Abstract

A supercontinuum light source was incorporated into a custom-built scanning white-light interferometer. This light source based on a Nd:YAG pumped microstructured optical fiber exhibits 1.21±0.10μm temporal coherence length. The device operation was validated by characterizing the step height on a microelectromechanical system component. The measured step height—7.027±0.020μm—agreed with results obtained by employing traditional light sources: a halogen lamp and a white light-emitting diode. The new light source features high output intensity of 2035mW, which is beneficial when measuring low-reflectivity samples. As the supercontinuum light source may be modulated at frequencies exceeding 10MHz, it holds potential for stroboscopic dynamic measurements.

© 2009 Optical Society of America

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