Abstract

A two-step white-light spectral interferometric technique is used to retrieve the ellipsometric phase of a thin-film structure from the spectral interferograms recorded in a polarimetry configuration with a birefringent crystal. In the first step, the phase difference between p- and s-polarized waves propagating in the crystal alone is retrieved. In the second step, the additional phase change that the polarized waves undergo on reflection from the thin-film structure is retrieved. The new method is used in determining the thin-film thickness from ellipsometric phase measured for SiO2 thin film on a Si substrate in a range from 550to900nm. The thicknesses of three different samples obtained are compared with those resulting from polarimetric measurements, and good agreement is confirmed.

© 2009 Optical Society of America

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References

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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]

2009 (1)

2008 (3)

L. R. Watkins, Appl. Opt. 47, 2998 (2008).
[CrossRef] [PubMed]

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, Opt. Commun. 281, 2349 (2008).
[CrossRef]

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, Appl. Phys. B 92, 203 (2008).
[CrossRef]

2007 (1)

2006 (2)

1999 (1)

1997 (1)

1996 (2)

Azzam, R. M. A.

R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1977).

Bashara, N. M.

R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1977).

Brodziak, J. E.

Chaney, M.

Chlebus, R.

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, Opt. Commun. 281, 2349 (2008).
[CrossRef]

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, Appl. Phys. B 92, 203 (2008).
[CrossRef]

Ciprian, D.

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, Appl. Phys. B 92, 203 (2008).
[CrossRef]

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, Opt. Commun. 281, 2349 (2008).
[CrossRef]

P. Hlubina, D. Ciprian, J. Lunacek, and M. Lesnak, Opt. Express 14, 7678 (2006).
[CrossRef] [PubMed]

P. Hlubina, D. Ciprian, and L. Knyblova, Opt. Commun. 260, 535 (2006).
[CrossRef]

Dändliker, R.

Davies, A.

Doi, T.

Gray, S.

Hlubina, P.

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, Appl. Phys. B 92, 203 (2008).
[CrossRef]

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, Opt. Commun. 281, 2349 (2008).
[CrossRef]

P. Hlubina, D. Ciprian, J. Lunacek, and M. Lesnak, Opt. Express 14, 7678 (2006).
[CrossRef] [PubMed]

P. Hlubina, D. Ciprian, and L. Knyblova, Opt. Commun. 260, 535 (2006).
[CrossRef]

Jellison, G. E.

G. E. Jellison, Jr., Thin Solid Films 290-291, 40 (1996).
[CrossRef]

Kim, G. H.

Kim, S. W.

Knyblova, L.

P. Hlubina, D. Ciprian, and L. Knyblova, Opt. Commun. 260, 535 (2006).
[CrossRef]

Lesnak, M.

Lunacek, J.

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, Opt. Commun. 281, 2349 (2008).
[CrossRef]

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, Appl. Phys. B 92, 203 (2008).
[CrossRef]

P. Hlubina, D. Ciprian, J. Lunacek, and M. Lesnak, Opt. Express 14, 7678 (2006).
[CrossRef] [PubMed]

Medicus, K. M.

Palik, E.

E. Palik, Handbook of Optical Constants of Solids (Academic, 1985), vol. 1.

Schnell, U.

Tanimura, Y.

Toyoda, K.

Wan, Y.

Watkins, L. R.

Zhao, X.

Zheng, Z.

Zhu, J.

Appl. Opt. (5)

Appl. Phys. B (1)

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, Appl. Phys. B 92, 203 (2008).
[CrossRef]

Opt. Commun. (2)

P. Hlubina, D. Ciprian, and L. Knyblova, Opt. Commun. 260, 535 (2006).
[CrossRef]

P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, Opt. Commun. 281, 2349 (2008).
[CrossRef]

Opt. Express (1)

Opt. Lett. (1)

Thin Solid Films (1)

G. E. Jellison, Jr., Thin Solid Films 290-291, 40 (1996).
[CrossRef]

Other (2)

R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1977).

E. Palik, Handbook of Optical Constants of Solids (Academic, 1985), vol. 1.

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Figures (4)

Fig. 1
Fig. 1

Experimental setup with a polarimetry configuration and a birefringent crystal.

Fig. 2
Fig. 2

Measured spectral signal for a birefringent quartz crystal and its change due to the third sample of a thin-film structure ( α 45 ° ) .

Fig. 3
Fig. 3

Measured ellipsometric phase Δ ( λ ) as a function of wavelength for three different samples ( α 45 ° ) . The curves without ripples theory.

Fig. 4
Fig. 4

Measured and theoretical reflectance ratio R p ( λ ) R s ( λ ) as a function of wavelength for three different samples ( α 45 ° ) .

Equations (4)

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r p , s ( λ ) = R p , s ( λ ) exp [ i δ p , s ( λ ) ] ,
I ( λ ) = I 0 ( λ ) { 1 + V R ( λ ) cos [ ϕ BC ( λ ) ] } ,
I ( λ ) = I 0 ( λ ) { 1 + V R ( λ ) V ( λ ) cos [ ϕ BC ( λ ) + Δ ( λ ) ] } ,
R p ( λ ) R s ( λ ) = [ I p ( λ ) I bkg ( λ ) ] [ I s ( λ ) I bkg ( λ ) ] .

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