Abstract

We fabricated a terahertz wire-grid polarizer consisting of a micrometer-pitch Al grating on a Si substrate by photolithography and wet etching. The ratio of TM and TE transmittances (extinction ratio) was over 35dB at 0.5THz. At the Brewster angle of the Si substrate, the polarization transmittance of a TM wave through the fabricated polarizer exceeded 95% and the extinction ratio was over 45dB at 1THz. The fabricated polarizer has a higher extinction ratio than conventional free-standing terahertz wire-grid polarizers.

© 2009 Optical Society of America

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2007 (1)

V. S. Cherkassky, B. A. Knyazev, G. N. Kulipanov, A. N. Matveenko, P. D. Rudych, and N. A. Vinokurov, Int. J. Infrared Millim. Waves 28, 219 (2007).
[CrossRef]

2005 (1)

M. Hangyo, M. Tani, and T. Nagashima, Int. J. Infrared Millim. Waves 26, 1661 (2005).
[CrossRef]

2003 (1)

T. Kondo, T. Nagashima, and M. Hangyo, Jpn. J. Appl. Phys. Part 2 42, L373 (2003).
[CrossRef]

2001 (1)

T. Nagashima and M. Hangyo, Appl. Phys. Lett. 79, 3917 (2001).
[CrossRef]

1995 (1)

1990 (2)

E. Hecht, Optics (Addison-Wesley, 1990).

M. van Exter and D. Grischkowsky, Phys. Rev. B 41, 12140 (1990).
[CrossRef]

1986 (1)

1983 (2)

1979 (1)

P. A. R. Ade, A. E. Costley, C. T. Cunningham, C. L. Mok, G. F. Neill, and T. J. Parker, Infrared Phys. 19, 599 (1979).
[CrossRef]

1977 (1)

1976 (1)

C. J. Smithells, Metal Reference Book, 5th ed. (Butterworths, 1976).

Ade, P. A. R.

P. A. R. Ade, A. E. Costley, C. T. Cunningham, C. L. Mok, G. F. Neill, and T. J. Parker, Infrared Phys. 19, 599 (1979).
[CrossRef]

Alexander, R. W.

Bell, R. J.

Bell, R. R.

Bell, S. E.

Cherkassky, V. S.

V. S. Cherkassky, B. A. Knyazev, G. N. Kulipanov, A. N. Matveenko, P. D. Rudych, and N. A. Vinokurov, Int. J. Infrared Millim. Waves 28, 219 (2007).
[CrossRef]

Costley, A. E.

P. A. R. Ade, A. E. Costley, C. T. Cunningham, C. L. Mok, G. F. Neill, and T. J. Parker, Infrared Phys. 19, 599 (1979).
[CrossRef]

A. E. Costley, K. H. Hursey, G. F. Neill, and J. M. Wald, J. Opt. Soc. Am. 67, 979 (1977).
[CrossRef]

Cunningham, C. T.

P. A. R. Ade, A. E. Costley, C. T. Cunningham, C. L. Mok, G. F. Neill, and T. J. Parker, Infrared Phys. 19, 599 (1979).
[CrossRef]

Gaylord, T. K.

Grischkowsky, D.

M. van Exter and D. Grischkowsky, Phys. Rev. B 41, 12140 (1990).
[CrossRef]

Hangyo, M.

M. Hangyo, M. Tani, and T. Nagashima, Int. J. Infrared Millim. Waves 26, 1661 (2005).
[CrossRef]

T. Kondo, T. Nagashima, and M. Hangyo, Jpn. J. Appl. Phys. Part 2 42, L373 (2003).
[CrossRef]

T. Nagashima and M. Hangyo, Appl. Phys. Lett. 79, 3917 (2001).
[CrossRef]

Hecht, E.

E. Hecht, Optics (Addison-Wesley, 1990).

Ho, I.

Hsieh, C.

Hsieh, C.-F.

Hu, B. B.

Hursey, K. H.

Knyazev, B. A.

V. S. Cherkassky, B. A. Knyazev, G. N. Kulipanov, A. N. Matveenko, P. D. Rudych, and N. A. Vinokurov, Int. J. Infrared Millim. Waves 28, 219 (2007).
[CrossRef]

Kondo, T.

T. Kondo, T. Nagashima, and M. Hangyo, Jpn. J. Appl. Phys. Part 2 42, L373 (2003).
[CrossRef]

Kulipanov, G. N.

V. S. Cherkassky, B. A. Knyazev, G. N. Kulipanov, A. N. Matveenko, P. D. Rudych, and N. A. Vinokurov, Int. J. Infrared Millim. Waves 28, 219 (2007).
[CrossRef]

Lai, Y.-C.

Li, Y.

Lin, C.

Long, L. L.

Matveenko, A. N.

V. S. Cherkassky, B. A. Knyazev, G. N. Kulipanov, A. N. Matveenko, P. D. Rudych, and N. A. Vinokurov, Int. J. Infrared Millim. Waves 28, 219 (2007).
[CrossRef]

Moharam, M. G.

