Abstract

We fabricated a terahertz wire-grid polarizer consisting of a micrometer-pitch Al grating on a Si substrate by photolithography and wet etching. The ratio of TM and TE transmittances (extinction ratio) was over 35dB at 0.5THz. At the Brewster angle of the Si substrate, the polarization transmittance of a TM wave through the fabricated polarizer exceeded 95% and the extinction ratio was over 45dB at 1THz. The fabricated polarizer has a higher extinction ratio than conventional free-standing terahertz wire-grid polarizers.

© 2009 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. M. Hangyo, M. Tani, and T. Nagashima, Int. J. Infrared Millim. Waves 26, 1661 (2005).
    [CrossRef]
  2. M. van Exter and D. Grischkowsky, Phys. Rev. B 41, 12140 (1990).
    [CrossRef]
  3. B. B. Hu and M. C. Nuss, Opt. Lett. 20, 1716 (1995).
    [CrossRef] [PubMed]
  4. I. Ho, C. Pan, C. Hsieh, and R. Pan, Opt. Lett. 33, 1401 (2008).
    [CrossRef] [PubMed]
  5. C. Lin, Y. Li, C. Hsieh, R. Pan, and C. Pan, Opt. Express 16, 2995 (2008).
    [CrossRef] [PubMed]
  6. C.-F. Hsieh, Y.-C. Lai, R.-P. Pan, and C.-L. Pan, Opt. Lett. 33, 1174 (2008).
    [CrossRef] [PubMed]
  7. P. A. R. Ade, A. E. Costley, C. T. Cunningham, C. L. Mok, G. F. Neill, and T. J. Parker, Infrared Phys. 19, 599 (1979).
    [CrossRef]
  8. A. E. Costley, K. H. Hursey, G. F. Neill, and J. M. Wald, J. Opt. Soc. Am. 67, 979 (1977).
    [CrossRef]
  9. T. Kondo, T. Nagashima, and M. Hangyo, Jpn. J. Appl. Phys. Part 2 42, L373 (2003).
    [CrossRef]
  10. V. S. Cherkassky, B. A. Knyazev, G. N. Kulipanov, A. N. Matveenko, P. D. Rudych, and N. A. Vinokurov, Int. J. Infrared Millim. Waves 28, 219 (2007).
    [CrossRef]
  11. M. G. Moharam and T. K. Gaylord, J. Opt. Soc. Am. 73, 451 (1983).
    [CrossRef]
  12. M. G. Moharam and T. K. Gaylord, J. Opt. Soc. Am. A 3, 1780 (1986).
    [CrossRef]
  13. C. J. Smithells, Metal Reference Book, 5th ed. (Butterworths, 1976).
  14. M. A. Ordal, L. L. Long, R. J. Bell, S. E. Bell, R. R. Bell, R. W. Alexander, Jr., and C. A. Ward, Appl. Opt. 22, 1099 (1983).
    [CrossRef] [PubMed]
  15. T. Nagashima and M. Hangyo, Appl. Phys. Lett. 79, 3917 (2001).
    [CrossRef]
  16. E. Hecht, Optics (Addison-Wesley, 1990).

2008

2007

V. S. Cherkassky, B. A. Knyazev, G. N. Kulipanov, A. N. Matveenko, P. D. Rudych, and N. A. Vinokurov, Int. J. Infrared Millim. Waves 28, 219 (2007).
[CrossRef]

2005

M. Hangyo, M. Tani, and T. Nagashima, Int. J. Infrared Millim. Waves 26, 1661 (2005).
[CrossRef]

2003

T. Kondo, T. Nagashima, and M. Hangyo, Jpn. J. Appl. Phys. Part 2 42, L373 (2003).
[CrossRef]

2001

T. Nagashima and M. Hangyo, Appl. Phys. Lett. 79, 3917 (2001).
[CrossRef]

1995

1990

M. van Exter and D. Grischkowsky, Phys. Rev. B 41, 12140 (1990).
[CrossRef]

E. Hecht, Optics (Addison-Wesley, 1990).

1986

1983

1979

P. A. R. Ade, A. E. Costley, C. T. Cunningham, C. L. Mok, G. F. Neill, and T. J. Parker, Infrared Phys. 19, 599 (1979).
[CrossRef]

1977

1976

C. J. Smithells, Metal Reference Book, 5th ed. (Butterworths, 1976).

Ade, P. A. R.

