Abstract

The influence of pulse duration on the laser drilling of metals at repetition rates of up to 1 MHz and average powers of up to 70 W has been experimentally investigated using an ytterbium-doped-fiber chirped-pulse amplification system with pulses from 800 fs to 19 ps. At a few hundred kilohertz particle shielding causes an increase in the number of pulses for breakthrough, depending on the pulse energy and duration. At higher repetition rates, the heat accumulation effect overbalances particle shielding, but significant melt ejection affects the hole quality. Using femtosecond pulses, heat accumulation starts at higher repetition rates, and the ablation efficiency is higher compared with picosecond pulses.

© 2009 Optical Society of America

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2008 (4)

A. Weck, T. H. R. Crawford, D. S. Wilkinson, H. K. Haugen, and J. S. Preston, Appl. Phys. A 90, 537 (2008).
[CrossRef]

A. K. Upadhyay, N. A. Inogamov, B. Rethfeld, and H. M. Urbassek, Phys. Rev. B 78, 045437 (2008).
[CrossRef]

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[CrossRef] [PubMed]

S. M. Eaton, H. Zhang, M. L. Ng, J. Li, W.-J. Chen, S. Ho, and P. R. Herman, Opt. Express 16, 9443 (2008).
[CrossRef] [PubMed]

2007 (1)

2006 (3)

J. Yang, Y. Zhao, and X. Zhu, Appl. Phys. Lett. 88, 094101 (2006).
[CrossRef]

J. P. Colombier, P. Combis, A. Rosenfeld, I. V. Hertel, E. Audouard, and R. Stoian, Phys. Rev. B 74, 224106 (2006).
[CrossRef]

P. Lorazo, L. J. Lewis, and M. Meunier, Phys. Rev. B 73, 134108 (2006).
[CrossRef]

2005 (2)

1999 (1)

B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, Appl. Phys. A 69, S381 (1999).
[CrossRef]

1997 (1)

1996 (2)

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, Opt. Commun. 129, 134 (1996).
[CrossRef]

1995 (1)

A. Miotello and R. Kelly, Appl. Phys. Lett. 67, 3535 (1995).
[CrossRef]

Ancona, A.

Audouard, E.

J. P. Colombier, P. Combis, A. Rosenfeld, I. V. Hertel, E. Audouard, and R. Stoian, Phys. Rev. B 74, 224106 (2006).
[CrossRef]

Chen, W. -J.

Chichkov, B. N.

S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. N. Chichkov, B. Wellegehausen, and H. Welling, J. Opt. Soc. Am. B 14, 2716 (1997).
[CrossRef]

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, Opt. Commun. 129, 134 (1996).
[CrossRef]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Chien, C. Y.

C. Y. Chien and M. C. Gupta, Appl. Phys. A 81, 1257 (2005).
[CrossRef]

Colombier, J. P.

J. P. Colombier, P. Combis, A. Rosenfeld, I. V. Hertel, E. Audouard, and R. Stoian, Phys. Rev. B 74, 224106 (2006).
[CrossRef]

Combis, P.

J. P. Colombier, P. Combis, A. Rosenfeld, I. V. Hertel, E. Audouard, and R. Stoian, Phys. Rev. B 74, 224106 (2006).
[CrossRef]

Crawford, T. H. R.

A. Weck, T. H. R. Crawford, D. S. Wilkinson, H. K. Haugen, and J. S. Preston, Appl. Phys. A 90, 537 (2008).
[CrossRef]

Eaton, S. M.

Eidam, T.

Gobert, O.

B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, Appl. Phys. A 69, S381 (1999).
[CrossRef]

Gupta, M. C.

C. Y. Chien and M. C. Gupta, Appl. Phys. A 81, 1257 (2005).
[CrossRef]

Haugen, H. K.

A. Weck, T. H. R. Crawford, D. S. Wilkinson, H. K. Haugen, and J. S. Preston, Appl. Phys. A 90, 537 (2008).
[CrossRef]

Herman, P. R.

Hertel, I. V.

J. P. Colombier, P. Combis, A. Rosenfeld, I. V. Hertel, E. Audouard, and R. Stoian, Phys. Rev. B 74, 224106 (2006).
[CrossRef]

Ho, S.

Inogamov, N. A.

A. K. Upadhyay, N. A. Inogamov, B. Rethfeld, and H. M. Urbassek, Phys. Rev. B 78, 045437 (2008).
[CrossRef]

Jacobs, H.

Kelly, R.

A. Miotello and R. Kelly, Appl. Phys. Lett. 67, 3535 (1995).
[CrossRef]

König, J.

Lewis, L. J.

P. Lorazo, L. J. Lewis, and M. Meunier, Phys. Rev. B 73, 134108 (2006).
[CrossRef]

Li, J.

Limpert, J.

Lorazo, P.

P. Lorazo, L. J. Lewis, and M. Meunier, Phys. Rev. B 73, 134108 (2006).
[CrossRef]

Meunier, M.

P. Lorazo, L. J. Lewis, and M. Meunier, Phys. Rev. B 73, 134108 (2006).
[CrossRef]

Meynadier, P.

B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, Appl. Phys. A 69, S381 (1999).
[CrossRef]

Miotello, A.

A. Miotello and R. Kelly, Appl. Phys. Lett. 67, 3535 (1995).
[CrossRef]

Momma, C.

S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. N. Chichkov, B. Wellegehausen, and H. Welling, J. Opt. Soc. Am. B 14, 2716 (1997).
[CrossRef]

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, Opt. Commun. 129, 134 (1996).
[CrossRef]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Ng, M. L.

Nolte, S.

Perdrix, M.

B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, Appl. Phys. A 69, S381 (1999).
[CrossRef]

Petite, G.

