Abstract

An active control method is proposed and demonstrated to improve grating-based laser interferometry to achieve low-noise (subpicometer resolution) and multiwavelength unambiguous range of operation simultaneously. The method modifies a recurrent calibration-based path stabilization algorithm to extract high-resolution and low-resolution data in parallel. This extended range recurrent calibration method is experimentally verified by implementing it on the micromachined scanning grating interferometer (μSGI).

© 2009 Optical Society of America

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2009 (1)

A. A. Kamshilin, R. V. Romashko, and Y. N. Kulchin, J. Appl. Phys. 105, 031101 (2009).
[CrossRef]

2008 (1)

O. G. Karhade, F. L. Degertekin, and T. R. Kurfess, J. Micromech. Microeng. 18, 045007 (2008).
[CrossRef]

2007 (4)

O. Ferhanoglu, M. F. Toy, and H. Urey, IEEE Photon. Technol. Lett. 19, 1895 (2007).
[CrossRef]

S. Hung, E. Hwu, M. Chen, and L. Fu, IEEE/ASME Trans. Mechatron. 12, 291 (2007).
[CrossRef]

B. Van Gorp, A. Onaran, and F. Degertekin, Appl. Phys. Lett. 91, 083101 (2007).
[CrossRef]

B. Kim, F. L. Degertekin, and T. R. Kurfess, J. Micromech. Microeng. 17, 1888 (2007).
[CrossRef]

2000 (1)

1995 (1)

1994 (1)

1987 (3)

Chen, M.

S. Hung, E. Hwu, M. Chen, and L. Fu, IEEE/ASME Trans. Mechatron. 12, 291 (2007).
[CrossRef]

Culshaw, B.

B. Culshaw, Optical Fiber Sensing and Signal Processing (Peregrinus, 1984).

De Groot, P.

Degertekin, F.

B. Van Gorp, A. Onaran, and F. Degertekin, Appl. Phys. Lett. 91, 083101 (2007).
[CrossRef]

Degertekin, F. L.

O. G. Karhade, F. L. Degertekin, and T. R. Kurfess, J. Micromech. Microeng. 18, 045007 (2008).
[CrossRef]

B. Kim, F. L. Degertekin, and T. R. Kurfess, J. Micromech. Microeng. 17, 1888 (2007).
[CrossRef]

O. G. Karhade, F. L. Degertekin, and T. R. Kurfess, IEEE/ASME Trans. Mechatron., DOI: 10.1109/TMECH.2009.2011897 (to be published).

Docchio, F.

E. Gelmini, U. Minoni, and F. Docchio, SPIE Milestone Series (SPIE, 1995), Vol. 115, pp. 649-651.

Ferhanoglu, O.

O. Ferhanoglu, M. F. Toy, and H. Urey, IEEE Photon. Technol. Lett. 19, 1895 (2007).
[CrossRef]

Frejlich, J.

Freschi, A. A.

Fu, L.

S. Hung, E. Hwu, M. Chen, and L. Fu, IEEE/ASME Trans. Mechatron. 12, 291 (2007).
[CrossRef]

Gelmini, E.

E. Gelmini, U. Minoni, and F. Docchio, SPIE Milestone Series (SPIE, 1995), Vol. 115, pp. 649-651.

Hung, S.

S. Hung, E. Hwu, M. Chen, and L. Fu, IEEE/ASME Trans. Mechatron. 12, 291 (2007).
[CrossRef]

Hwu, E.

S. Hung, E. Hwu, M. Chen, and L. Fu, IEEE/ASME Trans. Mechatron. 12, 291 (2007).
[CrossRef]

Kamshilin, A. A.

A. A. Kamshilin, R. V. Romashko, and Y. N. Kulchin, J. Appl. Phys. 105, 031101 (2009).
[CrossRef]

Karhade, O. G.

O. G. Karhade, F. L. Degertekin, and T. R. Kurfess, J. Micromech. Microeng. 18, 045007 (2008).
[CrossRef]

O. G. Karhade, F. L. Degertekin, and T. R. Kurfess, IEEE/ASME Trans. Mechatron., DOI: 10.1109/TMECH.2009.2011897 (to be published).

Katzir, Y.

Kim, B.