P. A. R. Ade, A. E. Costley, C. T. Cunningham, C. L. Mok, G. F. Neill, and T. J. Parker, Infrared Phys. 19, 599 (1979).
[CrossRef]

Alexander, R. W.

Bell, R. J.

Bell, R. R.

Bell, S. E.

Cherkassky, V. S.

V. S. Cherkassky, B. A. Knyazev, G. N. Kulipanov, A. N. Matveenko, P. D. Rudych, and N. A. Vinokurov, Int. J. Infrared Millim. Waves 28, 219 (2007).
[CrossRef]

Costley, A. E.

P. A. R. Ade, A. E. Costley, C. T. Cunningham, C. L. Mok, G. F. Neill, and T. J. Parker, Infrared Phys. 19, 599 (1979).
[CrossRef]

A. E. Costley, K. H. Hursey, G. F. Neill, and J. M. Wald, J. Opt. Soc. Am. 67, 979 (1977).
[CrossRef]

Cunningham, C. T.

P. A. R. Ade, A. E. Costley, C. T. Cunningham, C. L. Mok, G. F. Neill, and T. J. Parker, Infrared Phys. 19, 599 (1979).
[CrossRef]

Gaylord, T. K.

Grischkowsky, D.

M. van Exter and D. Grischkowsky, Phys. Rev. B 41, 12140 (1990).
[CrossRef]

Hangyo, M.

M. Hangyo, M. Tani, and T. Nagashima, Int. J. Infrared Millim. Waves 26, 1661 (2005).
[CrossRef]

T. Kondo, T. Nagashima, and M. Hangyo, Jpn. J. Appl. Phys. Part 2 42, L373 (2003).
[CrossRef]

T. Nagashima and M. Hangyo, Appl. Phys. Lett. 79, 3917 (2001).
[CrossRef]

Hecht, E.

E. Hecht, Optics (Addison-Wesley, 1990).

Ho, I.

Hsieh, C.

Hsieh, C.-F.

Hu, B. B.

Hursey, K. H.

Knyazev, B. A.

V. S. Cherkassky, B. A. Knyazev, G. N. Kulipanov, A. N. Matveenko, P. D. Rudych, and N. A. Vinokurov, Int. J. Infrared Millim. Waves 28, 219 (2007).
[CrossRef]

Kondo, T.

T. Kondo, T. Nagashima, and M. Hangyo, Jpn. J. Appl. Phys. Part 2 42, L373 (2003).
[CrossRef]

Kulipanov, G. N.

V. S. Cherkassky, B. A. Knyazev, G. N. Kulipanov, A. N. Matveenko, P. D. Rudych, and N. A. Vinokurov, Int. J. Infrared Millim. Waves 28, 219 (2007).
[CrossRef]

Lai, Y.-C.

Li, Y.

Lin, C.

Long, L. L.

Matveenko, A. N.

V. S. Cherkassky, B. A. Knyazev, G. N. Kulipanov, A. N. Matveenko, P. D. Rudych, and N. A. Vinokurov, Int. J. Infrared Millim. Waves 28, 219 (2007).
[CrossRef]

Moharam, M. G.

Mok, C. L.

P. A. R. Ade, A. E. Costley, C. T. Cunningham, C. L. Mok, G. F. Neill, and T. J. Parker, Infrared Phys. 19, 599 (1979).
[CrossRef]

Nagashima, T.

M. Hangyo, M. Tani, and T. Nagashima, Int. J. Infrared Millim. Waves 26, 1661 (2005).
[CrossRef]

T. Kondo, T. Nagashima, and M. Hangyo, Jpn. J. Appl. Phys. Part 2 42, L373 (2003).
[CrossRef]

T. Nagashima and M. Hangyo, Appl. Phys. Lett. 79, 3917 (2001).
[CrossRef]

Neill, G. F.

