Abstract

This paper reports on the effect of random Gaussian roughness with rms roughness values of 520μm on the terahertz reflection spectra of metallic aluminum surfaces using Fourier transform IR spectroscopy. By comparing experimental data with a theoretical model based on the Kirchhoff approximation, the rms roughness of a surface is accurately determined. The rms roughness determined by this method is in good agreement with the rms roughness measured using a stylus surface profilometer. In addition, we demonstrate that this method can be used to clearly resolve rough surfaces that differ in rms roughness by approximately 1μm.

© 2009 Optical Society of America

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    [CrossRef]
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    [PubMed]
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    [CrossRef]

2008 (1)

M. Ortolani, J. S. Lee, U. Schade, and H.-W. Hübers, Appl. Phys. Lett. 93, 081906 (2008).
[CrossRef]

2007 (1)

Z. Zhou, A. Chen, J. Zhang, L. M. Zurk, B. Orlowski, E. Thorsos, D. Winebrenner, and L. R. Dalton, Proc. SPIE 6772, 67720T1 (2007).

2006 (1)

1995 (1)

1970 (1)

Anastasi, R. F.

R. F. Anastasi and E. I. Madaras, in Proceedings of the 4th International Workshop on Ultrasonic and Advanced Methods for Nondestructive Testing and Material Characterization (2006).
[PubMed]

Beckmann, P.

P. Beckmann and A. Spizzichino, The Scattering of Electromagnetic Waves from Rough Surfaces (Artech House, 1987), pp. 80-98.

Chen, A.

Z. Zhou, A. Chen, J. Zhang, L. M. Zurk, B. Orlowski, E. Thorsos, D. Winebrenner, and L. R. Dalton, Proc. SPIE 6772, 67720T1 (2007).

Dalton, L. R.

Z. Zhou, A. Chen, J. Zhang, L. M. Zurk, B. Orlowski, E. Thorsos, D. Winebrenner, and L. R. Dalton, Proc. SPIE 6772, 67720T1 (2007).

Depew, C. A.

Dikmelik, Y.

Gatesman, A. J.

Giles, R. H.

Hübers, H.-W.

M. Ortolani, J. S. Lee, U. Schade, and H.-W. Hübers, Appl. Phys. Lett. 93, 081906 (2008).
[CrossRef]

Ikeuchi, K.

S. K Nayar, K. Ikeuchi, and T. Kanade, IEEE Transactions on Pattern Analysis and Machine Intelligence (IEEE1991), pp. 611-634.
[CrossRef]

Jansen, C.

R. Piesiewicz, C. Jansen, D. Mittleman, T. Kleine-Ostmann, M. Koch, and T. Kürner, IEEE Transactions on Antennas and Propagation (IEEE2007), pp. 3002-3009.
[CrossRef]

Kanade, T.

S. K Nayar, K. Ikeuchi, and T. Kanade, IEEE Transactions on Pattern Analysis and Machine Intelligence (IEEE1991), pp. 611-634.
[CrossRef]

Kleine-Ostmann, T.

R. Piesiewicz, C. Jansen, D. Mittleman, T. Kleine-Ostmann, M. Koch, and T. Kürner, IEEE Transactions on Antennas and Propagation (IEEE2007), pp. 3002-3009.
[CrossRef]

Koch, M.

R. Piesiewicz, C. Jansen, D. Mittleman, T. Kleine-Ostmann, M. Koch, and T. Kürner, IEEE Transactions on Antennas and Propagation (IEEE2007), pp. 3002-3009.
[CrossRef]

Kürner, T.

R. Piesiewicz, C. Jansen, D. Mittleman, T. Kleine-Ostmann, M. Koch, and T. Kürner, IEEE Transactions on Antennas and Propagation (IEEE2007), pp. 3002-3009.
[CrossRef]

Lee, J. S.

M. Ortolani, J. S. Lee, U. Schade, and H.-W. Hübers, Appl. Phys. Lett. 93, 081906 (2008).
[CrossRef]

Madaras, E. I.

R. F. Anastasi and E. I. Madaras, in Proceedings of the 4th International Workshop on Ultrasonic and Advanced Methods for Nondestructive Testing and Material Characterization (2006).
[PubMed]

Mittleman, D.

R. Piesiewicz, C. Jansen, D. Mittleman, T. Kleine-Ostmann, M. Koch, and T. Kürner, IEEE Transactions on Antennas and Propagation (IEEE2007), pp. 3002-3009.
[CrossRef]

Nayar, S. K

S. K Nayar, K. Ikeuchi, and T. Kanade, IEEE Transactions on Pattern Analysis and Machine Intelligence (IEEE1991), pp. 611-634.
[CrossRef]

Orlowski, B.

