Abstract

We demonstrate a microscopic TV shearographic configuration for characterization of microsystems by measuring the slope under relatively large out-of-plane deformation. In the optical arrangement, a long working distance zoom imaging system is combined with a conventional Michelson shear interferometer. The experimental results on a microelectromechanical system pressure sensor subjected to external pressure load are presented.

© 2009 Optical Society of America

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References

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  1. Optical Inspection of Microsystems, W.Osten, ed. (CRC Press, 2007).
  2. N. Krishna Mohan and P. K. Rastogi, Opt. Lasers Eng. 47, 199 (2009).
    [CrossRef]
  3. L. Yang and P. Colbourne, Opt. Eng. 42, 1417 (2003).
    [CrossRef]
  4. U. Paul Kumar and N. Basanta Bhaduri, Opt. Lasers Eng. 46, 687 (2008).
    [CrossRef]
  5. U. Paul Kumar, N. Krishna Mohan, M. P. Kothiyal and A. K. Asundi, Opt. Eng. 48, 023601 (2009).
    [CrossRef]
  6. E. Hack, B. Frei, R. Kästle, and U. Sennhauser, Appl. Opt. 37, 2591 (1998).
    [CrossRef]
  7. Digital Speckle Pattern Interferometry and Related Techniques, P.K.Rastogi, ed. (Wiley, 2001).
  8. W. Steinchen and L. Yang, Digital Shearography: Theory and Application of Digital Speckle Pattern Shearing Interferometry (Optical Engineering, SPIE, 2003), Vol. PM100.
  9. J. Schmit and K. Creath, Appl. Opt. 35, 5642 (1996).
    [CrossRef] [PubMed]
  10. H. Aebischer and S. Waldner, Opt. Commun. 162, 205 (1999).
    [CrossRef]
  11. D. C. Ghiglia and M. D. Pritt, Two-Dimensional Phase Unwrapping: Theory, Algorithms and Software (Wiley, 1998).

2009 (2)

U. Paul Kumar, N. Krishna Mohan, M. P. Kothiyal and A. K. Asundi, Opt. Eng. 48, 023601 (2009).
[CrossRef]

N. Krishna Mohan and P. K. Rastogi, Opt. Lasers Eng. 47, 199 (2009).
[CrossRef]

2008 (1)

U. Paul Kumar and N. Basanta Bhaduri, Opt. Lasers Eng. 46, 687 (2008).
[CrossRef]

2003 (1)

L. Yang and P. Colbourne, Opt. Eng. 42, 1417 (2003).
[CrossRef]

1999 (1)

H. Aebischer and S. Waldner, Opt. Commun. 162, 205 (1999).
[CrossRef]

1998 (1)

1996 (1)

Aebischer, H.

H. Aebischer and S. Waldner, Opt. Commun. 162, 205 (1999).
[CrossRef]

Asundi, A. K.

U. Paul Kumar, N. Krishna Mohan, M. P. Kothiyal and A. K. Asundi, Opt. Eng. 48, 023601 (2009).
[CrossRef]

Basanta Bhaduri, N.

U. Paul Kumar and N. Basanta Bhaduri, Opt. Lasers Eng. 46, 687 (2008).
[CrossRef]

Colbourne, P.

L. Yang and P. Colbourne, Opt. Eng. 42, 1417 (2003).
[CrossRef]

Creath, K.

Frei, B.

Ghiglia, D. C.

D. C. Ghiglia and M. D. Pritt, Two-Dimensional Phase Unwrapping: Theory, Algorithms and Software (Wiley, 1998).

Hack, E.

Kästle, R.

Kothiyal, M. P.

U. Paul Kumar, N. Krishna Mohan, M. P. Kothiyal and A. K. Asundi, Opt. Eng. 48, 023601 (2009).
[CrossRef]

Krishna Mohan, N.

U. Paul Kumar, N. Krishna Mohan, M. P. Kothiyal and A. K. Asundi, Opt. Eng. 48, 023601 (2009).
[CrossRef]

N. Krishna Mohan and P. K. Rastogi, Opt. Lasers Eng. 47, 199 (2009).
[CrossRef]

Paul Kumar, U.

U. Paul Kumar, N. Krishna Mohan, M. P. Kothiyal and A. K. Asundi, Opt. Eng. 48, 023601 (2009).
[CrossRef]

U. Paul Kumar and N. Basanta Bhaduri, Opt. Lasers Eng. 46, 687 (2008).
[CrossRef]

Pritt, M. D.

D. C. Ghiglia and M. D. Pritt, Two-Dimensional Phase Unwrapping: Theory, Algorithms and Software (Wiley, 1998).

Rastogi, P. K.

N. Krishna Mohan and P. K. Rastogi, Opt. Lasers Eng. 47, 199 (2009).
[CrossRef]

Schmit, J.

Sennhauser, U.

Steinchen, W.

W. Steinchen and L. Yang, Digital Shearography: Theory and Application of Digital Speckle Pattern Shearing Interferometry (Optical Engineering, SPIE, 2003), Vol. PM100.

Waldner, S.

H. Aebischer and S. Waldner, Opt. Commun. 162, 205 (1999).
[CrossRef]

Yang, L.

L. Yang and P. Colbourne, Opt. Eng. 42, 1417 (2003).
[CrossRef]

W. Steinchen and L. Yang, Digital Shearography: Theory and Application of Digital Speckle Pattern Shearing Interferometry (Optical Engineering, SPIE, 2003), Vol. PM100.

Appl. Opt. (2)

Opt. Commun. (1)

H. Aebischer and S. Waldner, Opt. Commun. 162, 205 (1999).
[CrossRef]

Opt. Eng. (2)

U. Paul Kumar, N. Krishna Mohan, M. P. Kothiyal and A. K. Asundi, Opt. Eng. 48, 023601 (2009).
[CrossRef]

L. Yang and P. Colbourne, Opt. Eng. 42, 1417 (2003).
[CrossRef]

Opt. Lasers Eng. (2)

U. Paul Kumar and N. Basanta Bhaduri, Opt. Lasers Eng. 46, 687 (2008).
[CrossRef]

N. Krishna Mohan and P. K. Rastogi, Opt. Lasers Eng. 47, 199 (2009).
[CrossRef]

Other (4)

Optical Inspection of Microsystems, W.Osten, ed. (CRC Press, 2007).

Digital Speckle Pattern Interferometry and Related Techniques, P.K.Rastogi, ed. (Wiley, 2001).

W. Steinchen and L. Yang, Digital Shearography: Theory and Application of Digital Speckle Pattern Shearing Interferometry (Optical Engineering, SPIE, 2003), Vol. PM100.

D. C. Ghiglia and M. D. Pritt, Two-Dimensional Phase Unwrapping: Theory, Algorithms and Software (Wiley, 1998).

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Figures (3)

Fig. 1
Fig. 1

Schematic of a microscopic TV shearographic configuration: M, mirrors; SF, spatial filtering; CL, collimating lens; BS, beam splitters; M 2 , piezoelectric transducer mirror; A, amplifier; DAQ, digital-to-analog converter card.

Fig. 2
Fig. 2

Slope ( w / x ) fringe analysis of a MEMS pressure sensor subjected to pressure. (a) Real-time slope fringe pattern for a pressure P = 80   kPa , (b) filtered wrapped phase map, and (c) 3D plot of the slope contours.

Fig. 3
Fig. 3

(a) Line scans of slope contours along the central x direction for different pressure loadings and (b) plot of central deflection evaluated from (a) as a function of pressure, P.

Equations (2)

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Δ ϕ = 4 π λ w x Δ x ,
w x = n λ 2 Δ x ,

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