Mok, C. L.

P. A. R. Ade, A. E. Costley, C. T. Cunningham, C. L. Mok, G. F. Neill, and T. J. Parker, Infrared Phys. 19, 599 (1979).
[CrossRef]

Nagashima, T.

M. Hangyo, M. Tani, and T. Nagashima, Int. J. Infrared Millim. Waves 26, 1661 (2005).
[CrossRef]

T. Kondo, T. Nagashima, and M. Hangyo, Jpn. J. Appl. Phys. Part 2 42, L373 (2003).
[CrossRef]

T. Nagashima and M. Hangyo, Appl. Phys. Lett. 79, 3917 (2001).
[CrossRef]

Neill, G. F.

P. A. R. Ade, A. E. Costley, C. T. Cunningham, C. L. Mok, G. F. Neill, and T. J. Parker, Infrared Phys. 19, 599 (1979).
[CrossRef]

A. E. Costley, K. H. Hursey, G. F. Neill, and J. M. Wald, J. Opt. Soc. Am. 67, 979 (1977).
[CrossRef]

Nuss, M. C.

Ordal, M. A.

Pan, C.

Pan, C.-L.

Pan, R.

Pan, R.-P.

Parker, T. J.

P. A. R. Ade, A. E. Costley, C. T. Cunningham, C. L. Mok, G. F. Neill, and T. J. Parker, Infrared Phys. 19, 599 (1979).
[CrossRef]

Rudych, P. D.

V. S. Cherkassky, B. A. Knyazev, G. N. Kulipanov, A. N. Matveenko, P. D. Rudych, and N. A. Vinokurov, Int. J. Infrared Millim. Waves 28, 219 (2007).
[CrossRef]

Smithells, C. J.

C. J. Smithells, Metal Reference Book, 5th ed. (Butterworths, 1976).

Tani, M.

M. Hangyo, M. Tani, and T. Nagashima, Int. J. Infrared Millim. Waves 26, 1661 (2005).
[CrossRef]

van Exter, M.

M. van Exter and D. Grischkowsky, Phys. Rev. B 41, 12140 (1990).
[CrossRef]

Vinokurov, N. A.

V. S. Cherkassky, B. A. Knyazev, G. N. Kulipanov, A. N. Matveenko, P. D. Rudych, and N. A. Vinokurov, Int. J. Infrared Millim. Waves 28, 219 (2007).
[CrossRef]

Wald, J. M.

Ward, C. A.

Appl. Opt. (1)

Appl. Phys. Lett. (1)

T. Nagashima and M. Hangyo, Appl. Phys. Lett. 79, 3917 (2001).
[CrossRef]

Infrared Phys. (1)

P. A. R. Ade, A. E. Costley, C. T. Cunningham, C. L. Mok, G. F. Neill, and T. J. Parker, Infrared Phys. 19, 599 (1979).
[CrossRef]

Int. J. Infrared Millim. Waves (2)

M. Hangyo, M. Tani, and T. Nagashima, Int. J. Infrared Millim. Waves 26, 1661 (2005).
[CrossRef]

V. S. Cherkassky, B. A. Knyazev, G. N. Kulipanov, A. N. Matveenko, P. D. Rudych, and N. A. Vinokurov, Int. J. Infrared Millim. Waves 28, 219 (2007).
[CrossRef]

J. Opt. Soc. Am. (2)

J. Opt. Soc. Am. A (1)

Jpn. J. Appl. Phys. Part 2 (1)

T. Kondo, T. Nagashima, and M. Hangyo, Jpn. J. Appl. Phys. Part 2 42, L373 (2003).
[CrossRef]

Opt. Express (1)

Opt. Lett. (3)

Phys. Rev. B (1)

M. van Exter and D. Grischkowsky, Phys. Rev. B 41, 12140 (1990).
[CrossRef]

Other (2)

C. J. Smithells, Metal Reference Book, 5th ed. (Butterworths, 1976).

E. Hecht, Optics (Addison-Wesley, 1990).

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Figures (5)

Fig. 1
Fig. 1

Wire-grid polarizer with Al grating.

Fig. 2
Fig. 2

Simulation results of TE and TM transmittances as a function of terahertz frequencies. (a) Simulation results of transmittance for Al gratings with different periods and a fill factor of 0.4. (b) Simulation results of transmittance for different fill factors. The numerals beside the curves denote the periods and fill factors.

Fig. 3
Fig. 3

Scanning electron micrograph of Al grating on Si substrate with thickness d W = 300 nm , period Λ = 3 μ m , and fill factor f 0.5 .

Fig. 4
Fig. 4

(a) Transmission spectra of the element. TE and TM indicate the polarization directions. (b) Extinction ratio.

Fig. 5
Fig. 5

(a) Transmission spectra. (b) Extinction ratio of the element at different incident angles. TE and TM indicate the polarization directions. The numerals next to the curves denote the incident angle.

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