Abstract

A bandwidth-tunable filter has been demonstrated based on a micro-electro-mechanical-system (MEMS) actuated single-crystalline silicon microtoroidal resonator. Bandwidth is tuned from 2.8to78.4GHz by voltage control, the largest bandwidth tuning range reported to date to our knowledge in resonator-based filters. A 21.8dB extinction ratio is attained as a dynamic add–drop filter.

© 2009 Optical Society of America

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2007 (3)

B. Zhang, D. Leuenberger, M.-C. M. Lee, A. E. Willner, and M. C. Wu, IEEE Photonics Tech. Lett. 19, 1508 (2007).
[CrossRef]

J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, IEEE J. Sel. Top. Quantum Electron. 13, 202 (2007).
[CrossRef]

L. Chen, N. Sherwood-Droz, and M. Lipson, Opt. Lett. 32, 3361 (2007).
[CrossRef] [PubMed]

2006 (1)

2004 (2)

K. Yu and O. Solgaard, IEEE J. Sel. Top. Quantum Electron. 10, 588 (2004).
[CrossRef]

X. Dong, P. Shum, N. Q. Ngo, C. Zhao, J. Yang, and C. C. Chan, Microwave Opt. Technol. Lett. 41, 22 (2004).
[CrossRef]

2002 (1)

1997 (2)

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J. P. Laine, J. Lightwave Technol. 15, 998 (1997).
[CrossRef]

D. Rafizadeh, J. P. Zhang, S. C. Hagness, A. Taflove, K. A. Stair, S. T. Ho, and R. C. Tiberio, Opt. Lett. 22, 1244 (1997).
[CrossRef] [PubMed]

Chan, C. C.

X. Dong, P. Shum, N. Q. Ngo, C. Zhao, J. Yang, and C. C. Chan, Microwave Opt. Technol. Lett. 41, 22 (2004).
[CrossRef]

Chen, L.

Chu, S. T.

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J. P. Laine, J. Lightwave Technol. 15, 998 (1997).
[CrossRef]

Dong, X.

X. Dong, P. Shum, N. Q. Ngo, C. Zhao, J. Yang, and C. C. Chan, Microwave Opt. Technol. Lett. 41, 22 (2004).
[CrossRef]

Foresi, J.

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J. P. Laine, J. Lightwave Technol. 15, 998 (1997).
[CrossRef]

Hagness, S. C.

Haus, H. A.

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J. P. Laine, J. Lightwave Technol. 15, 998 (1997).
[CrossRef]

Ho, S. T.

Laine, J. P.

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J. P. Laine, J. Lightwave Technol. 15, 998 (1997).
[CrossRef]

Lee, M. C.

Lee, M.-C. M.

B. Zhang, D. Leuenberger, M.-C. M. Lee, A. E. Willner, and M. C. Wu, IEEE Photonics Tech. Lett. 19, 1508 (2007).
[CrossRef]

J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, IEEE J. Sel. Top. Quantum Electron. 13, 202 (2007).
[CrossRef]

J. Yao, M.-C. M. Lee, D. Leuenberger, and M. C. Wu, paper presented at the 2006 Optical Fiber Communication Conference and National Fiber Optic Engineers Conference, Anaheim, California, 5-10 March 2006.

Leuenberger, D.

B. Zhang, D. Leuenberger, M.-C. M. Lee, A. E. Willner, and M. C. Wu, IEEE Photonics Tech. Lett. 19, 1508 (2007).
[CrossRef]

J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, IEEE J. Sel. Top. Quantum Electron. 13, 202 (2007).
[CrossRef]

J. Yao, M.-C. M. Lee, D. Leuenberger, and M. C. Wu, paper presented at the 2006 Optical Fiber Communication Conference and National Fiber Optic Engineers Conference, Anaheim, California, 5-10 March 2006.

Lipson, M.

Little, B. E.

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J. P. Laine, J. Lightwave Technol. 15, 998 (1997).
[CrossRef]

Ngo, N. Q.

X. Dong, P. Shum, N. Q. Ngo, C. Zhao, J. Yang, and C. C. Chan, Microwave Opt. Technol. Lett. 41, 22 (2004).
[CrossRef]

Pan, Z.

Rafizadeh, D.

Sherwood-Droz, N.

Shum, P.

X. Dong, P. Shum, N. Q. Ngo, C. Zhao, J. Yang, and C. C. Chan, Microwave Opt. Technol. Lett. 41, 22 (2004).
[CrossRef]

Solgaard, O.

K. Yu and O. Solgaard, IEEE J. Sel. Top. Quantum Electron. 10, 588 (2004).
[CrossRef]

Stair, K. A.

Taflove, A.

Tiberio, R. C.

Willner, A. E.