P. A. R. Ade, A. E. Costley, C. T. Cunningham, C. L. Mok, G. F. Neill, and T. J. Parker, Infrared Phys. 19, 599 (1979).
[CrossRef]

A. E. Costley, K. H. Hursey, G. F. Neill, and J. M. Wald, J. Opt. Soc. Am. 67, 979 (1977).
[CrossRef]

Nuss, M. C.

Ordal, M. A.

Pan, C.

Pan, C.-L.

Pan, R.

Pan, R.-P.

Parker, T. J.

P. A. R. Ade, A. E. Costley, C. T. Cunningham, C. L. Mok, G. F. Neill, and T. J. Parker, Infrared Phys. 19, 599 (1979).
[CrossRef]

Rudych, P. D.

V. S. Cherkassky, B. A. Knyazev, G. N. Kulipanov, A. N. Matveenko, P. D. Rudych, and N. A. Vinokurov, Int. J. Infrared Millim. Waves 28, 219 (2007).
[CrossRef]

Smithells, C. J.

C. J. Smithells, Metal Reference Book, 5th ed. (Butterworths, 1976).

Tani, M.

M. Hangyo, M. Tani, and T. Nagashima, Int. J. Infrared Millim. Waves 26, 1661 (2005).
[CrossRef]

van Exter, M.

M. van Exter and D. Grischkowsky, Phys. Rev. B 41, 12140 (1990).
[CrossRef]

Vinokurov, N. A.

V. S. Cherkassky, B. A. Knyazev, G. N. Kulipanov, A. N. Matveenko, P. D. Rudych, and N. A. Vinokurov, Int. J. Infrared Millim. Waves 28, 219 (2007).
[CrossRef]

Wald, J. M.

Ward, C. A.

Appl. Opt.

Appl. Phys. Lett.

T. Nagashima and M. Hangyo, Appl. Phys. Lett. 79, 3917 (2001).
[CrossRef]

Infrared Phys.

P. A. R. Ade, A. E. Costley, C. T. Cunningham, C. L. Mok, G. F. Neill, and T. J. Parker, Infrared Phys. 19, 599 (1979).
[CrossRef]

Int. J. Infrared Millim. Waves

M. Hangyo, M. Tani, and T. Nagashima, Int. J. Infrared Millim. Waves 26, 1661 (2005).
[CrossRef]

V. S. Cherkassky, B. A. Knyazev, G. N. Kulipanov, A. N. Matveenko, P. D. Rudych, and N. A. Vinokurov, Int. J. Infrared Millim. Waves 28, 219 (2007).
[CrossRef]

J. Opt. Soc. Am.

J. Opt. Soc. Am. A

Jpn. J. Appl. Phys. Part 2

T. Kondo, T. Nagashima, and M. Hangyo, Jpn. J. Appl. Phys. Part 2 42, L373 (2003).
[CrossRef]

Opt. Express

Opt. Lett.

Phys. Rev. B

M. van Exter and D. Grischkowsky, Phys. Rev. B 41, 12140 (1990).
[CrossRef]

Other

C. J. Smithells, Metal Reference Book, 5th ed. (Butterworths, 1976).

E. Hecht, Optics (Addison-Wesley, 1990).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (5)

Fig. 1
Fig. 1

Wire-grid polarizer with Al grating.

Fig. 2
Fig. 2

Simulation results of TE and TM transmittances as a function of terahertz frequencies. (a) Simulation results of transmittance for Al gratings with different periods and a fill factor of 0.4. (b) Simulation results of transmittance for different fill factors. The numerals beside the curves denote the periods and fill factors.

Fig. 3
Fig. 3

Scanning electron micrograph of Al grating on Si substrate with thickness d W = 300 nm , period Λ = 3 μ m , and fill factor f 0.5 .

Fig. 4
Fig. 4

(a) Transmission spectra of the element. TE and TM indicate the polarization directions. (b) Extinction ratio.

Fig. 5
Fig. 5

(a) Transmission spectra. (b) Extinction ratio of the element at different incident angles. TE and TM indicate the polarization directions. The numerals next to the curves denote the incident angle.

Metrics