Abstract

We deal with the recent progress in the fabrication of the graded Co/C multilayer mirrors to be used in a 21× Schwarzschild objective (SO) operating at the wavelengths near 4.5 nm (“carbon window” region). The peak reflectivity of flat Co/C mirrors was measured to be 14.8% (wavelength of 4.48 nm, incidence angle of 5°). The reflectivity curves of the spherical mirrors achieved 3%–6%, with the spectral matching accuracy being Δd0.008  nm (Δd/d0.3%). As a result the SO demonstrates a full working aperture (NA0.2) operation with the total throughput of 0.25%.

© 2009 Optical Society of America

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