Abstract

An IR imaging system based on a microelectromechanical system (MEMS) microcantilever is uncooled, low-cost, and more reliable than traditional systems. However, it is difficult to avoid unwanted shape distortions in fabrication, which can degrade image quality in many ways, so we use holography to compensate for these shape distortions in an optical readout focal plane array (FPA) IR imaging system. The experiment shows that it is a feasible way to improve system performance, especially when it is too difficult to perfect the techniques of an FPA fabrication.

© 2009 Optical Society of America

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  1. B. Jiao, D. Chen, C. Li, S. Shi, T. Ye, Q. Zhang, Z. Guo, F. Dong, and Z. Miao, in Proceedings of IEEE First International Conference on Nano/Microengineered and Molecular Systems (MEMS) (IEEE, 2006) p. 430.
    [Crossref]
  2. Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, J. Microelectromech. Syst. 11, 136 (2002).
    [Crossref]
  3. M. Liu, Y. Zhao, X. Liu, X. Yu, X. Wang, and T. Li, Proc. SPIE 6621, 66211H (2008).
    [Crossref]

2008 (1)

M. Liu, Y. Zhao, X. Liu, X. Yu, X. Wang, and T. Li, Proc. SPIE 6621, 66211H (2008).
[Crossref]

2002 (1)

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, J. Microelectromech. Syst. 11, 136 (2002).
[Crossref]

Chen, D.

B. Jiao, D. Chen, C. Li, S. Shi, T. Ye, Q. Zhang, Z. Guo, F. Dong, and Z. Miao, in Proceedings of IEEE First International Conference on Nano/Microengineered and Molecular Systems (MEMS) (IEEE, 2006) p. 430.
[Crossref]

Dong, F.

B. Jiao, D. Chen, C. Li, S. Shi, T. Ye, Q. Zhang, Z. Guo, F. Dong, and Z. Miao, in Proceedings of IEEE First International Conference on Nano/Microengineered and Molecular Systems (MEMS) (IEEE, 2006) p. 430.
[Crossref]

Guo, Z.

B. Jiao, D. Chen, C. Li, S. Shi, T. Ye, Q. Zhang, Z. Guo, F. Dong, and Z. Miao, in Proceedings of IEEE First International Conference on Nano/Microengineered and Molecular Systems (MEMS) (IEEE, 2006) p. 430.
[Crossref]

Horowitz, R.

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, J. Microelectromech. Syst. 11, 136 (2002).
[Crossref]

Jiao, B.

B. Jiao, D. Chen, C. Li, S. Shi, T. Ye, Q. Zhang, Z. Guo, F. Dong, and Z. Miao, in Proceedings of IEEE First International Conference on Nano/Microengineered and Molecular Systems (MEMS) (IEEE, 2006) p. 430.
[Crossref]

Kitching, J.

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, J. Microelectromech. Syst. 11, 136 (2002).
[Crossref]

Li, C.

B. Jiao, D. Chen, C. Li, S. Shi, T. Ye, Q. Zhang, Z. Guo, F. Dong, and Z. Miao, in Proceedings of IEEE First International Conference on Nano/Microengineered and Molecular Systems (MEMS) (IEEE, 2006) p. 430.
[Crossref]

Li, T.

M. Liu, Y. Zhao, X. Liu, X. Yu, X. Wang, and T. Li, Proc. SPIE 6621, 66211H (2008).
[Crossref]

Liu, M.

M. Liu, Y. Zhao, X. Liu, X. Yu, X. Wang, and T. Li, Proc. SPIE 6621, 66211H (2008).
[Crossref]

Liu, X.

M. Liu, Y. Zhao, X. Liu, X. Yu, X. Wang, and T. Li, Proc. SPIE 6621, 66211H (2008).
[Crossref]

Majumdar, A.

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, J. Microelectromech. Syst. 11, 136 (2002).
[Crossref]

Mao, M.

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, J. Microelectromech. Syst. 11, 136 (2002).
[Crossref]

Miao, Z.

B. Jiao, D. Chen, C. Li, S. Shi, T. Ye, Q. Zhang, Z. Guo, F. Dong, and Z. Miao, in Proceedings of IEEE First International Conference on Nano/Microengineered and Molecular Systems (MEMS) (IEEE, 2006) p. 430.
[Crossref]

Norton, P.

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, J. Microelectromech. Syst. 11, 136 (2002).
[Crossref]

Shi, S.

B. Jiao, D. Chen, C. Li, S. Shi, T. Ye, Q. Zhang, Z. Guo, F. Dong, and Z. Miao, in Proceedings of IEEE First International Conference on Nano/Microengineered and Molecular Systems (MEMS) (IEEE, 2006) p. 430.
[Crossref]

Varesi, J.

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, J. Microelectromech. Syst. 11, 136 (2002).
[Crossref]

Wang, X.

M. Liu, Y. Zhao, X. Liu, X. Yu, X. Wang, and T. Li, Proc. SPIE 6621, 66211H (2008).
[Crossref]

Ye, T.

B. Jiao, D. Chen, C. Li, S. Shi, T. Ye, Q. Zhang, Z. Guo, F. Dong, and Z. Miao, in Proceedings of IEEE First International Conference on Nano/Microengineered and Molecular Systems (MEMS) (IEEE, 2006) p. 430.
[Crossref]

Yu, X.

M. Liu, Y. Zhao, X. Liu, X. Yu, X. Wang, and T. Li, Proc. SPIE 6621, 66211H (2008).
[Crossref]

Zhang, Q.

B. Jiao, D. Chen, C. Li, S. Shi, T. Ye, Q. Zhang, Z. Guo, F. Dong, and Z. Miao, in Proceedings of IEEE First International Conference on Nano/Microengineered and Molecular Systems (MEMS) (IEEE, 2006) p. 430.
[Crossref]

Zhao, Y.

M. Liu, Y. Zhao, X. Liu, X. Yu, X. Wang, and T. Li, Proc. SPIE 6621, 66211H (2008).
[Crossref]

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, J. Microelectromech. Syst. 11, 136 (2002).
[Crossref]

J. Microelectromech. Syst. (1)

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, J. Microelectromech. Syst. 11, 136 (2002).
[Crossref]

Proc. SPIE (1)

M. Liu, Y. Zhao, X. Liu, X. Yu, X. Wang, and T. Li, Proc. SPIE 6621, 66211H (2008).
[Crossref]

Other (1)

B. Jiao, D. Chen, C. Li, S. Shi, T. Ye, Q. Zhang, Z. Guo, F. Dong, and Z. Miao, in Proceedings of IEEE First International Conference on Nano/Microengineered and Molecular Systems (MEMS) (IEEE, 2006) p. 430.
[Crossref]

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Figures (7)

Fig. 1
Fig. 1

FPA photo from scanning electron microscope and its structure.

Fig. 2
Fig. 2

Optical readout FPA IR imaging system.

Fig. 3
Fig. 3

FPA illuminated by parallel light.

Fig. 4
Fig. 4

Recording the wavefront.

Fig. 5
Fig. 5

Reconstruction of object light.

Fig. 6
Fig. 6

FPA image of (a) parallel light illumination and (b) compensating illumination.

Fig. 7
Fig. 7

(a) Visible light image of a hot iron, (b) IR images of the hot iron captured by parallel light illumination, and (c) holographic compensating illumination.

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