Z. Zhou, A. Chen, J. Zhang, L. M. Zurk, B. Orlowski, E. Thorsos, D. Winebrenner, and L. R. Dalton, Proc. SPIE 6772, 67720T1 (2007).

Ortolani, M.

M. Ortolani, J. S. Lee, U. Schade, and H.-W. Hübers, Appl. Phys. Lett. 93, 081906 (2008).
[CrossRef]

Piesiewicz, R.

R. Piesiewicz, C. Jansen, D. Mittleman, T. Kleine-Ostmann, M. Koch, and T. Kürner, IEEE Transactions on Antennas and Propagation (IEEE2007), pp. 3002-3009.
[CrossRef]

Schade, U.

M. Ortolani, J. S. Lee, U. Schade, and H.-W. Hübers, Appl. Phys. Lett. 93, 081906 (2008).
[CrossRef]

Spicer, J. B.

Spizzichino, A.

P. Beckmann and A. Spizzichino, The Scattering of Electromagnetic Waves from Rough Surfaces (Artech House, 1987), pp. 80-98.

Thorsos, E.

Z. Zhou, A. Chen, J. Zhang, L. M. Zurk, B. Orlowski, E. Thorsos, D. Winebrenner, and L. R. Dalton, Proc. SPIE 6772, 67720T1 (2007).

Waldman, J.

Weir, R. D.

Winebrenner, D.

Z. Zhou, A. Chen, J. Zhang, L. M. Zurk, B. Orlowski, E. Thorsos, D. Winebrenner, and L. R. Dalton, Proc. SPIE 6772, 67720T1 (2007).

Zhang, J.

Z. Zhou, A. Chen, J. Zhang, L. M. Zurk, B. Orlowski, E. Thorsos, D. Winebrenner, and L. R. Dalton, Proc. SPIE 6772, 67720T1 (2007).

Zhou, Z.

Z. Zhou, A. Chen, J. Zhang, L. M. Zurk, B. Orlowski, E. Thorsos, D. Winebrenner, and L. R. Dalton, Proc. SPIE 6772, 67720T1 (2007).

Zurk, L. M.

Z. Zhou, A. Chen, J. Zhang, L. M. Zurk, B. Orlowski, E. Thorsos, D. Winebrenner, and L. R. Dalton, Proc. SPIE 6772, 67720T1 (2007).

Appl. Opt. (1)

Appl. Phys. Lett. (1)

M. Ortolani, J. S. Lee, U. Schade, and H.-W. Hübers, Appl. Phys. Lett. 93, 081906 (2008).
[CrossRef]

J. Opt. Soc. Am. B (1)

Opt. Lett. (1)

Proc. SPIE (1)

Z. Zhou, A. Chen, J. Zhang, L. M. Zurk, B. Orlowski, E. Thorsos, D. Winebrenner, and L. R. Dalton, Proc. SPIE 6772, 67720T1 (2007).

Other (4)

P. Beckmann and A. Spizzichino, The Scattering of Electromagnetic Waves from Rough Surfaces (Artech House, 1987), pp. 80-98.

S. K Nayar, K. Ikeuchi, and T. Kanade, IEEE Transactions on Pattern Analysis and Machine Intelligence (IEEE1991), pp. 611-634.
[CrossRef]

R. Piesiewicz, C. Jansen, D. Mittleman, T. Kleine-Ostmann, M. Koch, and T. Kürner, IEEE Transactions on Antennas and Propagation (IEEE2007), pp. 3002-3009.
[CrossRef]

R. F. Anastasi and E. I. Madaras, in Proceedings of the 4th International Workshop on Ultrasonic and Advanced Methods for Nondestructive Testing and Material Characterization (2006).
[PubMed]

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Figures (2)

Fig. 1
Fig. 1

Theoretical, experimental, and Gaussian fit curve for samples (a) A1, (b) B1, and (c) C1.

Fig. 2
Fig. 2

Terahertz reflection spectra of two samples differing in rms roughness by (a) 0.19 μ m , (b) 0.63 μ m , and (c) 1.76 μ m . Inset shown for wavenumbers 20 cm 1 to 30 cm 1 with error bars.

Tables (1)

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Table 1 Comparison of rms Roughness Determined from the Surface Profilometer and Using FTIR Data

Equations (1)

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R rough = R smooth e ( 4 π σ k cos θ ) 2 ,

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