Abstract
An IR imaging system based on a microelectromechanical system (MEMS) microcantilever is uncooled, low-cost, and more reliable than traditional systems. However, it is difficult to avoid unwanted shape distortions in fabrication, which can degrade image quality in many ways, so we use holography to compensate for these shape distortions in an optical readout focal plane array (FPA) IR imaging system. The experiment shows that it is a feasible way to improve system performance, especially when it is too difficult to perfect the techniques of an FPA fabrication.
© 2009 Optical Society of America
Full Article | PDF ArticleMore Like This
Yun Feng, Yuejin Zhao, Ming Liu, Liquan Dong, Xiaomei Yu, Lingqin Kong, Wei Ma, and Xiaohua Liu
Opt. Lett. 40(7) 1390-1393 (2015)
Cheng Gong, Mei Hui, Liquan Dong, Yuejin Zhao, Xiaomei Yu, and Xiaohua Liu
Opt. Lett. 37(7) 1187-1189 (2012)
Yun Feng, Yuejin Zhao, Liquan Dong, Ming Liu, Xueyan Li, Wei Ma, Xiaomei Yu, Lingqin Kong, and Xiaohua Liu
Appl. Opt. 54(34) 10189-10195 (2015)