B. Kim, F. L. Degertekin, and T. R. Kurfess, J. Micromech. Microeng. 17, 1888 (2007).
[CrossRef]

Kulchin, Y. N.

A. A. Kamshilin, R. V. Romashko, and Y. N. Kulchin, J. Appl. Phys. 105, 031101 (2009).
[CrossRef]

Kurfess, T. R.

O. G. Karhade, F. L. Degertekin, and T. R. Kurfess, J. Micromech. Microeng. 18, 045007 (2008).
[CrossRef]

B. Kim, F. L. Degertekin, and T. R. Kurfess, J. Micromech. Microeng. 17, 1888 (2007).
[CrossRef]

O. G. Karhade, F. L. Degertekin, and T. R. Kurfess, IEEE/ASME Trans. Mechatron., DOI: 10.1109/TMECH.2009.2011897 (to be published).

Lee, B. S.

Liu, J.

Minoni, U.

E. Gelmini, U. Minoni, and F. Docchio, SPIE Milestone Series (SPIE, 1995), Vol. 115, pp. 649-651.

Mnatzakanian, S.

Nara, M.

Onaran, A.

B. Van Gorp, A. Onaran, and F. Degertekin, Appl. Phys. Lett. 91, 083101 (2007).
[CrossRef]

Romashko, R. V.

A. A. Kamshilin, R. V. Romashko, and Y. N. Kulchin, J. Appl. Phys. 105, 031101 (2009).
[CrossRef]

Spicer, J. B.

Strand, T.

Strand, T. C.

Toy, M. F.

O. Ferhanoglu, M. F. Toy, and H. Urey, IEEE Photon. Technol. Lett. 19, 1895 (2007).
[CrossRef]

Urey, H.

O. Ferhanoglu, M. F. Toy, and H. Urey, IEEE Photon. Technol. Lett. 19, 1895 (2007).
[CrossRef]

Van Gorp, B.

B. Van Gorp, A. Onaran, and F. Degertekin, Appl. Phys. Lett. 91, 083101 (2007).
[CrossRef]

Wagner, J. W.

Yamaguchi, I.

Yoshino, T.

Appl. Opt. (4)

Appl. Phys. Lett. (1)

B. Van Gorp, A. Onaran, and F. Degertekin, Appl. Phys. Lett. 91, 083101 (2007).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

O. Ferhanoglu, M. F. Toy, and H. Urey, IEEE Photon. Technol. Lett. 19, 1895 (2007).
[CrossRef]

IEEE/ASME Trans. Mechatron. (1)

S. Hung, E. Hwu, M. Chen, and L. Fu, IEEE/ASME Trans. Mechatron. 12, 291 (2007).
[CrossRef]

J. Appl. Phys. (1)

A. A. Kamshilin, R. V. Romashko, and Y. N. Kulchin, J. Appl. Phys. 105, 031101 (2009).
[CrossRef]

J. Micromech. Microeng. (2)

B. Kim, F. L. Degertekin, and T. R. Kurfess, J. Micromech. Microeng. 17, 1888 (2007).
[CrossRef]

O. G. Karhade, F. L. Degertekin, and T. R. Kurfess, J. Micromech. Microeng. 18, 045007 (2008).
[CrossRef]

J. Opt. Soc. Am. B (1)

Opt. Lett. (1)

Other (3)

B. Culshaw, Optical Fiber Sensing and Signal Processing (Peregrinus, 1984).

E. Gelmini, U. Minoni, and F. Docchio, SPIE Milestone Series (SPIE, 1995), Vol. 115, pp. 649-651.

O. G. Karhade, F. L. Degertekin, and T. R. Kurfess, IEEE/ASME Trans. Mechatron., DOI: 10.1109/TMECH.2009.2011897 (to be published).

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Figures (3)

Fig. 1
Fig. 1

(a) Schematic of the tunable grating microinterferometer and its control. (b) Normalized optical intensity curve for the first diffraction order.

Fig. 2
Fig. 2

Schematic of (a) recurrent calibration based control algorithm, (b) detailed view of integral controller with gain reversal and nonlinearity compensation with long-range detection algorithm, and (c) experimental setup.

Fig. 3
Fig. 3

Experimental verification of long-range detection algorithm.

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