B. Zhang, D. Leuenberger, M.-C. M. Lee, A. E. Willner, and M. C. Wu, IEEE Photonics Tech. Lett. 19, 1508 (2007).
[CrossRef]

Q. Yu, Z. Pan, L.-S. Yan, and A. E. Willner, J. Lightwave Technol. 20, 2267 (2002).
[CrossRef]

Wu, M. C.

B. Zhang, D. Leuenberger, M.-C. M. Lee, A. E. Willner, and M. C. Wu, IEEE Photonics Tech. Lett. 19, 1508 (2007).
[CrossRef]

J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, IEEE J. Sel. Top. Quantum Electron. 13, 202 (2007).
[CrossRef]

M. C. Lee and M. C. Wu, Opt. Lett. 31, 2444 (2006).
[CrossRef] [PubMed]

J. Yao, M.-C. M. Lee, D. Leuenberger, and M. C. Wu, paper presented at the 2006 Optical Fiber Communication Conference and National Fiber Optic Engineers Conference, Anaheim, California, 5-10 March 2006.

Yan, L.-S.

Yang, J.

X. Dong, P. Shum, N. Q. Ngo, C. Zhao, J. Yang, and C. C. Chan, Microwave Opt. Technol. Lett. 41, 22 (2004).
[CrossRef]

Yao, J.

J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, IEEE J. Sel. Top. Quantum Electron. 13, 202 (2007).
[CrossRef]

J. Yao, M.-C. M. Lee, D. Leuenberger, and M. C. Wu, paper presented at the 2006 Optical Fiber Communication Conference and National Fiber Optic Engineers Conference, Anaheim, California, 5-10 March 2006.

Yu, K.

K. Yu and O. Solgaard, IEEE J. Sel. Top. Quantum Electron. 10, 588 (2004).
[CrossRef]

Yu, Q.

Zhang, B.

B. Zhang, D. Leuenberger, M.-C. M. Lee, A. E. Willner, and M. C. Wu, IEEE Photonics Tech. Lett. 19, 1508 (2007).
[CrossRef]

Zhang, J. P.

Zhao, C.

X. Dong, P. Shum, N. Q. Ngo, C. Zhao, J. Yang, and C. C. Chan, Microwave Opt. Technol. Lett. 41, 22 (2004).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (2)

K. Yu and O. Solgaard, IEEE J. Sel. Top. Quantum Electron. 10, 588 (2004).
[CrossRef]

J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, IEEE J. Sel. Top. Quantum Electron. 13, 202 (2007).
[CrossRef]

IEEE Photonics Tech. Lett. (1)

B. Zhang, D. Leuenberger, M.-C. M. Lee, A. E. Willner, and M. C. Wu, IEEE Photonics Tech. Lett. 19, 1508 (2007).
[CrossRef]

J. Lightwave Technol. (2)

Q. Yu, Z. Pan, L.-S. Yan, and A. E. Willner, J. Lightwave Technol. 20, 2267 (2002).
[CrossRef]

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J. P. Laine, J. Lightwave Technol. 15, 998 (1997).
[CrossRef]

Microwave Opt. Technol. Lett. (1)

X. Dong, P. Shum, N. Q. Ngo, C. Zhao, J. Yang, and C. C. Chan, Microwave Opt. Technol. Lett. 41, 22 (2004).
[CrossRef]

Opt. Lett. (3)

Other (1)

J. Yao, M.-C. M. Lee, D. Leuenberger, and M. C. Wu, paper presented at the 2006 Optical Fiber Communication Conference and National Fiber Optic Engineers Conference, Anaheim, California, 5-10 March 2006.

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Figures (5)

Fig. 1
Fig. 1

(a) Schematic of the microtoroidal resonator tunable filter. (b) SEM of a fabricated microtoroidal resonator, with the inlet showing the toroid edge.

Fig. 2
Fig. 2

(a) Measured spectral response of the through and the drop port at actuation voltages of 32.8 V . (b) Detailed spectral response around the resonant wavelength of 1552.1 nm .

Fig. 3
Fig. 3

Measured transmittance versus actuation voltages at the resonant wavelength of 1552.1 nm .

Fig. 4
Fig. 4

Measured spectral response at the drop port for several actuation biases.

Fig. 5
Fig. 5

(a) Measured and modeled spectra at the drop port with the bias conditions the same as in Fig. 4. (b) Calculated unloaded Q and the power-coupling ratios versus the FWHM bandwidth of the spectra.

Equations (3)

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T through ( ω ) = j ( ω ω 0 ) + ( γ + κ 2 κ 1 ) 2 T R j ( ω ω 0 ) + ( γ + κ 2 + κ 1 ) 2 T R ,
T drop ( ω ) = κ 1 κ 2 T R j ( ω ω 0 ) + ( γ + κ 2 + κ 1 ) 2 T R ,
T drop ( ω 0 ) = κ 1 κ 2 T ( γ + κ 2 + κ 1 ) 2 T κ 1 κ 2 ( κ 2 + κ 1 ) 2 1.

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