proc. SPIE 563, 142 (1985).

Osterried, K.

Rife, J. C.

Salmassi, F.

Seely, J. F.

Soufli, R.

Stearns, D. G.

S. Bajt, D. G. Stearns, and P. Kearney, J. Appl. Phys. 90, 1017 (2001).
[CrossRef]

D. G. Stearns, M. B. Stearns, Y. Cheng, J. Stith, and N. M. Ceglio, J. Appl. Phys. 67, 2415 (1990).
[CrossRef]

Stearns, M. B.

D. G. Stearns, M. B. Stearns, Y. Cheng, J. Stith, and N. M. Ceglio, J. Appl. Phys. 67, 2415 (1990).
[CrossRef]

Stith, J.

D. G. Stearns, M. B. Stearns, Y. Cheng, J. Stith, and N. M. Ceglio, J. Appl. Phys. 67, 2415 (1990).
[CrossRef]

Vidal, B.

B. Vidal, P. Vincent, P. Dhez, and M. Nevière, Proc. SPIE 563, 142 (1985).

Vincent, P.

B. Vidal, P. Vincent, P. Dhez, and M. Nevière, Proc. SPIE 563, 142 (1985).

Wang, Z.

Z. Wang and A. G. Michette, J. Opt. A 2, 452 (2000).
[CrossRef]

Yulin, S.

S. Yulin, T. Kuhlmann, T. Feigl, and N. Kaiser, Proc. SPIE 5037, 286 (2003).
[CrossRef]

Zhang, L.

H. Lin, L. Zhang, L. Li, C. Jin, H. Zhou, and T. Huo, Opt. Lett. 33, 485 (2008).
[CrossRef] [PubMed]

H. Lin, L. Zhang, C. Jin, H. Zhou, and T. Huo, “Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for the extreme-ultraviolet region,” Chin. Opt. Lett. (to be published).

Zhou, H.

H. Lin, L. Zhang, L. Li, C. Jin, H. Zhou, and T. Huo, Opt. Lett. 33, 485 (2008).
[CrossRef] [PubMed]

H. Lin, L. Zhang, C. Jin, H. Zhou, and T. Huo, “Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for the extreme-ultraviolet region,” Chin. Opt. Lett. (to be published).

Ziegler, E.

I. V. Kozhevnikov, I. N. Bukreeva, and E. Ziegler, Nucl. Instrum. Methods Phys. Res. A 460, 424 (2001).
[CrossRef]

Appl. Opt. (4)

J. Appl. Phys. (2)

D. G. Stearns, M. B. Stearns, Y. Cheng, J. Stith, and N. M. Ceglio, J. Appl. Phys. 67, 2415 (1990).
[CrossRef]

S. Bajt, D. G. Stearns, and P. Kearney, J. Appl. Phys. 90, 1017 (2001).
[CrossRef]

J. Opt. A (1)

Z. Wang and A. G. Michette, J. Opt. A 2, 452 (2000).
[CrossRef]

J. Opt. Soc. Am. A (1)

Nucl. Instrum. Methods Phys. Res. A (1)

I. V. Kozhevnikov, I. N. Bukreeva, and E. Ziegler, Nucl. Instrum. Methods Phys. Res. A 460, 424 (2001).
[CrossRef]

Opt. Express (1)

Opt. Lett. (2)

Proc. SPIE (4)

B. Vidal, P. Vincent, P. Dhez, and M. Nevière, Proc. SPIE 563, 142 (1985).

J. F. Seely, Proc. SPIE 4138, 174 (2000).
[CrossRef]

S. Yulin, T. Kuhlmann, T. Feigl, and N. Kaiser, Proc. SPIE 5037, 286 (2003).
[CrossRef]

M. P. Kowalski, R. G. Cruddace, T. W. Barbee, Jr., W. R. Hunter, K. F. Heidemann, B. Nelles, R. Lenke, and H. Kierey, Proc. SPIE 5488, 910 (2004).
[CrossRef]

Other (1)

H. Lin, L. Zhang, C. Jin, H. Zhou, and T. Huo, “Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for the extreme-ultraviolet region,” Chin. Opt. Lett. (to be published).

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Figures (3)

Fig. 1
Fig. 1

Calculated reflectivity of multilayer coating (empty triangles) with the structure in Table 1, calculated groove efficiency of the grating substrate (filled circles) using blaze and antiblaze angles deduced from AFM results, calculated –2nd-order diffraction efficiency of the aperiodic multilayer grating at an incidence angle of 10° (filled squares).

Fig. 2
Fig. 2

Measured reflectivity (filled triangles) of the aperiodic multilayer coating and measured –2nd-order diffraction efficiency (empty triangles) of the aperiodic multilayer grating at an incidence angle of 10°, measured reflectivity (filled squares) of the periodic multilayer coating and measured –2nd-order diffraction efficiency (empty squares) of the periodic multilayer grating at an incidence angle of 10°.

Fig. 3
Fig. 3

Measured (filled squares) and calculated (empty triangles) reflectivity of the aperiodic multilayer coating using the actual coating structure, measured (filled circles) and calculated (empty squares) –2nd-order diffraction efficiencies of the aperiodic multilayer grating at an incidence angle of 10° with the actual coating structure and the blaze and antiblaze angles deduced from AFM results.

Tables (1)

Tables Icon

Table 1 Multilayer Coating Structure a

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