B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, Appl. Phys. A 69, S381 (1999).
[CrossRef]

Preston, J. S.

A. Weck, T. H. R. Crawford, D. S. Wilkinson, H. K. Haugen, and J. S. Preston, Appl. Phys. A 90, 537 (2008).
[CrossRef]

Rademaker, K.

Rethfeld, B.

A. K. Upadhyay, N. A. Inogamov, B. Rethfeld, and H. M. Urbassek, Phys. Rev. B 78, 045437 (2008).
[CrossRef]

Rosenfeld, A.

J. P. Colombier, P. Combis, A. Rosenfeld, I. V. Hertel, E. Audouard, and R. Stoian, Phys. Rev. B 74, 224106 (2006).
[CrossRef]

Röser, F.

Rothhardt, J.

Sallé, B.

B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, Appl. Phys. A 69, S381 (1999).
[CrossRef]

Schimpf, D. N.

Schmidt, O.

Semerok, A.

B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, Appl. Phys. A 69, S381 (1999).
[CrossRef]

Stoian, R.

J. P. Colombier, P. Combis, A. Rosenfeld, I. V. Hertel, E. Audouard, and R. Stoian, Phys. Rev. B 74, 224106 (2006).
[CrossRef]

Tünnermann, A.

Upadhyay, A. K.

A. K. Upadhyay, N. A. Inogamov, B. Rethfeld, and H. M. Urbassek, Phys. Rev. B 78, 045437 (2008).
[CrossRef]

Urbassek, H. M.

A. K. Upadhyay, N. A. Inogamov, B. Rethfeld, and H. M. Urbassek, Phys. Rev. B 78, 045437 (2008).
[CrossRef]

von Alvensleben, F.

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, Opt. Commun. 129, 134 (1996).
[CrossRef]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Weck, A.

A. Weck, T. H. R. Crawford, D. S. Wilkinson, H. K. Haugen, and J. S. Preston, Appl. Phys. A 90, 537 (2008).
[CrossRef]

Wellegehausen, B.

S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. N. Chichkov, B. Wellegehausen, and H. Welling, J. Opt. Soc. Am. B 14, 2716 (1997).
[CrossRef]

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, Opt. Commun. 129, 134 (1996).
[CrossRef]

Welling, H.

S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. N. Chichkov, B. Wellegehausen, and H. Welling, J. Opt. Soc. Am. B 14, 2716 (1997).
[CrossRef]

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, Opt. Commun. 129, 134 (1996).
[CrossRef]

Wilkinson, D. S.

A. Weck, T. H. R. Crawford, D. S. Wilkinson, H. K. Haugen, and J. S. Preston, Appl. Phys. A 90, 537 (2008).
[CrossRef]

Yang, J.

J. Yang, Y. Zhao, and X. Zhu, Appl. Phys. Lett. 88, 094101 (2006).
[CrossRef]

Zhang, H.

Zhao, Y.

J. Yang, Y. Zhao, and X. Zhu, Appl. Phys. Lett. 88, 094101 (2006).
[CrossRef]

Zhu, X.

J. Yang, Y. Zhao, and X. Zhu, Appl. Phys. Lett. 88, 094101 (2006).
[CrossRef]

Appl. Phys. A (4)

C. Y. Chien and M. C. Gupta, Appl. Phys. A 81, 1257 (2005).
[CrossRef]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

A. Weck, T. H. R. Crawford, D. S. Wilkinson, H. K. Haugen, and J. S. Preston, Appl. Phys. A 90, 537 (2008).
[CrossRef]

B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, Appl. Phys. A 69, S381 (1999).
[CrossRef]

Appl. Phys. Lett. (2)

A. Miotello and R. Kelly, Appl. Phys. Lett. 67, 3535 (1995).
[CrossRef]

J. Yang, Y. Zhao, and X. Zhu, Appl. Phys. Lett. 88, 094101 (2006).
[CrossRef]

J. Opt. Soc. Am. B (1)

Opt. Commun. (1)

C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, Opt. Commun. 129, 134 (1996).
[CrossRef]

Opt. Express (3)

Opt. Lett. (1)

Phys. Rev. B (3)

J. P. Colombier, P. Combis, A. Rosenfeld, I. V. Hertel, E. Audouard, and R. Stoian, Phys. Rev. B 74, 224106 (2006).
[CrossRef]

P. Lorazo, L. J. Lewis, and M. Meunier, Phys. Rev. B 73, 134108 (2006).
[CrossRef]

A. K. Upadhyay, N. A. Inogamov, B. Rethfeld, and H. M. Urbassek, Phys. Rev. B 78, 045437 (2008).
[CrossRef]

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Figures (3)

Fig. 1
Fig. 1

Percussion drilling of 0.5-mm-thick stainless steel (Fe/Cr18Ni10) samples. Number of pulses to breakthrough as a function of the repetition rate for different pulse durations and pulse energies: 30 (squares), 50 (circles), and 70 (triangles) μ J , corresponding to fluencies of 13.3, 22.1, and 30.9   J   cm 2 , respectively.

Fig. 2
Fig. 2

SEM images of the hole entrances in stainless steel (thermal conductivity: 0.16   W   cm 1 K 1 ) at 50 μ J , (a) 800 fs and 200 kHz, (b) 19 ps and 300 kHz, and in copper (thermal conductivity: 3.86   W   cm 1 K 1 ) at 50 μ J , (c) 800 fs and 975 kHz, (d) 19 ps and 975 kHz.

Fig. 3
Fig. 3

Percussion drilling of 0.5-mm-thick copper (99.9%) samples. Number of pulses to breakthrough as a function of the repetition rate for different pulse durations and pulse energies: 30 (squares), 50 (circles), and 70 (triangles) μ J .

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