Abstract

We present a single-photodetector-based hyperspectral imaging system that utilizes a microelectrical-mechanical-systems-driven diffraction grating for fast spatial scanning and two synchronized steering mirrors for slow spectral scanning. This configuration allows high-speed scanning without degradation in optical performance resulting from dynamic non-rigid-body deformation of the platform. The proposed operational principle is demonstrated with a prototype device developed using silicon microfabrication technology. The proposed spectral imaging system has the potential to achieve low cost, small form factor, and high-speed operation.

© 2009 Optical Society of America

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